{"id":1080,"date":"2023-03-02T06:00:32","date_gmt":"2023-03-02T06:00:32","guid":{"rendered":"http:\/\/localhost:8080\/semiconductor-front-end-process-episode-5-deposition\/"},"modified":"2026-06-15T23:12:03","modified_gmt":"2026-06-15T23:12:03","slug":"semiconductor-front-end-process-episode-5-deposition","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/semiconductor-front-end-process-episode-5-deposition\/","title":{"rendered":"[\u534a\u5bfc\u4f53\u524d\u7aef\u5de5\u827a\uff1a\u7b2c\u4e94\u7bc7] \u6c89\u79ef\u2014\u2014\u201c\u66f4\u5c0f\u3001\u66f4\u591a\u201d\uff0c\u5fae\u7ec6\u5316\u7684\u5173\u952e"},"content":{"rendered":"<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u6c89\u79ef\uff1a\u201c\u52a0\u6cd5\u5de5\u827a\u201d<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u5728\u524d\u51e0\u7bc7\u6587\u7ae0\uff0c\u6211\u4eec\u4e00\u76f4\u5728\u501f\u7528\u997c\u5e72\u70d8\u7119\u8fc7\u7a0b\u6765\u5f62\u8c61\u5730\u8bf4\u660e\u534a\u5bfc\u4f53\u5236\u7a0b \u3002\u5728\u4e0a\u4e00\u7bc7\u6211\u4eec\u8bf4\u5230\uff0c\u4e3a\u5236\u4f5c\u5de7\u514b\u529b\u5939\u5fc3\uff0c\u9700\u901a\u8fc7\u201c\u523b\u8680\u5de5\u827a\u201d\u6316\u51fa\u997c\u5e72\u7684\u4e2d\u95f4\u90e8\u5206\uff0c\u7136\u540e\u5012\u5165\u5de7\u514b\u529b\u7cd6\u6d46\uff0c\u518d\u76d6\u4e0a\u4e00\u5c42\u997c\u5e72\u5c42\u3002\u201c\u5012\u5165\u5de7\u514b\u529b\u7cd6\u6d46\u201d\u548c\u201c\u76d6\u4e0a\u997c\u5e72\u5c42\u201d\u7684\u8fc7\u7a0b\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\u5c31\u76f8\u5f53\u4e8e\u201c\u6c89\u79ef\u5de5\u827a\u201d\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9589 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170852\/SK-hynix_semiconductor-frontend-process-ep05_01.png\" alt=\"\" width=\"1000\" height=\"660\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe1\uff1a\u5012\u5165\u5de7\u514b\u529b\u7cd6\u6d46\u540e\uff0c\u518d\u76d6\u4e0a\u4e00\u5c42\u997c\u5e72\u5c42<\/p>\n<p>\u6c89\u79ef\u5de5\u827a\u975e\u5e38\u76f4\u89c2\uff1a\u5c06\u6676\u5706\u57fa\u5e95\u6295\u5165\u6c89\u79ef\u8bbe\u5907\u4e2d\uff0c\u5f85\u5f62\u6210\u5145\u5206\u7684\u8584\u819c\u540e\uff0c\u6e05\u7406\u6b8b\u4f59\u7684\u90e8\u5206\u5373\u53ef\u4ee5\u8fdb\u5165\u4e0b\u4e00\u9053\u5de5\u827a\u4e86\u3002<\/p>\n<p>\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\uff0c\u79fb\u9664\u6b8b\u4f59\u6750\u6599\u7684\u201c\u51cf\u6cd5\u5de5\u827a\u201d\u4e0d\u6b62\u201c\u523b\u8680\u201d\u4e00\u79cd\uff0c\u5f15\u5165\u5176\u4ed6\u6750\u6599\u7684\u201c\u52a0\u6cd5\u5de5\u827a\u201d\u4e5f\u975e\u201c\u6c89\u79ef\u201d\u4e00\u79cd\u3002\u6bd4\u5982\uff0c\u5149\u523b\u5de5\u827a\u4e2d\u7684\u5149\u523b\u80f6\u6d82\u6577\uff0c\u5176\u5b9e\u4e5f\u662f\u5728\u57fa\u5e95\u4e0a\u5f62\u6210\u5404\u79cd\u8584\u819c\uff1b\u53c8\u5982\u6c27\u5316\u5de5\u827a\u4e2d\u6676\u5706\uff08\u7845\uff09\u6c27\u5316\uff0c\u4e5f\u9700\u8981\u5728\u57fa\u5e95\u8868\u9762\u6dfb\u52a0\u5404\u79cd\u65b0\u6750\u6599\u3002\u90a3\u4e3a\u4ec0\u4e48\u552f\u72ec\u8981\u5f3a\u8c03\u201c\u6c89\u79ef\u201d\u5de5\u827a\u5462\uff1f<\/p>\n<p>\u8fd9\u80cc\u540e\u7684\u539f\u56e0\uff0c\u6b63\u662f\u534a\u5bfc\u4f53\u7684\u5fae\u7ec6\u5316\u8d8b\u52bf\u3002\u5982\u4eca\uff0c\u5e02\u573a\u5bf9\u7535\u5b50\u4ea7\u54c1\u7684\u6027\u80fd\u548c\u4f4e\u7535\u8017\u7684\u8981\u6c42\u8d8a\u6765\u8d8a\u9ad8\uff0c\u8fd9\u5c31\u9700\u8981\u66f4\u52a0\u201c\u5fae\u7ec6\u201d\u7684\u534a\u5bfc\u4f53\u6765\u505a\u652f\u6491\u3002\u5982\u679c\u91c7\u7528\u4f53\u79ef\u66f4\u5c0f\u3001\u8017\u80fd\u66f4\u4f4e\u7684\u534a\u5bfc\u4f53\uff0c\u5c31\u53ef\u4ee5\u5728\u7535\u5b50\u4ea7\u54c1\u4e2d\u6dfb\u52a0\u66f4\u591a\u529f\u80fd\u3002\u60f3\u5b9e\u73b0\u534a\u5bfc\u4f53\u7684\u5fae\u7ec6\u5316\uff0c\u5c31\u9700\u8981\u7531\u4e0d\u540c\u6750\u6599\u6c89\u79ef\u800c\u6210\u7684\u8584\u819c\u5c42\uff0c\u4f7f\u82af\u7247\u5185\u90e8\u4e0d\u540c\u90e8\u5206\u5404\u53f8\u5176\u804c\u3002\u91d1\u5c5e\u5c42\u5c31\u662f\u5176\u4e2d\u7684\u4e00\u79cd\u3002\u8fc7\u53bb\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u5546\u66fe\u91c7\u7528\u5bfc\u7535\u6027<sup style=\"color: #ff0000;\">* <\/sup>\u8f83\u9ad8\u7684\u94dd\u505a\u82af\u7247\u7684\u91d1\u5c5e\u5e03\u7ebf\u3002\u4f46\u968f\u7740\u94dd\u5fae\u7ec6\u5316\u6280\u672f\u9047\u5230\u74f6\u9888\uff0c\u5236\u9020\u5546\u5c31\u5229\u7528\u5bfc\u7535\u6027\u66f4\u9ad8\u7684\u94dc\u4ee3\u66ff\u94dd\u5e03\u7ebf\u3002\u4f46\u91c7\u7528\u94dc\u5c31\u51fa\u73b0\u4e86\u4e00\u4e2a\u65b0\u95ee\u9898\uff0c\u4e0e\u94dd\u4e0d\u540c\uff0c\u94dc\u4f1a\u6269\u6563\u5230\u4e0d\u5e94\u6269\u6563\u7684\u5730\u65b9\uff08\u4e8c\u6c27\u5316\u7845\uff0cSiO<sub>2<\/sub>\uff09\u3002\u4e3a\u9632\u6b62\u94dc\u6269\u6563\uff0c\u5236\u9020\u5546\u4eec\u5c31\u5fc5\u987b\u5728\u94dc\u5e03\u7ebf\u533a\u5f62\u6210\u963b\u6321\u5c42\uff0c\u5373\u4e00\u79cd\u9ad8\u8d28\u91cf\u7684\u8584\u819c\u6d82\u5c42\u3002<\/p>\n<p class=\"footnote\"><sup style=\"color: #ff0000;\">* <\/sup>\u5bfc\u7535\u6027\uff1a\u7269\u4f53\u4f20\u5bfc\u7535\u6d41\u7684\u80fd\u529b\uff1b\u91d1\u5c5e\u7b49\u6750\u6599\u7684\u5bfc\u7535\u6027\u8f83\u9ad8\u3002<\/p>\n<p>\u534a\u5bfc\u4f53\u6838\u5fc3\u5143\u4ef6\u5c42\u4e0e\u5e03\u7ebf\u5c42\u539a\u5ea6\u53ea\u6709\u5934\u53d1\u7684\u6570\u5343\u5206\u4e4b\u4e00\uff0c\u60f3\u5806\u53e0\u5982\u6b64\u5fae\u7ec6\u7684\u5143\u4ef6\u548c\u5e03\u7ebf\u5c42\uff0c\u5c31\u9700\u8981\u6c89\u79ef\u8d85\u8584\u4e14\u539a\u5ea6\u6781\u5747\u5300\u7684\u8584\u819c\u3002\u8fd9\u4e5f\u662f\u4e3a\u4ec0\u4e48\u6c89\u79ef\u6280\u672f\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u6280\u672f\u5982\u6b64\u91cd\u8981\u3002\u672c\u671f\u6587\u7ae0\u6240\u6d89\u53ca\u7684\u201c\u6c89\u79ef\u5de5\u827a\u201d\uff0c\u53c8\u79f0\u4e3a\u8584\u819c\uff08Thin film\uff09\u5de5\u827a\uff0c\u5e0c\u671b\u80fd\u4e3a\u8bfb\u8005\u63d0\u4f9b\u53c2\u8003\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u8584\u819c\u7684\u5206\u7c7b\u4e0e\u4f5c\u7528<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u201c\u52a0\u6cd5\u5de5\u827a\u201d\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\u81f3\u5173\u91cd\u8981\uff0c\u56e0\u4e3a\u534a\u5bfc\u4f53\u662f\u65e0\u6cd5\u4ec5\u51ed\u7845\u4e00\u79cd\u6750\u6599\u5b8c\u6210\u4efb\u4f55\u64cd\u4f5c\u7684\uff1a\u8584\u819c\u53ef\u4ee5\u5212\u5206\u4e24\u4e2a\u533a\u57df\uff0c\u4f7f\u5176\u4e0d\u4e92\u76f8\u5e72\u6270\uff1b\u6216\u901a\u8fc7\u4e92\u8fde\u7535\u7ebf\uff0c\u8fde\u63a5\u4e24\u4e2a\u533a\u57df\uff1b\u5fc5\u8981\u65f6\uff0c\u8fd8\u9700\u8981\u901a\u8fc7\u7279\u6b8a\u7684\u8584\u819c\u6d82\u5c42\u6765\u52a0\u5f3a\u6216\u51cf\u5f31\u7535\u573a\u7684\u529b\u5ea6\uff1b\u8fd8\u53ef\u63d0\u524d\u751f\u6210\u8584\u819c\uff0c\u4e3a\u4e0b\u4e00\u9053\u5de5\u827a\u505a\u51c6\u5907\u7b49\u3002\u63a5\u4e0b\u6765\u6211\u4eec\u5c06\u8be6\u7ec6\u8bb2\u89e3\u4e00\u4e0b\u8584\u819c\u7684\u51e0\u79cd\u4f5c\u7528\u3002<\/p>\n<p>\u4ecb\u8d28\u8584\u819c\u662f\u91cd\u8981\u7684\u534a\u5bfc\u4f53\u8584\u819c\u4e4b\u4e00\u3002\u5b83\u53ef\u7528\u4f5c\u7535\u8def\u95f4\u7684\u7edd\u7f18\u5c42\uff0c\u63a9\u853d\u534a\u5bfc\u4f53\u6838\u5fc3\u5143\u4ef6\u7684\u76f8\u4e92\u6269\u6563\u548c\u6f0f\u7535\u73b0\u8c61\uff0c\u4ece\u800c\u8fdb\u4e00\u6b65\u6539\u5584\u534a\u5bfc\u4f53\u64cd\u4f5c\u6027\u80fd\u7684\u53ef\u9760\u6027\uff1b\u5b83\u8fd8\u53ef\u7528\u4f5c\u4fdd\u62a4\u819c\uff0c\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u7684\u6700\u540e\u73af\u8282\u751f\u6210\u4fdd\u62a4\u819c\uff0c\u4fdd\u62a4\u82af\u7247\u4e0d\u53d7\u5916\u90e8\u51b2\u51fb\uff1b\u6216\u7528\u4f5c\u9694\u79bb\u819c\uff0c\u5728\u5806\u53e0\u4e00\u5c42\u5c42\u5143\u4ef6\u540e\u8fdb\u884c\u523b\u8680\u65f6\uff0c\u9632\u6b62\u65e0\u9700\u79fb\u9664\u7684\u90e8\u5206\u88ab\u523b\u8680\u3002\u6d45\u69fd\u9694\u79bb\uff08STI\uff0cShallow Trench Isolation\uff09<sup style=\"color: #ff0000;\">* <\/sup>\u548c\u91d1\u5c5e\u5c42\u95f4\u7535\u4ecb\u8d28\u5c42\uff08IMD\uff0cIntermetal Dieletric\uff09<sup style=\"color: #ff0000;\">* <\/sup>\u5c31\u662f\u5178\u578b\u7684\u4f8b\u5b50\u3002\u6c89\u79ef\u6750\u6599\u4e3b\u8981\u6709\u4e8c\u6c27\u5316\u7845\uff08SiO<sub>2<\/sub>\uff09\uff0c\u78b3\u5316\u7845\uff08SiC\uff09\u548c\u6c2e\u5316\u7845\uff08SiN\uff09\u7b49\u3002<\/p>\n<p class=\"footnote\"><sup style=\"color: #ff0000;\">* <\/sup> \u6d45\u69fd\u9694\u79bb\uff08STI\uff0cShallow Trench Isolation\uff09\uff1a\u5728\u76f8\u90bb\u7684\u5143\u4ef6\u4e4b\u95f4\u5f62\u6210\u9661\u5ced\u7684\u6c9f\u6e20\uff0c\u5728\u6c9f\u6e20\u4e2d\u586b\u5165\u6c27\u5316\u7269\u5f62\u6210\u5143\u4ef6\u9694\u79bb\u7ed3\u6784\uff0c\u4ee5\u9632\u6b62\u6f0f\u7535\u3002<br \/>\n<sup style=\"color: #ff0000;\">* <\/sup> \u91d1\u5c5e\u5c42\u95f4\u7535\u4ecb\u8d28\u5c42\uff08IMD\uff0cIntermetal Dieletric\uff09\uff1a\u963b\u6b62\u91d1\u5c5e\u5e03\u7ebf\u5c42\u4e4b\u95f4\u4e0d\u5fc5\u8981\u7535\u6d41\u7684\u6d41\u52a8\u7684\u4fdd\u62a4\u819c\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9590 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170854\/SK-hynix_semiconductor-frontend-process-ep05_02.png\" alt=\"\" width=\"1000\" height=\"700\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe2\uff1aSTI\u5728\u76f8\u90bb\u5143\u4ef6\u4e4b\u95f4\u5f62\u6210\u9661\u5ced\u6c9f\u6e20\uff0c\u9632\u6b62\u6f0f\u7535<\/p>\n<p>\u53e6\u5916\uff0c\u8fd8\u6709\u91d1\u5c5e\u8584\u819c\u3002\u82af\u7247\u5e95\u90e8\u7684\u5143\u4ef6\uff08\u6676\u4f53\u7ba1\uff09\u5982\u679c\u672a\u7ecf\u8fde\u63a5\u662f\u8d77\u4e0d\u5230\u4efb\u4f55\u4f5c\u7528\u7684\u3002\u60f3\u8981\u4f7f\u4e0d\u540c\u7684\u5143\u4ef6\u5404\u53f8\u5176\u804c\uff0c\u5fc5\u987b\u5c06\u5b83\u4eec\u4e0e\u5176\u4ed6\u5143\u4ef6\u548c\u7535\u6e90\u8fde\u63a5\u8d77\u6765\u3002\u5143\u4ef6\u7684\u8fde\u63a5\u9700\u8981\u901a\u8fc7\u949b\u3001\u94dc\u6216\u94dd\u7b49\u91d1\u5c5e\u8fdb\u884c\u5e03\u7ebf\uff0c\u8fde\u63a5\u91d1\u5c5e\u5e03\u7ebf\u548c\u5143\u4ef6\uff0c\u8fd8\u9700\u8981\u751f\u6210\u63a5\u89e6\u70b9\uff08Contact\uff09\u3002\u8fd9\u5c31\u50cf\u5bb6\u7535\u4ea7\u54c1\u4e2d\u8fde\u63a5\u7535\u5b50\u7ebf\u8def\u677f\u4e0a\u7684\u5143\u4ef6\u4e0e\u5143\u4ef6\u65f6\u9700\u710a\u63a5\u7535\u7ebf\u4e00\u6837\uff1a\u8fde\u5728\u7535\u5b50\u7ebf\u8def\u677f\u4e0a\u7684\u7535\u7ebf\u76f8\u5f53\u4e8e\u534a\u5bfc\u4f53\u7684\u91d1\u5c5e\u5e03\u7ebf\uff0c\u710a\u63a5\u70b9\u5c31\u76f8\u5f53\u4e8e\u534a\u5bfc\u4f53\u5185\u7684\u63a5\u89e6\u70b9\u3002<\/p>\n<p>\u9664\u6b64\u4e4b\u5916\uff0c\u6c89\u79ef\u5de5\u827a\u5728\u6676\u4f53\u7ba1\u7684\u9ad8\u4ecb\u7535\u6027\u8584\u819c\u548c\u7528\u4e8e\u591a\u91cd\u66dd\u5149<sup style=\"color: #ff0000;\">* <\/sup>\u7684\u786c\u63a9\u6a21\u7b49\u65b9\u9762\u5e94\u7528\u8303\u56f4\u4e5f\u975e\u5e38\u5e7f\u6cdb\u3002\u53ef\u4ee5\u8bf4\uff0c\u6c89\u79ef\u5728\u5236\u9020\u5de5\u827a\u4e2d\u65e0\u5904\u4e0d\u5728\u3002\u4e0d\u4ec5\u5982\u6b64\uff0c\u8fc7\u53bb\u6ca1\u6709\u91c7\u7528\u6c89\u79ef\u65b9\u5f0f\u7684\u5de5\u827a\u5982\u4eca\u4e5f\u5f00\u59cb\u91c7\u7528\u6c89\u79ef\u65b9\u5f0f\u3002\u9ad8\u4ecb\u7535\u6027\u8584\u819c\u5c31\u662f\u5176\u4e2d\u4e4b\u4e00\u3002\u968f\u7740\u534a\u5bfc\u4f53\u7684\u5fae\u7ec6\u5316\u53d1\u5c55\uff0c\u534a\u5bfc\u4f53\u9700\u8981\u66f4\u9ad8\u8d28\u91cf\u3001\u66f4\u7cbe\u51c6\u7684\u8584\u819c\u3002\u56e0\u6b64\uff0c\u8fc7\u53bb\u4ee5\u6c27\u5316\u5de5\u827a\u5236\u4f5c\u7684\u9ad8\u4ecb\u7535\u6027\u8584\u819c\uff0c\u5982\u4eca\u4e5f\u5f00\u59cb\u4ee5\u6c89\u79ef\u65b9\u5f0f\u5236\u4f5c\u3002<\/p>\n<p class=\"footnote\"><sup>4 <\/sup>\u591a\u91cd\u66dd\u5149\uff08Multi Patterning\uff09\uff1a\u901a\u8fc7\u91cd\u590d\u7684\u66dd\u5149\u548c\u523b\u8680\u5de5\u827a\uff0c\u8ffd\u6c42\u66f4\u9ad8\u56fe\u5f62\u5bc6\u5ea6\u548c\u66f4\u5c0f\u5de5\u827a\u8282\u70b9\u7684\u6280\u672f\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u8861\u91cf\u6c89\u79ef\u8d28\u91cf\u7684\u4e3b\u8981\u6307\u6807\uff1a\u5747\u5300\u5ea6\u3001\u53f0\u9636\u8986\u76d6\u7387\u3001\u6c9f\u69fd\u586b\u5145<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9591 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170856\/SK-hynix_semiconductor-frontend-process-ep05_03.png\" alt=\"\" width=\"1000\" height=\"600\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe3\uff1a\u9ad8\u5747\u5300\u5ea6&amp;\u4f4e\u5747\u5300\u5ea6\u7684\u793a\u4f8b<\/p>\n<p>\u5728\u8bb2\u89e3\u8584\u819c\u6c89\u79ef\u65b9\u5f0f\u4e4b\u524d\uff0c\u6211\u4eec\u5148\u6765\u4e86\u89e3\u51e0\u4e2a\u8861\u91cf\u6c89\u79ef\u8d28\u91cf\u7684\u4e3b\u8981\u6307\u6807\u3002\u8fd9\u4e9b\u6307\u6807\u4e0e\u523b\u8680\u5de5\u827a\u6709\u5f88\u591a\u76f8\u4f3c\u4e4b\u5904\u3002\u7b2c\u4e00\u4e2a\u6307\u6807\u5c31\u662f\u5747\u5300\u5ea6\u3002\u987e\u540d\u601d\u4e49\uff0c\u8be5\u6307\u6807\u5c31\u662f\u8861\u91cf\u6c89\u79ef\u8584\u819c\u539a\u5ea6\u5747\u5300\u4e0e\u5426\u7684\u53c2\u6570\u3002\u8584\u819c\u6c89\u79ef\u548c\u523b\u8680\u5de5\u827a\u4e00\u6837\uff0c\u9700\u5c06\u6574\u5f20\u6676\u5706\u653e\u5165\u6c89\u79ef\u8bbe\u5907\u4e2d\u3002\u56e0\u6b64\uff0c\u6676\u5706\u8868\u9762\u4e0d\u540c\u89d2\u843d\u7684\u6c89\u79ef\u6d82\u5c42\u6709\u53ef\u80fd\u539a\u5ea6\u4e0d\u4e00\u3002\u9ad8\u5747\u5300\u5ea6\u8868\u660e\u6676\u5706\u5404\u533a\u57df\u5f62\u6210\u7684\u8584\u819c\u539a\u5ea6\u975e\u5e38\u5747\u5300\u3002<\/p>\n<p>\u7b2c\u4e8c\u4e2a\u6307\u6807\u4e3a\u53f0\u9636\u8986\u76d6\u7387\uff08Step\u00a0Coverage\uff09\u3002\u5982\u679c\u6676\u5706\u8868\u9762\u6709\u65ad\u5c42\u6216\u51f9\u51f8\u4e0d\u5e73\u7684\u5730\u65b9\uff0c\u5c31\u4e0d\u53ef\u80fd\u5f62\u6210\u539a\u5ea6\u5747\u5300\u7684\u8584\u819c\u3002\u53f0\u9636\u8986\u76d6\u7387\u662f\u8003\u91cf\u819c\u5c42\u8de8\u53f0\u9636\u65f6\uff0c\u5728\u53f0\u9636\u5904\u539a\u5ea6\u635f\u5931\u7684\u4e00\u4e2a\u6307\u6807\uff0c\u5373\u8de8\u53f0\u9636\u5904\u7684\u819c\u5c42\u539a\u5ea6\u4e0e\u5e73\u5766\u5904\u819c\u5c42\u539a\u5ea6\u7684\u6bd4\u503c\u3002\u53f0\u9636\u8986\u76d6\u7387\u8d8a\u63a5\u8fd11\uff0c\u8868\u660e\u8de8\u53f0\u9636\u5904\uff08\u5e95\u90e8\u6216\u4fa7\u58c1\uff09\u819c\u5c42\u539a\u5ea6\u4e0e\u5e73\u5766\u5904\u819c\u5c42\u76f8\u5dee\u8d8a\u5c11\uff0c\u8d8a\u8fdc\u79bb1\uff08\u5373\u8d8a\u5c0f\u4e8e1\uff09\u8868\u660e\u8de8\u53f0\u9636\u5904\u7684\u819c\u5c42\u539a\u5ea6\u5bf9\u6bd4\u5e73\u5766\u5904\u819c\u5c42\u539a\u5ea6\u8d8a\u8584\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9592\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170859\/SK-hynix_semiconductor-frontend-process-ep05_04.png\" alt=\"\" width=\"1000\" height=\"700\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe4\uff1a\u53f0\u9636\u8986\u76d6\u7387\uff08\u4e0a\u56fe\uff09&amp; \u6c9f\u69fd\u586b\u5145\uff08\u4e0b\u56fe\uff09\u793a\u4f8b<\/p>\n<p>\u6700\u540e\u4e00\u4e2a\u6307\u6807\u662f\u6c9f\u69fd\u586b\u5145\uff08Gap\u00a0fill\uff09\u3002\u6c9f\u69fd\u586b\u5145\u662f\u8861\u91cf\u6c9f\u69fd\uff08Gap\uff09\u586b\u5145\u7a0b\u5ea6\u7684\u4e00\u4e2a\u53c2\u6570\u3002\u5982\u56fe4\u6240\u793a\uff0c\u534a\u5bfc\u4f53\u8868\u9762\u6709\u5f88\u591a\u51f9\u51f8\u4e0d\u5e73\u7684\u6c9f\u69fd\uff0c\u6c89\u79ef\u8fc7\u7a0b\u4e2d\u5f88\u96be\u4fdd\u8bc1\u53ef\u4ee5\u628a\u6240\u6709\u6c9f\u69fd\u90fd\u586b\u5f97\u4e25\u4e25\u5b9e\u5b9e\u3002\u6c9f\u69fd\u586b\u5145\u80fd\u529b\u5dee\uff0c\u5c31\u4f1a\u5f62\u6210\u5b54\u6d1e\uff08Void\uff09\uff0c\u4f1a\u5f71\u54cd\u6750\u6599\u7684\u81f4\u5bc6\u6027\uff0c\u4ece\u800c\u5f71\u54cd\u8584\u819c\u5f3a\u5ea6\uff0c\u9020\u6210\u574d\u584c\u3002\u5982\u679c\u8bf4\u201c\u7b49\u5411\u6027\u523b\u8680\u201d\u662f\u6ca1\u6709\u65b9\u5411\u9009\u62e9\u6027\u5730\u79fb\u9664\u4e86\u4e0d\u8be5\u79fb\u9664\u7684\u90e8\u5206\uff0c\u6c89\u79ef\u5de5\u827a\u4e2d\u7684\u201c\u6c9f\u69fd\u586b\u5145\u80fd\u529b\u5dee\u201d\u5373\u8868\u660e\u6ca1\u6709\u586b\u5145\u5230\u8be5\u586b\u5145\u7684\u5730\u65b9\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u6c89\u79ef\u65b9\u5f0f<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u4e0e\u524d\u9762\u6211\u4eec\u6240\u8bb2\u7684\u5de5\u827a\u76f8\u540c\uff0c\u6c89\u79ef\u5de5\u827a\u4e5f\u53ef\u5206\u4e3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff0cChemical Vapor Deposition\uff09\u548c\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff0c Physical Vapor Deposition\uff09\u3002CVD\u662f\u6307\u901a\u8fc7\u5316\u5b66\u65b9\u6cd5\u5728\u6676\u5706\u8868\u9762\u6c89\u79ef\u6d82\u5c42\u7684\u65b9\u6cd5\uff0c\u4e00\u822c\u662f\u901a\u8fc7\u7ed9\u6df7\u5408\u6c14\u4f53\u65bd\u52a0\u80fd\u91cf\u6765\u8fdb\u884c\u3002\u5047\u8bbe\u60f3\u5728\u6676\u5706\u8868\u9762\u6c89\u79ef\u7269\u8d28\uff08A\uff09\uff0c\u5219\u9700\u5148\u5411\u6c89\u79ef\u8bbe\u5907\u8f93\u5165\u53ef\u751f\u6210\u7269\u8d28\uff08A\uff09\u7684\u4e24\u79cd\u6c14\u4f53\uff08B\u548cC\uff09\uff0c\u7136\u540e\u7ed9\u6c14\u4f53\u65bd\u52a0\u80fd\u91cf\uff0c\u4fc3\u4f7f\u6c14\u4f53B\u548cC\u53d1\u751f\u5316\u5b66\u53cd\u5e94\u3002<\/p>\n<p>\u5316\u5b66\u65b9\u7a0b\u5f0f\u5982\u4e0b\uff1a<\/p>\n<p style=\"text-align: center;\"><span style=\"background-color: #d9d9d9;\"><strong>B + C + \uff08\u80fd\u91cf\u7b49\uff09 \u2192\u00a0A +\u00a0\u526f\u4ea7\u7269<\/strong><\/span><\/p>\n<p>CVD\u7684\u4f18\u70b9\u662f\u901f\u7387\u5feb\uff0c\u4e14\u7531\u4e8e\u5728\u6676\u5706\u8868\u9762\u53d1\u751f\u5316\u5b66\u53cd\u5e94\uff0c\u62e5\u6709\u4f18\u79c0\u7684\u53f0\u9636\u8986\u76d6\u7387\u3002\u4f46\u4ece\u4e0a\u8ff0\u5316\u5b66\u65b9\u7a0b\u5f0f\u4e2d\u4e0d\u96be\u770b\u51fa\uff0c\u5176\u7f3a\u70b9\u5c31\u662f\u4ea7\u751f\u526f\u4ea7\u7269\u5e9f\u6c14\u3002\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\uff0c\u5f88\u96be\u5c06\u8fd9\u4e9b\u5e9f\u6c14\u5b8c\u5168\u6392\u51fa\uff0c\u96be\u514d\u4f1a\u53c2\u6742\u4e9b\u4e0d\u7eaf\u7269\u8d28\u3002\u56e0\u6b64\uff0cCVD\u591a\u7528\u4e8e\u4e0d\u9700\u8981\u7cbe\u51c6\u628a\u63a7\u6750\u6599\u7279\u6027\u7684\u6c89\u79ef\u6d82\u5c42\uff0c\u5982\u6c89\u79ef\u5404\u79cd\u6d88\u8017\u6027\u7684\u819c\u5c42\uff08\u786c\u63a9\u6a21\uff09\u6216\u5404\u79cd\u539a\u7edd\u7f18\u8584\u819c\u7b49\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9593 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170901\/SK-hynix_semiconductor-frontend-process-ep05_05.png\" alt=\"\" width=\"1000\" height=\"738\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe5\uff1a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef vs \u7269\u7406\u6c14\u76f8\u6c89\u79ef<\/p>\n<p>PVD\u5219\u5411\u6676\u5706\u8868\u9762\u76f4\u63a5\u8f70\u51fb\u8981\u6c89\u79ef\u7684\u6750\u6599\u3002\u4e5f\u5c31\u662f\u8bf4\uff0c\u5982\u679c\u60f3\u5728\u6676\u5706\u8868\u9762\u6c89\u79efA\u7269\u8d28\uff0c\u5219\u9700\u5c06A\u7269\u8d28\u6c14\u5316\u540e\uff0c\u4f7f\u5176\u6c89\u79ef\u5230\u6676\u5706\u8868\u9762\u3002\u5e38\u7528\u7684PVD\u65b9\u6cd5\u6709\u6e85\u5c04\uff08Sputtering\uff09<sup style=\"color: #ff0000;\">* <\/sup>\uff0c\u8fd9\u5728\u523b\u8680\u5de5\u827a\u4e2d\u4e5f\u66fe\u6d89\u53ca\u8fc7\u3002\u5728\u8fd9\u79cd\u65b9\u6cd5\u4e2d\uff0c\u6211\u4eec\u5148\u5411A\u7269\u8d28\u9776\u6750\uff08Target\uff09\u8f70\u51fb\u79bb\u5b50\u675f\uff08\u4e3b\u8981\u91c7\u7528\u60f0\u6027\u6c14\u4f53\uff09\uff0c\u4f7fA\u7269\u8d28\u7c92\u5b50\u6e85\u5c04\u51fa\u6765\uff0c\u518d\u5c06\u8131\u843d\u7684\u7c92\u5b50\u8f6c\u79fb\u81f3\u7845\u7247\u8868\u9762\uff0c\u5e76\u5f62\u6210\u8584\u819c\u3002<\/p>\n<p class=\"footnote\"><sup>5 <\/sup>\u6e85\u5c04\uff08Sputtering\uff09\uff1a\u5229\u7528\u9ad8\u80fd\u91cf\u8f70\u51fb\u9776\u6750\uff0c\u4f7f\u5176\u7c92\u5b50\u79bb\u5f00\u5176\u8868\u9762\u7684\u7269\u7406\u8fc7\u7a0b\u3002<\/p>\n<p>PVD\u7684\u4f18\u70b9\u662f\u65e0\u526f\u4ea7\u7269\uff0c\u6c89\u79ef\u8584\u819c\u7684\u7eaf\u5ea6\u9ad8\uff0c\u4e14\u8fd8\u53ef\u4ee5\u6c89\u79ef\u94a8\uff08W\uff09\u3001\u94b4\uff08Co\uff09\u7b49\u65e0\u53cd\u5e94\u80fd\u529b\u7684\u7eaf\u51c0\u7269\u6750\u6599\u3002\u56e0\u6b64\uff0c\u591a\u7528\u4e8e\u7eaf\u51c0\u7269\u7684\u91d1\u5c5e\u5e03\u7ebf\u3002<\/p>\n<p>\u8fd8\u6709\u4e00\u79cd\u6bd4\u8f83\u7279\u6b8a\u7684\u65b9\u6cd5\uff0c\u5373\u539f\u5b50\u5c42\u6c89\u79ef\uff08ALD\uff0cAtomic Layer Deposition\uff09\u3002\u524d\u9762\u8bf4\u5230\u7684CVD\u548cPVD\u4e24\u79cd\u65b9\u5f0f\uff0c\u8981\u4e48\u662f\u901a\u8fc7\u6c14\u4f53\u7684\u5316\u5b66\u53cd\u5e94\u5728\u6676\u5706\u8868\u9762\u6c89\u79ef\u6240\u9700\u7269\u8d28\uff0c\u8981\u4e48\u662f\u901a\u8fc7\u8f70\u51fb\u79bb\u5b50\u675f\u7684\u7269\u7406\u8fc7\u7a0b\u6c89\u79ef\u6240\u9700\u7269\u8d28\u3002ALD\u5219\u4e0e\u4e0a\u8ff0\u4e24\u79cd\u65b9\u5f0f\u6709\u6240\u4e0d\u540c\u3002\u5982\u679c\u60f3\u7528\u8fd9\u79cd\u65b9\u6cd5\u5728\u6676\u5706\u8868\u9762\u4e0a\u6c89\u79ef\u8584\u8584\u7684\u4e00\u5c42A\u7269\u8d28\uff0c\u5219\u8981\u5148\u5907\u597d\u7ecf\u53cd\u5e94\u540e\u53ef\u751f\u6210A\u7269\u8d28\u7684\u53cd\u5e94\u7269B\u548cC\u3002\u53cd\u5e94\u7269B\u5fc5\u987b\u662f\u5bb9\u6613\u88ab\u6676\u5706\u8868\u9762\u5438\u9644\u7684\u6c14\u4f53\uff08\u524d\u9a71\u4f53\uff0cPrecursor\uff09\uff0c\u53cd\u5e94\u7269C\u5219\u5e94\u5177\u6709\u8f83\u5f3a\u7684\u53cd\u5e94\u6d3b\u6027\u3002\u5728ALD\u8fc7\u7a0b\u4e2d\uff0c\u9700\u5148\u628a\u6c14\u4f53B\u5438\u9644\u5230\u6676\u5706\u8868\u9762\uff0c\u5982\u679c\u6c14\u4f53B\u4e4b\u95f4\u5f88\u96be\u76f8\u4e92\u5438\u9644\uff0c\u6676\u5706\u8868\u9762\u5c06\u5f62\u6210\u4e00\u5c42\u7531\u6c14\u4f53B\u7ec4\u6210\u7684\u539f\u5b50\u5c42\u3002\u7136\u540e\uff0c\u9664\u53bb\u5269\u4f59\u6c14\u4f53B\u5e76\u8f93\u5165\u6c14\u4f53C\uff0c\u4f7f\u5438\u9644\u5728\u6676\u5706\u8868\u9762\u4e0a\u7684\u6c14\u4f53B\u548c\u6c14\u4f53C\u53d1\u751f\u53cd\u5e94\uff0c\u5f62\u6210A\u7269\u8d28\u548c\u5176\u4ed6\u526f\u4ea7\u7269\u6c14\u4f53\uff0c\u518d\u9664\u53bb\u591a\u4f59\u7684\u6c14\u4f53A\u548c\u526f\u4ea7\u7269\u6c14\u4f53\u3002\u4e0d\u65ad\u53cd\u590d\u4e0a\u8ff0\u8fc7\u7a0b\uff0c\u4ee5\u5355\u539f\u5b50\u819c\u5f62\u5f0f\u4e00\u5c42\u4e00\u5c42\u5730\u5728\u57fa\u5e95\u8868\u9762\u9540\u819c\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9594 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170904\/SK-hynix_semiconductor-frontend-process-ep05_06.png\" alt=\"\" width=\"1000\" height=\"660\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe6\uff1a\u4f20\u7edfCVD vs ALD\u00a0 \uff08\u6458\u81ea:\uff08\u682a\uff09\u56fe\u4e66\u51fa\u7248HANOL\u51fa\u7248\u793e[\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u7684\u7406\u89e3293p]\uff09<\/p>\n<p>ALD\u7684\u6700\u5927\u4f18\u52bf\u5728\u4e8e\u6c89\u79ef\u5c42\u6781\u5747\u5300\u7684\u539a\u5ea6\u4e0e\u4f18\u5f02\u7684\u53f0\u9636\u8986\u76d6\u7387\u3002\u6c14\u6001\u524d\u9a71\u4f53\u53ef\u7eb5\u6a2a\u5438\u9644\uff0c\u4e14ALD\u4e00\u4e2a\u5468\u671f\u53ea\u6c89\u79ef\u4e00\u5c42\u539f\u5b50\u5c42\u3002\u4f46\u6b63\u662f\u56e0\u4e3a\u5355\u539f\u5b50\u5c42\u9700\u8981\u9010\u6b21\u6c89\u79ef\uff0c\u6c89\u79ef\u901f\u7387\u4e5f\u5c31\u6162\u4e86\u4e0b\u6765\u3002\u56e0\u6b64\uff0cADL\u591a\u7528\u4e8eDRAM\u7535\u5bb9\u5668\u7b49\u7eb5\u6a2a\u6bd4<sup style=\"color: #ff0000;\">* <\/sup>\u9ad8\uff0c\u9700\u8981\u9ad8\u8d28\u91cf\u819c\u5c42\u7684\u533a\u57df\u3002<\/p>\n<p class=\"footnote\"><sup style=\"color: #ff0000;\">* <\/sup> \u7eb5\u6a2a\u6bd4 \uff1a\u9ad8\u5ea6\u4e0e\u5bbd\u5ea6\u7684\u6bd4\u503c\uff0c\u7eb5\u6a2a\u6bd4\u9ad8\u8868\u793a\u7ed3\u6784\u7269\u7684\u5bbd\u5ea6\u76f8\u5bf9\u8f83\u7a84\uff0c\u9ad8\u5ea6\u5374\u76f8\u5bf9\u8f83\u9ad8\u3002<\/p>\n<p>\u4ece\u4e0a\u8ff0\u5bf9\u6c89\u79ef\u5de5\u827a\u7684\u8bf4\u660e\u4e2d\u4e0d\u96be\u770b\u51fa\uff0c\u6c89\u79ef\u5de5\u827a\u4e2d\u4e5f\u5b58\u5728\u9700\u6743\u8861\u4e4b\u5904\uff1a\u8981\u63d0\u9ad8\u5747\u5300\u5ea6\u7b49\u7cbe\u786e\u5ea6\uff0c\u53ea\u80fd\u727a\u7272\u6c89\u79ef\u901f\u7387\u3002\u5728\u6574\u4e2a\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\uff0c\u7cbe\u786e\u5ea6\u548c\u901f\u7387\u4f3c\u4e4e\u6c38\u8fdc\u4f4d\u4e8e\u8df7\u8df7\u677f\u7684\u4e24\u7aef\uff0c\u9700\u8981\u4e0d\u65ad\u6743\u8861\u3002\u8fd9\u5bf9\u4e8e\u6c89\u79ef\u5de5\u827a\u6765\u8bf4\u4e5f\u4e0d\u4f8b\u5916\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u538b\u529b\u4e0e\u6e29\u5ea6<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u548c\u5728\u523b\u8680\u5de5\u827a\u4e2d\u4e00\u6837\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u5546\u5728\u6c89\u79ef\u8fc7\u7a0b\u4e2d\u4e5f\u4f1a\u901a\u8fc7\u63a7\u5236\u6e29\u5ea6\u3001\u538b\u529b\u7b49\u4e0d\u540c\u6761\u4ef6\u6765\u628a\u63a7\u819c\u5c42\u6c89\u79ef\u7684\u8d28\u91cf\u3002\u4f8b\u5982\uff0c\u964d\u4f4e\u538b\u5f3a\uff0c\u6c89\u79ef\u901f\u7387\u5c31\u4f1a\u653e\u6162\uff0c\u4f46\u53ef\u4ee5\u63d0\u9ad8\u5782\u76f4\u65b9\u5411\u7684\u6c89\u79ef\u8d28\u91cf\u3002\u56e0\u4e3a\uff0c\u538b\u5f3a\u4f4e\u8868\u660e\u8bbe\u5907\u5185\u53cd\u5e94\u6c14\u4f53\u7c92\u5b50\u7684\u6570\u91cf\u5c11\uff0c\u7c92\u5b50\u4e4b\u95f4\u53d1\u751f\u51b2\u649e\u7684\u6982\u7387\u5c31\u5c11\uff0c\u4e0d\u4f1a\u59a8\u788d\u7c92\u5b50\u7684\u76f4\u7ebf\u8fd0\u52a8\u3002\u65bd\u52a0\u9ad8\u6e29\u5219\u53ef\u4ee5\u63d0\u9ad8\u819c\u5c42\u7684\u7eaf\u5ea6\u3002\u5f53\u7136\uff0c\u8fd9\u6837\u4e00\u6765\u5c31\u65e0\u6cd5\u4f7f\u7528\u94dd\uff08\u5176\u7194\u70b9\u4e3a550\u5ea6\uff09\u7b49\u7194\u70b9\u4f4e\u7684\u91d1\u5c5e\u6750\u6599\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9595 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170907\/SK-hynix_semiconductor-frontend-process-ep05_07.png\" alt=\"\" width=\"1000\" height=\"660\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe7\uff1a\u538b\u5f3a\u5bf9\u6c89\u79ef\u5de5\u827a\u7684\u5f71\u54cd<\/p>\n<p>\u56e0\u6b64\uff0c\u5728\u4e0d\u540c\u9700\u6c42\u4e0b\uff0c\u6c89\u79ef\u76f8\u540c\u6750\u6599\u4e5f\u53ef\u91c7\u7528\u5b8c\u5168\u4e0d\u540c\u7684\u6c89\u79ef\u65b9\u5f0f\u3002\u4f8b\u5982\uff0c\u540c\u6837\u662f\u6c89\u79ef\u4e8c\u6c27\u5316\u7845\uff08SiO<sub>2<\/sub>\uff09\uff0c\u6805\u6781\u7edd\u7f18\u5c42\u4e0eSTI\u6240\u9700\u7279\u6027\u5c31\u4e0d\u540c\uff0c\u5176\u6c89\u79ef\u7684\u65b9\u5f0f\u4e5f\u4e0d\u540c\u3002\u6805\u6781\u7edd\u7f18\u5c42\u662f\u6838\u5fc3\u5143\u4ef6\u533a\u57df\uff0c\u8981\u6c42\u8f83\u9ad8\u7684\u6c89\u79ef\u8d28\u91cf\uff0c\u5e94\u91c7\u7528\u9ad8\u6e29\u4f4e\u538b\u7684\u65b9\u5f0f\uff1bSTI\u5219\u4e0d\u7136\uff0c\u5b83\u53ea\u8981\u8d77\u5230\u4e24\u4e2a\u5143\u4ef6\u95f4\u7684\u7edd\u7f18\u4f5c\u7528\u5373\u53ef\uff0c\u901a\u8fc7\u4f4e\u6e29\u9ad8\u538b\u7684\u65b9\u5f0f\u52a0\u5feb\u6c89\u79ef\u901f\u7387\u624d\u662f\u5173\u952e\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u6750\u6599\u9009\u62e9\u4e0a\u7684\u96be\u9898<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u60a8\u6216\u8bb8\u5e38\u4f1a\u5728\u65b0\u95fb\u4e2d\u770b\u5230\u8fd9\u6837\u7684\u62a5\u9053\uff1a\u201c\u53d1\u73b0\u4e86\u6027\u80fd\u9ad8\u51faXX\u500d\u7684\u65b0\u6750\u6599\u201d\u3002\u53ea\u770b\u65b0\u95fb\u5185\u5bb9\uff0c\u4f1a\u611f\u89c9\u4e00\u573a\u7ffb\u5929\u8986\u5730\u7684\u534a\u5bfc\u4f53\u9769\u547d\u4f3c\u4e4e\u5373\u5c06\u6765\u4e34\u3002\u4f46\u5728\u6240\u8c13\u7684\u201c\u65b0\u6750\u6599\u201d\u4e2d\uff0c\u771f\u7684\u80fd\u6d3e\u4e0a\u7528\u573a\u7684\u5374\u5be5\u5be5\u65e0\u51e0\u3002\u56e0\u4e3a\uff0c\u6750\u6599\u672c\u8eab\u7684\u7279\u6027\u597d\uff0c\u5e76\u4e0d\u4ee3\u8868\u5b83\u4e00\u5b9a\u80fd\u5236\u6210\u9ad8\u6027\u80fd\u7684\u534a\u5bfc\u4f53\u3002\u5bf9\u6c89\u79ef\u6750\u6599\u7684\u8981\u6c42\u53ef\u4e0d\u6bd4\u6c89\u79ef\u8bbe\u5907\u4f4e\u3002\u4e0b\u9762\uff0c\u6211\u4eec\u6765\u770b\u4e00\u770b\u6750\u6599\u7684\u7279\u6027\u4f1a\u5bf9\u534a\u5bfc\u4f53\u5236\u7a0b\u4ea7\u751f\u4ec0\u4e48\u6837\u7684\u5f71\u54cd\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9596 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170909\/SK-hynix_semiconductor-frontend-process-ep05_08.png\" alt=\"\" width=\"1000\" height=\"600\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe8\uff1a\u52a0\u70ed\u5bfc\u81f4\u56fe\u5f62\u635f\u574f<\/p>\n<p>\u7269\u4f53\u9047\u70ed\u4f53\u79ef\u4f1a\u53d8\u5927\uff0c\u8fd9\u79cd\u73b0\u8c61\u88ab\u79f0\u4f5c\u70ed\u81a8\u80c0\u3002\u94c1\u8f68\u4e4b\u95f4\u7559\u6709\u7f1d\u9699\u5c31\u662f\u4e3a\u4e86\u9632\u6b62\u94c1\u8f68\u5728\u708e\u70ed\u7684\u590f\u5929\u56e0\u81a8\u80c0\u53d8\u5f62\u3002\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\u4e5f\u4f1a\u51fa\u73b0\u8fd9\u79cd\u70ed\u81a8\u80c0\u73b0\u8c61\u3002\u95ee\u9898\u5728\u4e8e\uff0c\u6bcf\u4e00\u79cd\u6750\u6599\u7684\u70ed\u81a8\u80c0\u7a0b\u5ea6\u4e0d\u540c\uff0c\u4f8b\u5982\u94dd\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u662f\u6c27\u5316\u7845\u768440\u500d\u4e4b\u591a\u3002\u4e3e\u4e2a\u6bd4\u8f83\u6781\u7aef\u7684\u4f8b\u5b50\uff1a\u5982\u679c\u5728\u6c27\u5316\u7845\u4e0a\u6c89\u79ef\u4e86\u94dd\u8584\u819c\uff0c\u5373\u4fbf\u94dd\u8584\u819c\u6c89\u79ef\u5f88\u6210\u529f\uff0c\u4e00\u65e6\u8fdb\u5165\u540e\u7eed\u7684\u9ad8\u6e29\u5de5\u827a\uff0c\u5176\u5185\u90e8\u7ed3\u6784\u5c31\u4f1a\u5b8c\u5168\u88ab\u7834\u635f\u3002\u6362\u53e5\u8bdd\u8bf4\uff0c\u5982\u679c\u91c7\u7528\u81a8\u80c0\u7cfb\u6570\u5b8c\u5168\u4e0d\u540c\u7684\u6750\u6599\u66ff\u4ee3\u4e4b\u524d\u7684\u6c89\u79ef\u6750\u6599\uff0c\u4f1a\u4e25\u91cd\u5f71\u54cd\u9ad8\u6e29\u6761\u4ef6\u4e0b\u7684\u4ea7\u54c1\u826f\u7387\u3002<\/p>\n<p class=\"caption\">\u25b2 <img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-9602 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170911\/SK-hynix_semiconductor-frontend-process-ep05_09.png\" alt=\"\" width=\"1000\" height=\"500\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe9\uff1a\u7535\u8fc1\u79fb\u73b0\u8c61<\/p>\n<p>\u9664\u6b64\u4e4b\u5916\uff0c\u8fd8\u8981\u8003\u8651\u6750\u6599\u7684\u7535\u8fc1\u79fb\uff08EM\uff0cElectromigration\uff09\u73b0\u8c61\u3002\u7535\u8fc1\u79fb\u662f\u6307\u5728\u91d1\u5c5e\u5e03\u7ebf\u4e0a\u65bd\u52a0\u7535\u6d41\u65f6\uff0c\u79fb\u52a8\u7684\u7535\u8377\u649e\u51fb\u91d1\u5c5e\u539f\u5b50\uff0c\u4f7f\u5176\u53d1\u751f\u8fc1\u79fb\u7684\u73b0\u8c61\u3002\u94dd\u7b49\u8f7b\u91d1\u5c5e\u5f88\u5bb9\u6613\u53d1\u751f\u8fd9\u79cd\u7535\u8fc1\u79fb\u73b0\u8c61\u3002\u4e3a\u9632\u6b62\u94dd\u7684\u7535\u8fc1\u79fb\u73b0\u8c61\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u5546\u4eec\u5f00\u59cb\u7528\u94dc\u5e03\u7ebf\u66ff\u4ee3\u94dd\uff0c\u7ed3\u679c\u662f\u53c8\u591a\u4e86\u4e00\u9053\u9632\u6b62\u94dc\u6269\u6563\u7684\u963b\u6321\u5c42\u6c89\u79ef\u5de5\u827a\u3002\u968f\u7740\u534a\u5bfc\u4f53\u4e0d\u65ad\u5fae\u7ec6\u5316\u53d1\u5c55\uff0c\u94dc\u5e03\u7ebf\u4e5f\u5f00\u59cb\u51fa\u73b0\u7535\u8fc1\u79fb\u73b0\u8c61\u3002\u4e3a\u653b\u514b\u8fd9\u4e00\u96be\u5173\uff0c\u82f1\u7279\u5c14\u53c8\u7528\u94b4\u5e03\u7ebf\u53d6\u4ee3\u4e86\u94dc\u3002\u800c\u65e2\u7136\u6838\u5fc3\u91d1\u5c5e\u5e03\u7ebf\u5c42\u7684\u6750\u6599\u53d1\u751f\u4e86\u53d8\u5316\uff0c\u4e0a\u4e0b\u5c42\u7684\u5de5\u827a\u4e5f\u80af\u5b9a\u8981\u8ddf\u7740\u53d8\u3002\u53ef\u89c1\uff0c\u60f3\u89e3\u51b3\u6750\u6599\u7684\u7535\u8fc1\u79fb\u73b0\u8c61\uff0c\u524d\u540e\u65b9\u7684\u5de5\u827a\u4e5f\u8981\u968f\u4e4b\u53d1\u751f\u5f88\u5927\u53d8\u5316\u3002<\/p>\n<p>\u8981\u59cb\u7ec8\u94ed\u8bb0\uff1a\u534a\u5bfc\u4f53\u5236\u7a0b\u662f\u6570\u767e\u4e2a\u5de5\u827a\u9519\u7efc\u590d\u6742\u7d27\u5bc6\u8fde\u63a5\u800c\u6210\u7684\uff0c\u7275\u4e00\u53d1\u800c\u52a8\u5168\u8eab\u3002\u65b0\u6750\u6599\u662f\u597d\u662f\u574f\uff0c\u4e0d\u80fd\u5355\u770b\u6750\u6599\u672c\u8eab\u7684\u7279\u6027\uff0c\u8fd8\u8981\u770b\u80fd\u4e0d\u80fd\u4e0e\u524d\u540e\u65b9\u5de5\u827a\u76f8\u8fde\uff0c\u6bd5\u7adf\u6c89\u79ef\u6750\u6599\u4e0d\u80fd\u72ec\u7acb\u5b58\u5728\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u7ed3\u8bba\uff1a\u4e00\u79cd\u6750\u6599\uff0c\u591a\u79cd\u65b9\u6cd5<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u8bfb\u5230\u8fd9\u513f\uff0c\u4f30\u8ba1\u8bfb\u8005\u4eec\u5df2\u7ecf\u53d1\u73b0\u4e86\u51e0\u70b9\u6709\u8da3\u4e4b\u5904\u4e86\uff1a\u9996\u5148\uff0c\u540c\u6837\u7684\u6750\u6599\u53ef\u4ee5\u901a\u8fc7\u4e0d\u540c\u7684\u65b9\u6cd5\u5236\u6210\u3002\u4f8b\u5982\uff0c\u4e8c\u6c27\u5316\u7845\uff08SiO<sub>2<\/sub>\uff09\u53ef\u4ee5\u901a\u8fc7\u6c27\u5316\u5de5\u827a\uff0c\u4e5f\u53ef\u4ee5\u901a\u8fc7\u6c89\u79ef\u5de5\u827a\u5f62\u6210\u3002\u5373\u4fbf\u662f\u76f8\u540c\u7684\u6750\u6599\uff0c\u5982\u679c\u901a\u8fc7\u4e0d\u540c\u5de5\u827a\u6d82\u6577\u5230\u534a\u5bfc\u4f53\u4e0a\uff0c\u5176\u7269\u7406\u7279\u6027\u4e5f\u4f1a\u622a\u7136\u4e0d\u540c\u3002<\/p>\n<p>\u5176\u6b21\uff0c\u6c27\u5316\u3001\u523b\u8680\u3001\u6c89\u79ef\u7b49\u770b\u4f3c\u5b8c\u5168\u4e0d\u540c\u7684\u5de5\u827a\u5176\u5b9e\u6709\u5f88\u591a\u5171\u540c\u4e4b\u5904\u3002\u6bd4\u5982\uff0c\u7269\u7406\u523b\u8680\u4e2d\u91c7\u7528\u7684\u6e85\u5c04\u65b9\u6cd5\uff0c\u5728\u6c89\u79ef\u5de5\u827a\u4e2d\u540c\u6837\u4e5f\u4f1a\u4f7f\u7528\uff0c\u533a\u522b\u5728\u4e8e\u201c\u662f\u6e85\u5c04\u8981\u523b\u8680\u7684\u6676\u5706\u672c\u8eab\u201d\uff0c\u8fd8\u662f\u201c\u628a\u6e85\u5c04\u51fa\u6765\u7684\u7c92\u5b50\u6c89\u79ef\u5230\u6676\u5706\u4e0a\u201d\u3002\u5316\u5b66\u523b\u8680\u4e2d\u6700\u91cd\u8981\u7684\u4e00\u70b9\u5c31\u662f\u523b\u8680\u6c14\u4f53\u4e0e\u53cd\u5e94\u6e90\u751f\u6210\u7684\u5e9f\u6c14\u662f\u5426\u6613\u4e8e\u6392\u653e\uff0c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u4e5f\u540c\u6837\u5982\u6b64\u3002CVD\u8fc7\u7a0b\u4e2d\u751f\u6210\u7684\u526f\u4ea7\u7269\u4e5f\u8981\u6613\u4e8e\u6325\u53d1\u3001\u6613\u4e8e\u6392\u653e\uff0c\u8fd9\u6837\u540e\u7eed\u5de5\u827a\u624d\u4f1a\u53d8\u5f97\u66f4\u5bb9\u6613\u3002<\/p>\n<p>\u53ef\u89c1\uff0c\u53d7\u534a\u5bfc\u4f53\u5236\u9020\u5546\u9752\u7750\u7684\u65b0\u6750\u6599\uff0c\u5e76\u4e0d\u662f\u5176\u672c\u8eab\u7279\u6027\u6709\u591a\u4f18\u79c0\u7684\u6750\u6599\uff0c\u800c\u662f\u5176\u6c89\u79ef\u901f\u7387\u3001\u7eaf\u5ea6\u7b49\u7279\u6027\u6613\u4e8e\u63a7\u5236\u7684\u6750\u6599\u3002\u800c\u4e14\uff0c\u6c89\u79ef\u6750\u6599\u8fd8\u8981\u6613\u4e8e\u901a\u8fc7\u523b\u8680\u6216CMP<sup style=\"color: #ff0000;\">* <\/sup>\u7b49\u5de5\u827a\u53bb\u9664\u3002\u5982\u679c\u91c7\u7528\u9700\u8981\u8fc7\u9ad8\u6e29\u5ea6\u7684\u6750\u6599\uff0c\u53ef\u80fd\u4f1a\u56e0\u9ad8\u6e29\u6539\u53d8\u5df2\u6c89\u79ef\u7684\u5176\u4ed6\u6750\u6599\u3002\u800c\u82e5\u91c7\u7528\u5bf9\u6e29\u5ea6\u975e\u5e38\u654f\u611f\u7684\u6750\u6599\uff0c\u53c8\u4f1a\u51fa\u73b0\u5728\u4e0b\u4e00\u9053\u5de5\u827a\u4e2d\u65e0\u6cd5\u52a0\u70ed\u7684\u95ee\u9898\u3002<\/p>\n<p class=\"footnote\"><sup style=\"color: #ff0000;\">* <\/sup> \u5316\u5b66\u673a\u68b0\u629b\u5149\uff08CMP\uff0cChemical Mechanical Polishing\uff09\uff1a\u901a\u8fc7\u7269\u7406\u3001\u5316\u5b66\u53cd\u5e94\u7814\u78e8, \u53bb\u9664\u975e\u6240\u9700\u7269\u8d28\uff0c\u4f7f\u534a\u5bfc\u4f53\u6676\u5706\u8868\u9762\u53d8\u5f97\u5e73\u5766\u3002<\/p>\n<p>\u5982\u4e0a\u6587\u6240\u8ff0\uff0c\u201c\u534a\u5bfc\u4f53\u5236\u7a0b\u7531\u6570\u767e\u4e2a\u5236\u9020\u5de5\u827a\u7d27\u5bc6\u8fde\u63a5\u800c\u6210\u201d\u3002\u60f3\u505a\u597d\u6bcf\u4e00\u9053\u5de5\u827a\uff0c\u5bf9\u5176\u4ed6\u76f8\u5173\u90e8\u95e8\u7684\u4e1a\u52a1\u4e5f\u8981\u6709\u5f88\u597d\u7684\u628a\u63e1\u3002\u8981\u64c5\u4e8e\u4e0e\u540c\u4e8b\u6c9f\u901a\uff0c\u66f4\u8981\u61c2\u5f97\u51c6\u786e\u65e0\u8bef\u5730\u4f20\u8fbe\u81ea\u5df1\u7684\u60f3\u6cd5\u3002\u4e00\u4e2a\u534a\u5bfc\u4f53\u4ea7\u54c1\u9700\u8981\u591a\u4eba\u5408\u4f5c\u624d\u53ef\u4ee5\u5b8c\u6210\uff0c\u867d\u7136\u8fc7\u7a0b\u6709\u4e9b\u8f9b\u82e6\uff0c\u4f46\u4e5f\u5f88\u503c\u5f97\u3002<\/p>\n<p class=\"footnote\">\u203b \u672c\u6587\u4e3a\u5916\u90e8\u4e13\u5bb6\u5bf9\u534a\u5bfc\u4f53\/ICT\u7684\u89c1\u89e3\uff0c\u5e76\u4e0d\u4ee3\u8868SK\u6d77\u529b\u58eb\u7684\u7acb\u573a\u3002<\/p>\n<p><a href=\"https:\/\/news.skhynix.com.cn\/tag\/%e5%89%8d%e7%ab%af%e5%b7%a5%e8%89%ba\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span style=\"text-decoration: underline;\"><strong><span class=\"ui-provider ee bog boh boi boj bok bol bom bon boo bop boq bor bos bot bou bov bow box boy boz bpa bpb bpc bpd bpe bpf bpg bph bpi bpj bpk bpl bpm bpn\" dir=\"ltr\">\u534a\u5bfc\u4f53\u524d\u7aef\u5de5\u827a\u7cfb\u5217\u6587\u7ae0<\/span><\/strong><\/span><\/a><\/p>\n<p><a href=\"https:\/\/news.skhynix.com.cn\/tag\/%e5%90%8e%e7%ab%af%e5%b7%a5%e8%89%ba\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span style=\"text-decoration: underline;\"><strong><span class=\"ui-provider ee bog boh boi boj bok bol bom bon boo bop boq bor bos bot bou bov bow box boy boz bpa bpb bpc bpd bpe bpf bpg bph bpi bpj bpk bpl bpm bpn\" dir=\"ltr\">\u534a\u5bfc\u4f53\u540e\u7aef\u5de5\u827a\u7cfb\u5217\u6587\u7ae0<\/span><\/strong><\/span><\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u6c89\u79ef\uff1a\u201c\u52a0\u6cd5\u5de5\u827a\u201d \u5728\u524d\u51e0\u7bc7\u6587\u7ae0\uff0c\u6211\u4eec\u4e00\u76f4\u5728\u501f\u7528\u997c\u5e72\u70d8\u7119\u8fc7\u7a0b\u6765\u5f62\u8c61\u5730\u8bf4\u660e\u534a\u5bfc\u4f53\u5236\u7a0b \u3002\u5728\u4e0a\u4e00\u7bc7\u6211\u4eec\u8bf4\u5230\uff0c\u4e3a\u5236\u4f5c [\u2026]<\/p>\n","protected":false},"author":2,"featured_media":1070,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_migrated_source_id":9588,"footnotes":"","_members_access_role":[],"_members_access_error":""},"categories":[5],"tags":[645,646,648],"class_list":["post-1080","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-tech-and-ai","tag-645","tag-646","tag-648"],"acf":[],"_links":{"self":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1080","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/comments?post=1080"}],"version-history":[{"count":2,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1080\/revisions"}],"predecessor-version":[{"id":4183,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1080\/revisions\/4183"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media\/1070"}],"wp:attachment":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media?parent=1080"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/categories?post=1080"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/tags?post=1080"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}