{"id":1088,"date":"2023-02-21T06:00:45","date_gmt":"2023-02-21T06:00:45","guid":{"rendered":"http:\/\/localhost:8080\/semiconductor-front-end-process-4-etching\/"},"modified":"2026-06-15T23:15:13","modified_gmt":"2026-06-15T23:15:13","slug":"semiconductor-front-end-process-4-etching","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/semiconductor-front-end-process-4-etching\/","title":{"rendered":"[\u534a\u5bfc\u4f53\u524d\u7aef\u5de5\u827a\uff1a\u7b2c\u56db\u7bc7] \u523b\u8680\u2014\u2014\u6709\u9009\u62e9\u6027\u5730\u523b\u8680\u6750\u6599\uff0c\u4ee5\u521b\u5efa\u6240\u9700\u56fe\u5f62"},"content":{"rendered":"<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u5149\u201c\u5806\u53e0\u201d\u53ef\u4e0d\u884c<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u5728<span style=\"text-decoration: underline;\"><a href=\"https:\/\/news.skhynix.com.cn\/semiconductor-front-end-process-episode-3\/\" target=\"_blank\" rel=\"noopener noreferrer\">\u534a\u5bfc\u4f53\u524d\u7aef\u5de5\u827a\u7b2c\u4e09\u7bc7<\/a><\/span>\u4e2d\uff0c\u6211\u4eec\u4e86\u89e3\u4e86\u5982\u4f55\u5236\u4f5c\u201c\u997c\u5e72\u6a21\u5177\u201d\u3002\u672c\u671f\uff0c\u6211\u4eec\u5c31\u6765\u8bb2\u8bb2\u5982\u4f55\u91c7\u7528\u8fd9\u4e2a\u201c\u997c\u5e72\u6a21\u5177\u201d\u5370\u51fa\u6211\u4eec\u60f3\u8981\u7684\u201c\u997c\u5e72\u201d\u3002\u8fd9\u4e00\u6b65\u9aa4\u7684\u91cd\u70b9\uff0c\u5728\u4e8e\u5982\u4f55\u79fb\u9664\u4e0d\u9700\u8981\u7684\u6750\u6599\uff0c\u5373\u201c\u523b\u8680\uff08Etching\uff09\u5de5\u827a\u201d\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9482\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170919\/SK%ED%95%98%EC%9D%B4%EB%8B%89%EC%8A%A4-%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%95-4%ED%8E%B8_01.png\" alt=\"\" width=\"1000\" height=\"700\" \/><\/p>\n<p>\u25b2 \u56fe1: \u79fb\u9664\u997c\u5e72\u4e2d\u95f4\u90e8\u5206\uff0c\u518d\u5012\u5165\u5de7\u514b\u529b\u7cd6\u6d46<\/p>\n<p>\u8ba9\u6211\u4eec\u518d\u6765\u56de\u60f3\u4e00\u4e0b\u4e0a\u4e00\u7bc7\u5185\u5bb9\u4e2d\u5236\u4f5c\u997c\u5e72\u7684\u8fc7\u7a0b\u3002\u5982\u679c\u60f3\u5728\u201c\u5e78\u798f\u4e4b\u7ffc\u201d\u9020\u578b\u997c\u5e72\u4e2d\u52a0\u4e00\u5c42\u5de7\u514b\u529b\u5939\u5fc3\uff0c\u8981\u600e\u4e48\u505a\u5462\uff1f\u6700\u7b80\u5355\u7684\u65b9\u6cd5\u5c31\u662f\u628a\u997c\u5e72\u4e2d\u95f4\u90e8\u5206\u6316\u51fa\u6765\uff0c\u518d\u5012\u5165\u5de7\u514b\u529b\u7cd6\u6d46\u3002\u6316\u51fa\u997c\u5e72\u7684\u8fd9\u4e00\u8fc7\u7a0b\uff0c\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u4e2d\u5c31\u53eb\u505a\u201c\u523b\u8680\u201d\uff0c\u5373\u5728\u201c\u5e78\u798f\u4e4b\u7ffc\u201d\u997c\u5e72\u4e0a\u53e0\u52a0\u4e2d\u95f4\u88ab\u6316\u7a7a\u7684\u9ec4\u8272\u6a21\u5177\uff08\u5149\u523b\u80f6\uff09\uff0c\u518d\u55b7\u6d12\u53ea\u4e0e\u997c\u5e72\u88f8\u9732\u90e8\u5206\u4ea7\u751f\u53cd\u5e94\u7684\u6eb6\u6db2\uff0c\u4f7f\u5176\u672a\u53d7\u6a21\u5177\u4fdd\u62a4\u7684\u90e8\u5206\u88ab\u6eb6\u89e3\u8150\u8680\u3002\u968f\u540e\u4fbf\u5e94\u79fb\u53bb\u6a21\u5177\uff0c\u5012\u5165\u5de7\u514b\u529b\u7cd6\u6d46\u3002\u6700\u540e\uff0c\u6e05\u7406\u6b8b\u4f59\u7684\u5de7\u514b\u529b\u7cd6\u6d46\uff0c\u518d\u76d6\u4e0a\u4e00\u5c42\u997c\u5e72\u5c42\uff0c\u5de7\u514b\u529b\u5939\u5fc3\u997c\u5e72\u5c31\u5236\u6210\u4e86\u3002<\/p>\n<p>\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u5de5\u827a\u4e2d\uff0c\u6709\u5f88\u591a\u4e0d\u540c\u540d\u79f0\u7684\u7528\u4e8e\u79fb\u9664\u591a\u4f59\u6750\u6599\u7684\u5de5\u827a\uff0c\u5982\u201c\u6e05\u6d17\u201d\u3001\u201c\u523b\u8680\u201d\u7b49\u3002\u5982\u679c\u8bf4\u201c\u6e05\u6d17\u201d\u5de5\u827a\u662f\u628a\u6574\u5f20\u6676\u5706\u4e0a\u591a\u4f59\u7684\u4e0d\u7eaf\u7269\u53bb\u9664\u6389\uff0c\u201c\u523b\u8680\u201d\u5de5\u827a\u5219\u662f\u5728\u5149\u523b\u80f6\u7684\u5e2e\u52a9\u4e0b\u6709\u9009\u62e9\u6027\u5730\u79fb\u9664\u4e0d\u9700\u8981\u7684\u6750\u6599\uff0c\u4ece\u800c\u521b\u5efa\u6240\u9700\u7684\u5fae\u7ec6\u56fe\u6848\u3002\u534a\u5bfc\u4f53\u201c\u523b\u8680\u201d\u5de5\u827a\u6240\u91c7\u7528\u7684\u6c14\u4f53\u548c\u8bbe\u5907\uff0c\u5728\u5176\u4ed6\u7c7b\u4f3c\u5de5\u827a\u4e2d\u4e5f\u5f88\u5e38\u89c1\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u523b\u8680\u5de5\u827a\u7684\u7279\u6027<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u201c\u523b\u8680\u201d\u5de5\u827a\u5177\u6709\u5f88\u591a\u91cd\u8981\u7684\u7279\u6027\u3002\u6240\u4ee5\uff0c\u5728\u4e86\u89e3\u5177\u4f53\u5de5\u827a\u4e4b\u524d\uff0c\u6709\u5fc5\u8981\u5148\u68b3\u7406\u4e00\u4e0b\u523b\u8680\u5de5\u827a\u7684\u91cd\u8981\u672f\u8bed\uff0c\u8bf7\u89c1\u4e0b\u56fe\uff1a<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9483\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170922\/SK%ED%95%98%EC%9D%B4%EB%8B%89%EC%8A%A4-%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%95-4%ED%8E%B8_02.png\" alt=\"\" width=\"1000\" height=\"700\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe2: \u7b49\u5411\u6027\u523b\u8680\u4e0e\u975e\u7b49\u5411\u6027\u523b\u8680\u7684\u7279\u70b9<\/p>\n<p>\u7b2c\u4e00\u4e2a\u5173\u952e\u672f\u8bed\u5c31\u662f\u201c\u9009\u62e9\u6bd4\u201d\uff0c\u8be5\u53c2\u6570\u7528\u4e8e\u8861\u91cf\u662f\u5426\u53ea\u523b\u8680\u4e86\u60f3\u523b\u8680\u7684\u90e8\u5206\u3002\u5728\u53cd\u5e94\u8fc7\u7a0b\u4e2d\uff0c\u4e00\u90e8\u5206\u5149\u523b\u80f6\u4e5f\u4f1a\u88ab\u523b\u8680\uff0c\u56e0\u6b64\u5728\u5b9e\u9645\u7684\u523b\u8680\u5de5\u827a\u4e2d\uff0c\u4e0d\u53ef\u80fd100%\u53ea\u523b\u8680\u5230\u60f3\u79fb\u9664\u7684\u90e8\u5206\u3002\u4e00\u4e2a\u9ad8\u9009\u62e9\u6bd4\u7684\u523b\u8680\u5de5\u827a\uff0c\u4fbf\u662f\u53ea\u523b\u8680\u4e86\u8be5\u523b\u53bb\u7684\u90e8\u5206\uff0c\u5e76\u5c3d\u53ef\u80fd\u5c11\u5730\u523b\u8680\u5230\u4e0d\u5e94\u8be5\u523b\u8680\u6750\u6599\u7684\u5de5\u827a\u3002<\/p>\n<p>\u7b2c\u4e8c\u4e2a\u5173\u952e\u8bcd\uff0c\u5c31\u662f\u201c\u65b9\u5411\u7684\u9009\u62e9\u6027\u201d\u3002\u987e\u540d\u601d\u4e49\uff0c\u65b9\u5411\u7684\u9009\u62e9\u6027\u662f\u6307\u523b\u8680\u7684\u65b9\u5411\u3002\u8be5\u6027\u8d28\u53ef\u5206\u4e3a\u7b49\u5411\u6027\uff08Isotropic\uff09\u548c\u975e\u7b49\u5411\u6027\uff08Anisotropic\uff09\u523b\u8680\u4e24\u79cd\uff1a \u7b49\u5411\u6027\u523b\u8680\u6ca1\u6709\u65b9\u5411\u9009\u62e9\u6027, \u9664\u7eb5\u5411\u53cd\u5e94\u5916\uff0c\u6a2a\u5411\u53cd\u5e94\u4ea6\u540c\u65f6\u53d1\u751f\uff1b\u975e\u7b49\u5411\u6027\u523b\u8680\u5219\u662f\u501f\u52a9\u5177\u6709\u65b9\u5411\u6027\u7684\u79bb\u5b50\u649e\u51fb\u6765\u8fdb\u884c\u7279\u5b9a\u65b9\u5411\u7684\u523b\u8680\uff0c\u5f62\u6210\u5782\u76f4\u7684\u8f6e\u5ed3\u3002\u8bd5\u60f3\u4e00\u4e2a\u5305\u88f9\u7cd6\u679c\u7684\u5305\u88c5\u888b\u6f0f\u4e86\u4e00\u9053\u53e3\u5b50\uff0c\u5982\u679c\u628a\u6574\u5757\u7cd6\u8fde\u5305\u88c5\u888b\u4e00\u8d77\u653e\u5165\u6c34\u4e2d\uff0c\u4e00\u6bb5\u65f6\u95f4\u540e\uff0c\u7cd6\u679c\u5c31\u4f1a\u88ab\u6eb6\u89e3\u3002\u53ef\u5982\u679c\u53ea\u5411\u7834\u53e3\u5904\u7167\u5c04\u6fc0\u5149\uff0c\u7cd6\u679c\u5c31\u4f1a\u88ab\u70e7\u7a7f\uff0c\u5f62\u6210\u4e00\u4e2a\u6d1e\uff0c\u800c\u4e0d\u662f\u6574\u5757\u7cd6\u679c\u88ab\u70e7\u6ca1\u3002\u524d\u4e00\u73b0\u8c61\u5c31\u597d\u6bd4\u7b49\u5411\u6027\u523b\u8680\uff0c\u800c\u540e\u4e00\u73b0\u8c61\u5c31\u5982\u540c\u975e\u7b49\u5411\u6027\u523b\u8680\u3002<\/p>\n<p>\u7b2c\u4e09\u4e2a\u5173\u952e\u8bcd\uff0c\u5c31\u662f\u8868\u660e\u523b\u8680\u5feb\u6162\u7684\u201c\u523b\u8680\u901f\u7387\uff08Etching Rate\uff09\u201d\u3002\u5982\u679c\u5176\u4ed6\u53c2\u6570\u4e0d\u53d8\uff0c\u5f53\u7136\u901f\u7387\u8d8a\u5feb\u8d8a\u597d\uff0c\u4f46\u4e00\u822c\u6ca1\u6709\u53c8\u5feb\u53c8\u51c6\u7684\u5b8c\u7f8e\u9009\u62e9\u3002\u5728\u5de5\u827a\u7814\u53d1\u8fc7\u7a0b\u4e2d\uff0c\u5f80\u5f80\u9700\u8981\u5728\u51c6\u786e\u5ea6\u7b49\u53c2\u6570\u4e0e\u901f\u7387\u95f4\u6743\u8861\u3002\u6bd4\u5982\uff0c\u4e3a\u63d0\u9ad8\u523b\u8680\u7684\u975e\u7b49\u5411\u6027\uff0c\u9700\u964d\u4f4e\u523b\u8680\u6c14\u4f53\u7684\u538b\u529b\uff0c\u4f46\u964d\u538b\u5c31\u610f\u5473\u7740\u80fd\u591f\u53c2\u4e0e\u53cd\u5e94\u7684\u6c14\u4f53\u91cf\u53d8\u5c11\uff0c\u8fd9\u81ea\u7136\u5c31\u4f1a\u5e26\u6765\u523b\u8680\u901f\u7387\u7684\u653e\u7f13\u3002<\/p>\n<p>\u6700\u540e\u4e00\u4e2a\u5173\u952e\u8bcd\u5c31\u662f\u201c\u5747\u5300\u6027\u201d\u3002\u5747\u5300\u6027\u662f\u8861\u91cf\u523b\u8680\u5de5\u827a\u5728\u6574\u7247\u6676\u5706\u4e0a\u523b\u8680\u80fd\u529b\u7684\u53c2\u6570\uff0c\u53cd\u6620\u523b\u8680\u7684\u4e0d\u5747\u5300\u7a0b\u5ea6\u3002\u523b\u8680\u4e0e\u66dd\u5149\u4e0d\u540c\uff0c\u5b83\u9700\u8981\u5c06\u6574\u5f20\u6676\u5706\u88f8\u9732\u5728\u523b\u8680\u6c14\u4f53\u4e2d\u3002\u8be5\u5de5\u827a\u5728\u65bd\u52a0\u53cd\u5e94\u6c14\u4f53\u540e\u53bb\u9664\u526f\u4ea7\u7269\uff0c\u9700\u4e0d\u65ad\u5faa\u73af\u7269\u8d28\uff0c\u56e0\u6b64\u5f88\u96be\u505a\u5230\u6574\u5f20\u6676\u5706\u7684\u6bcf\u4e2a\u89d2\u843d\u90fd\u662f\u4e00\u6a21\u4e00\u6837\u3002\u8fd9\u5c31\u4f7f\u6676\u5706\u4e0d\u540c\u90e8\u4f4d\u51fa\u73b0\u4e86\u4e0d\u540c\u7684\u523b\u8680\u901f\u7387\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u523b\u8680\u7684\u79cd\u7c7b\uff1a\u6e7f\u523b\u8680\uff08Wet Etching\uff09\u4e0e\u5e72\u523b\u8680\uff08Dry Etching\uff09<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u523b\u8680\u4e5f\u50cf\u6c27\u5316\u5de5\u827a\u4e00\u6837\uff0c\u5206\u4e3a\u6e7f\u523b\u8680\uff08Wet Etching\uff09\u548c\u5e72\u523b\u8680\uff08Dry Etching\uff09\u3002\u8fd8\u8bb0\u5f97\u4e0a\u4e00\u7bc7\u6211\u4eec\u8bf4\u5230\uff0c\u53d6\u540d\u201c\u6e7f\u6cd5\u201d\u6c27\u5316\u7684\u539f\u56e0\u662f\u56e0\u4e3a\u91c7\u7528\u4e86\u6c34\u84b8\u6c14\u4e0e\u6676\u5706\u53cd\u5e94\uff0c\u800c\u523b\u8680\u4e2d\u7684\u201c\u6e7f\u201d\u5219\u610f\u5473\u7740\u5c06\u6676\u5706\u201c\u6d78\u5165\u6db2\u4f53\u540e\u635e\u51fa\u201d\u3002\u6e7f\u523b\u8680\u7684\u4f18\u70b9\u662f\u523b\u8680\u901f\u7387\u76f8\u5f53\u5feb\uff0c\u4e14\u53ea\u91c7\u7528\u5316\u5b66\u65b9\u6cd5\uff0c\u6240\u4ee5\u201c\u9009\u62e9\u6bd4\u201d\u8f83\u9ad8\u3002\u4f46\u5176\u95ee\u9898\u662f\u53ea\u80fd\u8fdb\u884c\u7b49\u5411\u6027\uff08Isotropic\uff09\u523b\u8680\u3002\u5982\u679c\u628a\u6676\u5706\u6d78\u5165\u6db2\u4f53\u4e2d\uff0c\u6db2\u4f53\u5c31\u4f1a\u81ea\u7531\u6d41\u52a8\u4e0e\u6750\u6599\u53d1\u751f\u53cd\u5e94\uff0c\u5149\u523b\u80f6\u80cc\u9762\u7684\u53d7\u4fdd\u62a4\u90e8\u5206\u4e5f\u4f1a\u4e0e\u6db2\u4f53\u53d1\u751f\u53cd\u5e94\uff0c\u88ab\u5feb\u901f\u6eb6\u89e3\u8150\u8680\uff0c\u51c6\u786e\u5ea6\u8f83\u5dee\u3002\u800c\u4e14\uff0c\u5982\u679c\u5149\u523b\u80f6\u7834\u53e3\u5f88\u5c0f\uff0c\u6db2\u4f53\u523b\u8680\u5242\u5c06\u53d7\u81ea\u8eab\u8868\u9762\u5f20\u529b\u5f71\u54cd\uff0c\u65e0\u6cd5\u7a7f\u8fc7\u7834\u53e3\u3002\u7528\u5149\u523b\u673a\u7ed8\u5236\u4e86\u5fae\u7ec6\u7684\u56fe\u5f62\u540e\uff0c\u82e5\u4e0d\u80fd\u7167\u56fe\u5f62\u5236\u6210\u7535\u8def\uff0c\u4e5f\u53ea\u662f\u5f92\u52b3\u3002\u56e0\u6b64\uff0c\u5982\u4eca\u5728\u5236\u4f5c\u534a\u5bfc\u4f53\u6838\u5fc3\u5c42\u65f6\uff0c\u4e00\u822c\u4e0d\u91c7\u7528\u6e7f\u523b\u8680\u7684\u65b9\u6cd5\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9484\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170924\/SK%ED%95%98%EC%9D%B4%EB%8B%89%EC%8A%A4-%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%95-4%ED%8E%B8_03.png\" alt=\"\" width=\"1000\" height=\"700\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe3: \u5728\u5149\u523b\u80f6\u7834\u53e3\u5185\u81ea\u7531\u6d41\u52a8\u7684\u6db2\u4f53\u523b\u8680\u5242<\/p>\n<p>\u5e72\u523b\u8680\u5219\u6cdb\u6307\u91c7\u7528\u6c14\u4f53\u8fdb\u884c\u523b\u8680\u7684\u6240\u6709\u5de5\u827a\uff0c\u5373\u5728\u6676\u5706\u4e0a\u53e0\u52a0\u5149\u523b\u80f6\u201c\u6a21\u5177\u201d\u540e\uff0c\u5c06\u5176\u88f8\u9732\u4e8e\u523b\u8680\u6c14\u4f53\u4e2d\u7684\u5de5\u827a\u3002\u5e72\u523b\u8680\u53ef\u5206\u4e3a\u7b49\u79bb\u5b50\u523b\u8680\u3001\u6e85\u5c04\u523b\u8680\u548c\u53cd\u5e94\u6027\u79bb\u5b50\u523b\u8680\uff08RIE, Reactive Ion Etching\uff09\u3002\u4e0e\u6e7f\u523b\u8680\u4e0d\u540c\uff0c\u8fd9\u4e9b\u5e72\u523b\u8680\u5de5\u827a\u91c7\u7528\u5404\u79cd\u4e0d\u540c\u7684\u65b9\u5f0f\u6765\u523b\u8680\u6750\u6599\uff0c\u6240\u4ee5\uff0c\u53ef\u4ee5\u4e00\u76ee\u4e86\u7136\u5730\u8bf4\u660e\u975e\u7b49\u5411\u6027\u548c\u7b49\u5411\u6027\u523b\u8680\u7684\u7279\u70b9\u3002\u4f8b\u5982\uff0c\u91c7\u7528\u5316\u5b66\u53cd\u5e94\u7684\u5e72\u523b\u8680\u4e3a\u7b49\u5411\u6027\u523b\u8680\uff0c\u91c7\u7528\u7269\u7406\u53cd\u5e94\u7684\u523b\u8680\u5219\u4e3a\u975e\u7b49\u5411\u6027\u523b\u8680\u3002\u6700\u8fd1\uff0c\u968f\u7740RIE\uff08\u975e\u7b49\u5411\u6027\u9ad8\u3001\u523b\u8680\u901f\u7387\u9ad8\u7684\u4e00\u79cd\u5e72\u523b\u8680\u65b9\u6cd5\uff09\u6210\u4e3a\u4e3b\u6d41\uff0c\u5e72\u523b\u8680\u5177\u6709\u975e\u7b49\u5411\u6027\u7684\u8ba4\u8bc6\u5df2\u6210\u4e86\u4e00\u79cd\u5171\u8bc6\uff08RIE\u7684\u5177\u4f53\u5de5\u827a\u8bf7\u89c1\u4e0b\u9762\u7684\u8be6\u8ff0\u5185\u5bb9\uff09\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u523b\u8680\u7684\u79cd\u7c7b\uff1a\u6309\u53bb\u9664\u6750\u6599\u7684\u65b9\u6cd5\u5212\u5206<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u53bb\u9664\u6676\u5706\u4e0a\u6750\u6599\u7684\u65b9\u6cd5\u5927\u81f4\u53ef\u5206\u4e3a\u5316\u5b66\u65b9\u6cd5\u548c\u7269\u7406\u65b9\u6cd5\u4e24\u79cd\uff1a<\/p>\n<p>\u5316\u5b66\u65b9\u6cd5\u5c31\u662f\u91c7\u7528\u4e0e\u6307\u5b9a\u6750\u6599\u6613\u53cd\u5e94\u7684\u7269\u8d28\u8fdb\u884c\u5316\u5b66\u53cd\u5e94\u3002\u5149\u523b\u80f6\u4e0b\u9762\u6709\u8bb8\u591a\u8981\u53bb\u9664\u7684\u7269\u8d28\uff0c\u5982\u5728\u6c27\u5316\u5de5\u827a\u4e2d\u751f\u6210\u7684\u6c27\u5316\u819c\u6216\u5728\u6c89\u79ef\u5de5\u827a\u4e2d\u6d82\u6577\u7684\u4e00\u4e9b\u5176\u4ed6\u7269\u8d28\u7b49\u3002\u5316\u5b66\u65b9\u6cd5\u5c31\u662f\u91c7\u7528\u6613\u4e0e\u60f3\u53bb\u9664\u7684\u6750\u6599\u4ea7\u751f\u53cd\u5e94\uff0c\u5374\u4e0d\u4e0e\u5149\u523b\u80f6\u53d1\u751f\u53cd\u5e94\u7684\u7269\u8d28\uff0c\u6709\u9488\u5bf9\u6027\u5730\u53bb\u9664\u6750\u6599\u3002\u5f53\u7136\uff0c\u6839\u636e\u8981\u53bb\u9664\u7684\u6750\u6599\uff0c\u6240\u4f7f\u7528\u7684\u523b\u8680\u5242\uff08\u6c14\u4f53\u6216\u6db2\u4f53\uff09\u4e5f\u4e0d\u540c\u3002\u5e38\u7528\u523b\u8680\u5242\u6709\u4ee5\u6c1f\u6216\u6c2f\u4e3a\u57fa\u7840\u7684\u5316\u5408\u7269\u7b49\u3002\u5316\u5b66\u65b9\u6cd5\u7684\u4f18\u70b9\u662f\u201c\u9ad8\u9009\u62e9\u6bd4\u201d\uff0c\u53ef\u4ee5\u53ea\u53bb\u9664\u60f3\u53bb\u9664\u7684\u6750\u6599\u3002<\/p>\n<p>\u7269\u7406\u65b9\u6cd5\u662f\u501f\u52a9\u5177\u6709\u9ad8\u80fd\u91cf\u7684\u79bb\u5b50\u649e\u51fb\u6676\u5706\u8868\u9762\uff0c\u4ee5\u53bb\u9664\u6750\u6599\uff0c\u8fd9\u79cd\u65b9\u6cd5\u53eb\u6e85\u5c04\u523b\u8680\uff08Sputtering\uff09\u3002\u8be5\u65b9\u6cd5\u5148\u628a\u6c14\u4f53\uff08\u4e3b\u8981\u4f7f\u7528\u60f0\u6027\u6c14\u4f53\uff09\u6c14\u538b\u964d\u4f4e\uff0c\u518d\u8d4b\u4e88\u9ad8\u80fd\u91cf\uff0c\u4f7f\u6c14\u4f53\u5206\u89e3\u4e3a\u539f\u5b50\uff08+\uff09\u4e0e\u7535\u5b50\uff08-\uff09\u3002\u6b64\u65f6\uff0c\u671d\u6676\u5706\u65b9\u5411\u65bd\u52a0\u7535\u573a\uff0c\u539f\u5b50\u5c31\u4f1a\u5728\u7535\u573a\u4f5c\u7528\u4e0b\u52a0\u901f\u4e0e\u6676\u5706\u53d1\u751f\u51b2\u649e\u3002<\/p>\n<p>\u8fd9\u79cd\u65b9\u6cd5\u7684\u539f\u7406\u5f88\u7b80\u5355\uff0c\u4f46\u5728\u5b9e\u9645\u5de5\u827a\u4e2d\uff0c\u4ec5\u51ed\u8fd9\u4e00\u539f\u7406\u5f88\u96be\u8fbe\u6210\u76ee\u7684\u3002\u4f4e\u6c14\u538b\u610f\u5473\u7740\u53c2\u52a0\u53cd\u5e94\u7684\u6c14\u4f53\u91cf\u5c11\uff0c\u523b\u8680\u901f\u7387\u5f53\u7136\u5c31\u4f1a\u6162\u4e0b\u6765\u3002\u800c\u4e14\uff0c\u91c7\u7528\u7269\u7406\u65b9\u6cd5\u65f6\uff0c\u4f1a\u79fb\u9664\u8f83\u5927\u9762\u79ef\u7684\u672c\u4e0d\u8be5\u53bb\u9664\u7684\u6750\u6599\u3002\u7269\u7406\u65b9\u6cd5\u91c7\u7528\u5f3a\u884c\u7528\u529b\u523b\u51fa\u6750\u6599\u7684\u65b9\u6cd5\uff0c\u53d1\u751f\u51b2\u649e\u65f6\u4e0d\u4f1a\u533a\u5206\u201c\u5e94\u8be5\u201d\u8fd8\u662f\u201c\u4e0d\u5e94\u8be5\u201d\u53bb\u9664\u7684\u6750\u6599\u3002\uff08\u5728\u540e\u7eed\u4ecb\u7ecd\u6c89\u79ef\u5de5\u827a\u7684\u6c89\u79ef\u6c14\u4f53\u65f6\u4e5f\u4f1a\u8bf4\u5230\u6e85\u5c04\u65b9\u6cd5\uff0c\u5927\u5bb6\u4e0d\u59a8\u8bb0\u4f4f\uff0c\u6709\u52a9\u4e8e\u4e0b\u6587\u7684\u7406\u89e3\u3002\uff09<\/p>\n<p>\u56e0\u6b64\uff0c\u5728\u5b9e\u9645\u7684\u523b\u8680\u5de5\u827a\u4e2d\uff0c\u6211\u4eec\u4e3b\u8981\u91c7\u7528\u5c06\u5316\u5b66\u548c\u7269\u7406\u65b9\u6cd5\u76f8\u7ed3\u5408\u7684\u53cd\u5e94\u6027\u79bb\u5b50\u523b\u8680\uff08RIE, Reactive Ion Etching\uff09\u3002RIE\u5c5e\u4e8e\u5e72\u523b\u8680\u7684\u4e00\u79cd\uff0c\u5b83\u5c06\u523b\u8680\u6c14\u4f53\u53d8\u6210\u7b49\u79bb\u5b50\uff0c\u4ee5\u8fdb\u884c\u523b\u8680\u3002\u5177\u4f53\u800c\u8a00\uff0c\u8fd9\u79cd\u65b9\u6cd5\u5728\u8bbe\u5907\u5185\u6295\u5165\u6df7\u5408\u6c14\u4f53\uff08\u53cd\u5e94\u6c14\u4f53\u4e0e\u60f0\u6027\u6c14\u4f53\uff09\u540e\uff0c\u8d4b\u4e88\u6c14\u4f53\u9ad8\u80fd\u91cf\uff0c\u4f7f\u5176\u5206\u89e3\u4e3a\u7535\u5b50\uff08Electron\uff09\u3001\u9633\u79bb\u5b50\uff08Positive Ion\uff09\u548c\u81ea\u7531\u57fa\uff08Radical\uff09<sup style=\"color: #ff0000;\">* <\/sup>\u3002\u8d28\u91cf\u8f83\u8f7b\u7684\u7535\u5b50\u57fa\u672c\u4e0a\u8d77\u4e0d\u4e86\u4ec0\u4e48\u4f5c\u7528\uff0c\u800c\u5728\u7535\u573a\u4e2d\u5411\u9633\u79bb\u5b50\u65bd\u52a0\u51b2\u5411\u6676\u5706\u65b9\u5411\u7684\u52a0\u901f\u5ea6\uff0c\u5c31\u4f1a\u53d1\u751f\u7269\u7406\u523b\u8680\u3002\u9633\u79bb\u5b50\u5177\u6709\u6b63\u7535\u8377\uff0c\u5728\u7535\u573a\u4e2d\u52a0\u901f\u65f6\u65b9\u5411\u6027\u5f88\u5f3a\u3002\u5230\u8fd9\u91cc\uff0c\u662f\u4e0d\u662f\u4e0e\u7269\u7406\u65b9\u6cd5\u6ca1\u4ec0\u4e48\u4e24\u6837\u5462\uff1f<\/p>\n<p class=\"footnote\"><sup style=\"color: #ff0000;\">* <\/sup>\u81ea\u7531\u57fa\uff1a\u6307\u6c14\u4f53\u5177\u6709\u4e0d\u6210\u5bf9\u7535\u5b50\u7b49\u9ad8\u53cd\u5e94\u6027\u7684\u72b6\u6001\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9485\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170928\/SK%ED%95%98%EC%9D%B4%EB%8B%89%EC%8A%A4-%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%95-4%ED%8E%B8_04.png\" alt=\"\" width=\"1000\" height=\"1320\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe4: RIE\u5de5\u827a\u6982\u8981<\/p>\n<p>\u7136\u800c\uff0c\u5728\u8fd9\u4e00\u8fc7\u7a0b\u4e2d\uff0c\u9633\u79bb\u5b50\u8fd8\u4f1a\u8d77\u5230\u4e00\u4e2a\u4f5c\u7528\uff1a\u5f31\u5316\u88ab\u649e\u51fb\u6750\u6599\u7684\u5316\u5b66\u952e\u3002\u7535\u573a\u4f7f\u9633\u79bb\u5b50\u5f84\u76f4\u5411\u524d\u53d1\u5c04\u51fa\u53bb\uff0c\u4f1a\u96c6\u4e2d\u649e\u5230\u56fe4\u6240\u793a\u7684\u7ea2\u8272\u90e8\u5206\u3002\u4fa7\u58c1\u5316\u5b66\u952e\u7a33\u56fa\uff0c\u800c\u6b63\u9762\u5316\u5b66\u952e\u56e0\u649e\u51fb\u88ab\u5f31\u5316\u3002\u968f\u540e\u63a5\u89e6\u5177\u6709\u6781\u9ad8\u5316\u5b66\u6d3b\u6027\u7684\u81ea\u7531\u57fa\uff0c\u6b63\u9762\u6750\u6599\u4fbf\u4f1a\u6709\u66f4\u9ad8\u7684\u523b\u8680\u901f\u7387\uff0c\u6700\u7ec8\u9020\u5c31\u975e\u7b49\u5411\u6027\u5f88\u9ad8\u7684\u523b\u8680\u3002<\/p>\n<p>\u53ef\u89c1\uff0c\u7b49\u79bb\u5b50\u523b\u8680\u6280\u672f\u53ef\u8c13\u662f\u201c\u4e00\u4e3e\u4e09\u5f97\u201d\uff1a\u2460 \u751f\u6210\u9633\u79bb\u5b50\uff0c\u4ea7\u751f\u7269\u7406\u6027\u523b\u8680\uff1b\u2461 \u4f7f\u88ab\u523b\u8680\u6750\u6599\u7684\u5316\u5b66\u952e\u53d8\u5f31\uff1b\u2462 \u8fd8\u80fd\u63d0\u9ad8\u523b\u8680\u6c14\u4f53\u7684\u53cd\u5e94\u6027\u3002\u65e2\u53d6\u4e86\u5316\u5b66\u523b\u8680\u4e4b\u957f \u2014\u2014 \u201c\u9ad8\u9009\u62e9\u6bd4\u201d\uff0c\u53c8\u4e0d\u5931\u7269\u7406\u523b\u8680\u7684\u4f18\u70b9 \u2014\u2014\u201c\u975e\u7b49\u5411\u6027\u523b\u8680\u201d\u3002<\/p>\n<p>\u5f53\u7136\uff0c\u5373\u4fbf\u91c7\u7528RIE\uff0c\u4ec5\u51ed\u523b\u8680\u5de5\u827a\u4e5f\u5f88\u96be100%\u5f97\u5230\u6240\u9700\u7684\u56fe\u5f62\u3002\u5982\u679c\u8981\u89e3\u51b3\u5176\u4ed6\u95ee\u9898\uff0c\u8fd8\u9700\u8981\u6539\u53d8\u6c14\u4f53\u7ec4\u5408\u3001\u91c7\u7528\u786c\u63a9\u6a21<sup style=\"color: #ff0000;\">* <\/sup>\uff08Hard Mask\uff09\u7684\u5176\u4ed6\u5de5\u827a\u6216\u65b0\u6750\u6599\u7684\u5e2e\u52a9\u3002<\/p>\n<p class=\"footnote\"><sup style=\"color: #ff0000;\">* <\/sup>\u786c\u63a9\u819c\uff08Hard Mask\uff09\uff1a\u4e3a\u9632\u6b62\u56e0\u56fe\u5f62\u5fae\u7ec6\u5316\u800c\u9020\u6210\u5149\u523b\u80f6\u4e0a\u7684\u56fe\u5f62\u88ab\u7834\u574f\uff0c\u5728\u5176\u4e0b\u65b9\u989d\u5916\u6dfb\u52a0\u7684\u63a9\u6a21\u7248\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u523b\u8680\u6c14\u4f53\u4e0e\u9644\u52a0\u6c14\u4f53<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u523b\u8680\u5de5\u827a\u4e2d\u6240\u4f7f\u7528\u7684\u6c14\u4f53\u975e\u5e38\u91cd\u8981\u3002\u4ece\u4e0a\u8ff0\u5185\u5bb9\u4e2d\u53ef\u4ee5\u770b\u51fa\uff0c\u523b\u8680\u5de5\u827a\u7684\u6838\u5fc3\u5c31\u662f\u5316\u5b66\u53cd\u5e94\u3002\u6240\u4ee5\uff0c\u6211\u4eec\u8981\u6839\u636e\u60f3\u53bb\u9664\u7684\u6750\u6599\uff0c\u9009\u62e9\u76f8\u5e94\u7684\u523b\u8680\u5242\uff08Etchant\uff09\u8fdb\u884c\u523b\u8680\u3002\u9009\u62e9\u523b\u8680\u6c14\u4f53\u65f6\uff0c\u8981\u8861\u91cf\u53cd\u5e94\u751f\u6210\u7684\u526f\u4ea7\u7269\u662f\u5426\u5bb9\u6613\u88ab\u53bb\u9664\u3001\u523b\u8680\u9009\u62e9\u6bd4\u662f\u5426\u591f\u9ad8\u548c\u523b\u8680\u901f\u7387\u662f\u5426\u8db3\u591f\u5feb\u7b49\u56e0\u7d20\u3002\u7ecf\u5e38\u91c7\u7528\u7684\u523b\u8680\u6c14\u4f53\u6709\u6c1f\uff08F\uff09\u3001\u6c2f\uff08CI\uff09\u3001\u6eb4\uff08Br\uff09\u7b49\u5364\u65cf\u5143\u7d20\u5316\u5408\u7269\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9486\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170932\/SK%ED%95%98%EC%9D%B4%EB%8B%89%EC%8A%A4-%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%95-4%ED%8E%B8_05.png\" alt=\"\" width=\"1000\" height=\"1140\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe5: \u7b49\u79bb\u5b50\u523b\u8680\u6c14\u4f53\u7684\u79cd\u7c7b\uff08\u6458\u81ea\uff1a\uff08\u682a\uff09\u56fe\u4e66\u51fa\u7248HANOL\u51fa\u7248\u793e[\u534a\u5bfc\u4f53\u5236\u9020\u6280\u672f\u7684\u7406\u89e3443p])<\/p>\n<p>\u5728\u534a\u5bfc\u4f53\u7684\u5236\u7a0b\u4e2d\uff0c\u6676\u5706\u8868\u9762\u4f1a\u6d82\u6577\u5404\u79cd\u7269\u8d28\u3002\u56e0\u6b64\uff0c\u4ece\u7406\u8bba\u4e0a\u6765\u8bb2\uff0c\u8981\u523b\u8680\u7684\u6750\u6599\u6709\u65e0\u6570\u79cd\u3002\u6211\u4eec\u4e3b\u8981\u4e3e\u51e0\u4e2a\u4ee3\u8868\u6027\u7684\u4f8b\u5b50\u3002\u6bd4\u5982\uff0c\u7845\uff08Si\uff09\u7cfb\u5217\u5143\u7d20\u91c7\u7528\u6c1f\u7cfb\u6c14\u4f53\u53ef\u4ee5\u8f7b\u6613\u53bb\u9664\u3002\u7845\u9047\u6c1f\u7acb\u5373\u53cd\u5e94\u751f\u6210\u5f88\u5bb9\u6613\u88ab\u6c14\u5316\u7684\u6c1f\u5316\u7845\u3002SiF4\u5c31\u662f\u6c1f\u5316\u7845\u7684\u4e00\u79cd\uff0c\u5728\u6807\u51c6\u5927\u6c14\u538b\u4e0b\uff0c\u5176\u7194\u70b9\u4e3a\uff0d90.3\u2103\u3002\u4e5f\u5c31\u662f\u8bf4\uff0c\u53cd\u5e94\u540e\u751f\u6210\u7684SiF4\u5c06\u7acb\u5373\u6c14\u5316\u6210\u6c14\u4f53\u6d88\u6563\uff0c\u5373\u5728\u6676\u4f53\u8868\u9762\u53d1\u751f\u523b\u8680\u7684\u540c\u65f6\u7acb\u523b\u53d8\u6210\u6c14\u4f53\u3002<\/p>\n<p>\u5e38\u7528\u4f5c\u7edd\u7f18\u6216\u4fdd\u62a4\u819c\u7684\u4e8c\u6c27\u5316\u7845\uff08SiO2\uff09\u4e5f\u5f88\u5bb9\u6613\u88ab\u542b\u6c1f\u6c14\u4f53\u53bb\u9664\u3002\u4e0e\u7eaf\u7845\u4e0d\u540c\uff0c\u4e8c\u6c27\u5316\u7845\u5df2\u7ecf\u662f\u7845\u5143\u7d20\u4e0e\u6c27\u7ed3\u5408\u5f62\u6210\u7684\u7a33\u5b9a\u5316\u5408\u7269\uff08\u7845\u71c3\u70e7\u540e\u7684\u7c89\u5c18\uff09\uff0c\u6240\u4ee5\u9700\u8981\u4f7f\u7528\u53d1\u70ed\u7684\u6c14\u4f53\u624d\u80fd\u5c06\u5176\u53bb\u9664\u3002\u6c1f\u4e0e\u78b3\uff08C\uff09\u7ed3\u5408\u7684\u6c14\u4f53\u4fbf\u662f\u5e38\u7528\u4e8e\u53bb\u9664\u4e8c\u6c27\u5316\u7845\u7684\u523b\u8680\u6c14\u4f53\u3002\u901a\u8fc7\u53d1\u70ed\u53cd\u5e94\uff0c\u8be5\u6c14\u4f53\u53ef\u593a\u53d6\u4e0e\u6c27\u6c14\u7ed3\u5408\u7684\u7845\u539f\u5b50\u3002<\/p>\n<p>HKMG<sup style=\"color: #ff0000;\">* <\/sup>\u3001BEOL<sup style=\"color: #ff0000;\">* <\/sup>\u7b49\u5de5\u827a\u5219\u9700\u8981\u523b\u8680\u91d1\u5c5e\u6027\u6750\u6599\u3002\u91d1\u5c5e\u6027\u6750\u6599\u4e00\u822c\u6613\u4e0e\u5364\u65cf\u5143\u7d20\uff08\u6c2f\u3001\u6c1f\u7b49\uff09\u53d1\u751f\u53cd\u5e94\uff0c\u4f46\u5176\u526f\u4ea7\u7269\u7684\u7194\u70b9\u975e\u5e38\u9ad8\uff0c\u6240\u4ee5\u5f88\u96be\u53bb\u9664\u3002\u4ee5\u94dc\u4e3a\u4f8b\uff0c\u94dc\u4e0e\u6c14\u4f53\u53cd\u5e94\u4ea7\u751f\u7684\u526f\u4ea7\u7269\u7194\u70b9\u57281,000\u2103\u4ee5\u4e0a\u3002\u4e5f\u5c31\u662f\u8bf4\uff0c\u94dc\u9047\u5230\u523b\u8680\u6c14\u4f53\u540e\uff0c\u6676\u5706\u8868\u9762\u5c31\u4f1a\u50cf\u751f\u4e86\u9508\u4e00\u6837\uff0c\u60f3\u53bb\u9664\u8fd9\u5c42\u201c\u9508\u201d\uff0c\u9700\u8981\u5411\u6676\u5706\u65bd\u52a01,000\u2103\u7684\u9ad8\u6e29\uff0c\u4f46\u8fd9\u6837\u4e00\u6765\u5176\u4ed6\u91cd\u8981\u7684\u7535\u5b50\u5143\u4ef6\u5c31\u5f88\u6709\u53ef\u80fd\u88ab\u70e7\u6bc1\u3002\u56e0\u6b64\uff0c\u5373\u4fbf\u94dc\u5177\u6709\u975e\u5e38\u51fa\u8272\u7684\u7535\u6c14\u7279\u6027\uff0c\u5b83\u5374\u5728\u94dd\u7684\u7535\u6c14\u7279\u6027\u903c\u8fd1\u7269\u7406\u6781\u9650\u65f6\u624d\u88ab\u5f15\u8fdb\u4f5c\u4e3a\u6750\u6599\u3002\u800c\u4e14\uff0c\u4e3a\u4e86\u514b\u670d\u94dc\u7684\u8fd9\u79cd\u201c\u7f3a\u9677\u201d\uff0c\u8fd8\u9700\u5f15\u8fdb\u540d\u4e3a\u9576\u5d4c\uff08Damascene)<sup>5 <\/sup>\u7684\u65b0\u5de5\u827a\u3002\u6240\u4ee5\uff0c\u5927\u5bb6\u8981\u65f6\u523b\u8bb0\u4f4f\uff0c\u91cd\u70b9\u5e76\u4e0d\u5728\u4e8e\u65b0\u6750\u6599\u672c\u8eab\u662f\u5426\u5177\u6709\u826f\u597d\u7684\u7269\u7406\u7279\u6027\uff0c\u800c\u662f\u5728\u4e8e\u4e0e\u5176\u4e00\u540c\u5f15\u8fdb\u7684\u65b0\u5de5\u827a\u662f\u5426\u4e0e\u5df2\u6709\u5de5\u827a\u76f8\u5339\u914d\uff0c\u53ef\u4ee5\u5b9e\u73b0\u91cf\u4ea7\u3002<\/p>\n<p>\u5176\u5b9e\uff0c\u5728\u5b9e\u9645\u5de5\u827a\u4e2d\uff0c\u6211\u4eec\u5f88\u96be\u6839\u636e\u8981\u53bb\u9664\u7684\u6750\u6599\u6311\u9009\u51fa\u5b8c\u7f8e\u7684\u523b\u8680\u6c14\u4f53\u3002\u4f8b\u5982\uff0c\u5bf9\u53bb\u9664\u7845\u594f\u6548\u7684\u6c14\u4f53\u5bf9\u53bb\u9664\u4e8c\u6c27\u5316\u7845\u4e5f\u540c\u6837\u594f\u6548\uff08\u53cd\u4e4b\u4ea6\u7136\uff09\u3002\u5982\u679c\u7845\u4e0e\u4e8c\u6c27\u5316\u7845\u540c\u5728\uff0c\u4f46\u60f3\u66f4\u591a\u5730\u53bb\u9664\u5176\u4e2d\u4e00\u79cd\u6750\u6599\u600e\u4e48\u529e\uff1f\u8fd9\u65f6\uff0c\u5982\u4f55\u5236\u4f5c\u6df7\u5408\u6c14\u4f53\u6210\u4e86\u5173\u952e\u3002\u4f8b\u5982\uff0c\u8c03\u9ad8\u6c1f\u6c14\u4e2d\u7684\u78b3\u6bd4\u4f8b\uff0c\u53d1\u70ed\u53cd\u5e94\u5c31\u4f1a\u66f4\u52a0\u6fc0\u70c8\uff0c SiO2\u7684\u9009\u62e9\u6bd4\u81ea\u7136\u5c31\u4f1a\u53d8\u9ad8\u3002<\/p>\n<p>\u9644\u52a0\u6c14\u4f53\u4e5f\u5f88\u91cd\u8981\u3002\u6211\u4eec\u53ef\u4ee5\u901a\u8fc7\u5728\u523b\u8680\u6c14\u4f53\u6dfb\u52a0\u6c27\u6c14\uff08O2\uff09\u3001\u6c2e\u6c14\uff08N2\uff09\u548c\u6c22\u6c14\uff08H2\uff09\u7b49\u5404\u79cd\u5176\u4ed6\u9644\u52a0\u6c14\u4f53\uff0c\u4f7f\u523b\u8680\u6c14\u4f53\u5177\u6709\u67d0\u79cd\u7279\u6027\u3002\u4f8b\u5982\uff0c\u5728\u53bb\u9664\u7845\u65f6\u9644\u52a0\u6c22\u6c14\uff0c\u53ef\u751f\u6210\u63d0\u9ad8\u975e\u7b49\u5411\u6027\u523b\u8680\u7684\u5185\u58c1\u3002\u6b64\u5916\uff0c\u8fd8\u53ef\u6dfb\u52a0\u90e8\u5206\u60f0\u6027\u6c14\u4f53\u3002\u5176\u4e2d\uff0c\u6c16\u6c14\uff08Ne\uff09\u5c31\u662f\u975e\u5e38\u5178\u578b\u7684\u60f0\u6027\u6c14\u4f53\u4e4b\u4e00\uff0c\u5b83\u5728\u53ef\u8c03\u8282\u523b\u8680\u6c14\u4f53\u6d53\u5ea6\u7684\u540c\u65f6\uff0c\u8fd8\u53ef\u63d0\u4f9b\u7269\u7406\u6027\u523b\u8680\u7684\u6548\u679c\u3002<\/p>\n<p class=\"footnote\"><sup style=\"color: #ff0000;\">* <\/sup> HKMG\uff08High-K Metal Gate\uff09: \u53ef\u6709\u6548\u51cf\u5c11\u7535\u6d41\u6cc4\u9732\u7684\u65b0\u4e00\u4ee3MOSFET\u6805\u6781\uff1b\u662f\u4e00\u79cd\u4ee5\u91d1\u5c5e\u4ee3\u66ff\u4f20\u7edf\u7684\u591a\u6676\u7845\uff08Polysilicon\uff09\u6805\u6781\u5e76\u4ee5\u9ad8\u4ecb\u7535\uff08High-K\uff09\u53d6\u4ee3\u6c27\u5316\u7845\u7edd\u7f18\u819c\u7684\u6676\u4f53\u7ba1\u3002<br \/>\n<sup style=\"color: #ff0000;\">* <\/sup>\u540e\u7aef\u5de5\u827a\uff08BEOL\uff0cBack End Of the Line\uff09\uff1a\u901a\u8fc7\u7ec6\u5fae\u7684\u91d1\u5c5e\u5e03\u7ebf\u5728\u591a\u8fbe\u6570\u5341\u4ebf\u4e2a\u7535\u5b50\u5143\u5668\u4ef6\u4e4b\u95f4\u5f62\u6210\u8fde\u63a5\u7684\u5de5\u827a<br \/>\n<sup style=\"color: #ff0000;\">* <\/sup>\u9576\u5d4c\uff08Damascene\uff09\uff1a\u4e3a\u4f7f\u7528\u94dc\u4f5c\u4e3a\u91d1\u5c5e\u5e03\u7ebf\u6750\u6599\u6240\u9700\u7684\u5de5\u827a\u3002\u8be5\u5de5\u827a\u5148\u523b\u8680\u91d1\u5c5e\u5e03\u7ebf\u7684\u4f4d\u7f6e\uff0c\u968f\u540e\u6c89\u79ef\u91d1\u5c5e\uff0c\u518d\u901a\u8fc7\u7269\u7406\u65b9\u6cd5\u53bb\u9664\u591a\u4f59\u7684\u90e8\u5206\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u7ed3\u8bba\uff1a\u63d0\u9ad8\u5bc6\u5ea6\u7684\u53e6\u4e00\u4e2a\u6293\u624b<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u4e00\u8a00\u4ee5\u853d\u4e4b\uff0c\u523b\u8680\u5de5\u827a\u5c31\u662f\u7ed3\u5408\u7269\u7406\u548c\u5316\u5b66\u65b9\u6cd5\u4ee5\u5f62\u6210\u5fae\u7ec6\u56fe\u6848\u7684\u534a\u5bfc\u4f53\u5236\u7a0b\u5de5\u827a\u7684\u6838\u5fc3\u3002\u523b\u8680\u867d\u7136\u4e0d\u80fd\u50cf\u5149\u523b\u673a\u4e00\u6837\uff0c\u76f4\u63a5\u7ed8\u5236\u7cbe\u5bc6\u7684\u56fe\u5f62\uff0c\u4f46\u53ef\u901a\u8fc7\u8c03\u8282\u6c14\u4f53\u6bd4\u4f8b\u3001\u6e29\u5ea6\u3001\u7535\u573a\u5f3a\u5ea6\u548c\u6c14\u538b\u7b49\u5404\u79cd\u53c2\u6570\uff0c\u4f7f\u6676\u5706\u7684\u6570\u5343\u4ebf\u4e2a\u6676\u4f53\u7ba1\u5177\u6709\u76f8\u540c\u7684\u56fe\u5f62\u3002<\/p>\n<p>\u8fd1\u6765\uff0c\u4ee5\u8fdb\u4e00\u6b65\u5347\u7ea7\u5149\u523b\u673a\u6765\u63d0\u9ad8\u5bc6\u5ea6\u7684\u65b9\u6cd5\u5df2\u8fbe\u5230\u4e86\u74f6\u9888\u3002\u523b\u8680\u5de5\u827a\u7684\u91cd\u8981\u6027\u81ea\u7136\u66f4\u52a0\u7a81\u663e\u3002CPU\u548cAP\u7b49\u4ea7\u54c1\u4e2d\u7684\u9ccd\u5f0f\u573a\u6548\u7535\u6676\u4f53\uff08FinFET)<sup style=\"color: #ff0000;\">* <\/sup>\u5c31\u662f\u5f88\u597d\u7684\u4e00\u4e2a\u6848\u4f8b\u3002<\/p>\n<p>\u5c24\u5176\u5bf9\u4e8eSK\u6d77\u529b\u58eb\u8fd9\u79cd\u534a\u5bfc\u4f53\u5b58\u50a8\u5668\u5236\u9020\u5546\u6765\u8bf4\uff0c\u52a8\u6001\u968f\u673a\u5b58\u50a8\u5668\uff08DRAM\uff09\u548c\u95ea\u5b58\uff08NAND\uff09\u7b49\u4e3b\u6253\u4ea7\u54c1\u5bf9\u523b\u8680\u5de5\u827a\u7684\u4f9d\u5b58\u5ea6\u975e\u5e38\u9ad8\u3002\u6bd4\u5982\uff0cDRAM\u4e2d\u88c5\u8f7d\u6570\u636e\u7684\u7535\u5bb9\uff08Capacitor\uff09\u8981\u5806\u53e0\u5f97\u66f4\u9ad8\uff0c\u800cNAND\u5219\u9700\u8981\u5148\u5b9e\u73b0\u4e09\u7ef4\u5316\uff0c\u4e00\u6b21\u523b\u8680\u5c31\u8981\u7a7f\u900f100\u591a\u5c42\u3002\u7531\u4e8e\u8fd9\u4e9b\u4ea7\u54c1\u5fc5\u7136\u4f1a\u4e0d\u65ad\u62c9\u9ad8\u6df1\u5bbd\u6bd4\uff08Aspect Ratio\uff09<sup style=\"color: #ff0000;\">* <\/sup>\uff0c\u4e3a\u786e\u4fdd\u53ef\u9760\u5ea6\uff0c\u5f00\u59cb\u523b\u8680\u7684\u90e8\u5206\u4e0e\u5e95\u8fb9\u76f4\u5f84\u8981\u76f8\u5dee\u65e0\u51e0\u3002\u53ef\u89c1\u523b\u8680\u5de5\u827a\u6709\u5f85\u89e3\u51b3\u7684\u95ee\u9898\u4ecd\u7136\u5f88\u591a\u3002<\/p>\n<p class=\"footnote\"><sup style=\"color: #ff0000;\">* <\/sup> \u9ccd\u5f0f\u573a\u6548\u7535\u6676\u4f53\uff08FinFET\uff0cFin Field-Effect Transistor\uff09\uff1a\u4e09\u7ef4MOSFET\u7684\u4e00\u79cd\uff0c\u56e0\u7535\u6676\u4f53\u7684\u5f62\u72b6\u4e0e\u9c7c\u9ccd\u76f8\u4f3c\u800c\u5f97\u540d\u3002<br \/>\n<sup style=\"color: #ff0000;\">* <\/sup>\u6df1\u5bbd\u6bd4\uff08Aspect Ratio\uff0c\u4e5f\u79f0\u7eb5\u6a2a\u6bd4\uff09\uff1a\u523b\u8680\u9ad8\u5ea6\u4e0e\u5bbd\u5ea6\u7684\u6bd4\u503c\u3002\u6df1\u5bbd\u6bd4\u8d8a\u9ad8\u5c31\u8868\u793a\u7a7f\u900f\u5f97\u8d8a\u6df1\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9487\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29170935\/SK%ED%95%98%EC%9D%B4%EB%8B%89%EC%8A%A4-%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%95-4%ED%8E%B8_06.png\" alt=\"\" width=\"1000\" height=\"670\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe6: DRAM\u7684\u5185\u90e8\u7ed3\u6784\uff1b\u5355\u5143\u533a\u57df\u5185\u8bb8\u591a\u7ea4\u7ec6\u7eb5\u5411\u7684\u7ed3\u6784\u5373\u4e3a\u7535\u5bb9<\/p>\n<p>\u76f8\u4fe1\u8bfb\u8005\u4eec\u53ef\u4ee5\u4ece\u672c\u7bc7\u523b\u8680\u5de5\u827a\u4ecb\u7ecd\u4e2d\u518d\u4e00\u6b21\u4f53\u4f1a\u5230\u534a\u5bfc\u4f53\u5236\u7a0b\u5de5\u827a\u95f4\u7d27\u5bc6\u76f8\u8fde\u5e76\u76f8\u4e92\u5f71\u54cd\u3002\u4e0a\u6587\u4e5f\u8bf4\u5230\uff0c\u7845\u4e0e\u4e8c\u6c27\u5316\u7845\u9047\u6c1f\u53ef\u7acb\u5373\u6c14\u5316\u6210\u6c14\u4f53\u6325\u53d1\u3002\u4f46\u5982\u679c\u628a\u6676\u5706\u6750\u8d28\u53d8\u6210\u9517\uff08Ge\uff09\u7b49\u5176\u4ed6\u6750\u6599\uff0c\u5373\u4fbf\u672c\u8eab\u5177\u6709\u5f88\u597d\u7684\u7269\u7406\u7279\u6027\uff0c\u4f46\u53ea\u8981\u5b83\u4eec\u65e0\u6cd5\u7ecf\u523b\u8680\u3001\u6c89\u79ef\u7b49\u5de5\u827a\u52a0\u5de5\uff0c\u4fbf\u6ca1\u6709\u610f\u4e49\u3002<\/p>\n<p>\u5982\u4eca\uff0c\u5236\u9020\u6280\u672f\u7684\u7a81\u7834\u53d8\u5f97\u6108\u53d1\u8270\u96be\uff0c\u7b14\u8005\u5e0c\u671b\u76f4\u63a5\u6216\u95f4\u63a5\u4ece\u4e8b\u534a\u5bfc\u4f53\u9886\u57df\u5de5\u4f5c\u7684\u4eba\u5458\u4eec\u4e5f\u80fd\u6e05\u695a\u5730\u8ba4\u8bc6\u5230\u8fd9\u4e00\u4e8b\u5b9e\u3002\u4e3a\u4e86\u653b\u514b\u5269\u4e0b\u7684\u969c\u788d\uff0c\u6211\u4eec\u5bf9\u4e0a\u4e0b\u6e38\u76f8\u5173\u5de5\u827a\u4e5f\u8981\u975e\u5e38\u4e86\u89e3\uff0c\u8fd8\u8981\u4e0e\u76f8\u5173\u90e8\u95e8\u5bc6\u5207\u6c9f\u901a\u3002<\/p>\n<p class=\"footnote\">\u203b \u672c\u6587\u4e3a\u5916\u90e8\u4e13\u5bb6\u5bf9\u534a\u5bfc\u4f53\/ICT\u7684\u89c1\u89e3\uff0c\u5e76\u4e0d\u4ee3\u8868SK\u6d77\u529b\u58eb\u7684\u7acb\u573a\u3002<\/p>\n<p><a href=\"https:\/\/news.skhynix.com.cn\/tag\/%e5%89%8d%e7%ab%af%e5%b7%a5%e8%89%ba\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span style=\"text-decoration: underline;\"><strong><span class=\"ui-provider ee bog boh boi boj bok bol bom bon boo bop boq bor bos bot bou bov bow box boy boz bpa bpb bpc bpd bpe bpf bpg bph bpi bpj bpk bpl bpm bpn\" dir=\"ltr\">\u534a\u5bfc\u4f53\u524d\u7aef\u5de5\u827a\u7cfb\u5217\u6587\u7ae0<\/span><\/strong><\/span><\/a><\/p>\n<p><a href=\"https:\/\/news.skhynix.com.cn\/tag\/%e5%90%8e%e7%ab%af%e5%b7%a5%e8%89%ba\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span style=\"text-decoration: underline;\"><strong><span class=\"ui-provider ee bog boh boi boj bok bol bom bon boo bop boq bor bos bot bou bov bow box boy boz bpa bpb bpc bpd bpe bpf bpg bph bpi bpj bpk bpl bpm bpn\" dir=\"ltr\">\u534a\u5bfc\u4f53\u540e\u7aef\u5de5\u827a\u7cfb\u5217\u6587\u7ae0<\/span><\/strong><\/span><\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u5149\u201c\u5806\u53e0\u201d\u53ef\u4e0d\u884c \u5728\u534a\u5bfc\u4f53\u524d\u7aef\u5de5\u827a\u7b2c\u4e09\u7bc7\u4e2d\uff0c\u6211\u4eec\u4e86\u89e3\u4e86\u5982\u4f55\u5236\u4f5c\u201c\u997c\u5e72\u6a21\u5177\u201d\u3002\u672c\u671f\uff0c\u6211\u4eec\u5c31\u6765\u8bb2\u8bb2\u5982\u4f55\u91c7\u7528\u8fd9\u4e2a\u201c\u997c [\u2026]<\/p>\n","protected":false},"author":2,"featured_media":1081,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_migrated_source_id":9481,"footnotes":"","_members_access_role":[],"_members_access_error":""},"categories":[5],"tags":[649,645,646],"class_list":["post-1088","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-tech-and-ai","tag-649","tag-645","tag-646"],"acf":[],"_links":{"self":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1088","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/comments?post=1088"}],"version-history":[{"count":2,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1088\/revisions"}],"predecessor-version":[{"id":4186,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1088\/revisions\/4186"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media\/1081"}],"wp:attachment":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media?parent=1088"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/categories?post=1088"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/tags?post=1088"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}