{"id":1144,"date":"2023-01-05T06:00:46","date_gmt":"2023-01-05T06:00:46","guid":{"rendered":"http:\/\/localhost:8080\/semiconductor-front-end-process-episode-3\/"},"modified":"2026-06-15T23:28:09","modified_gmt":"2026-06-15T23:28:09","slug":"semiconductor-front-end-process-episode-3","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/semiconductor-front-end-process-episode-3\/","title":{"rendered":"[\u534a\u5bfc\u4f53\u524d\u7aef\u5de5\u827a\uff1a\u7b2c\u4e09\u7bc7] \u5149\u523b\u2014\u2014\u534a\u5bfc\u4f53\u7535\u8def\u7684\u7ed8\u5236"},"content":{"rendered":"<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u7ed8\u5236\u7cbe\u7ec6\u7535\u8def\u7684\u7b2c\u4e00\u6b65<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 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style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u6a21\u5177\u7684\u5236\u4f5c\u8fc7\u7a0b\uff1a\u5149\u523b\u5de5\u827a<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u534a\u5bfc\u4f53\u5236\u9020\u5546\u628a\u4e0a\u9762\u6211\u4eec\u6240\u8bf4\u7684\u5236\u4f5c\u997c\u5e72\u6a21\u5177\uff08\u906e\u76d6\u7269\uff09\u7684\u8fc7\u7a0b\u53eb\u505a\u5149\u523b\u5de5\u827a\u3002\u5149\u523b\u5de5\u827a\u7684\u7b2c\u4e00\u6b65\u5c31\u662f\u6d82\u8986\u5149\u523b\u80f6\uff08Photoresist\uff09\u3002\u5149\u523b\u80f6\u7ecf\u66dd\u5149\u540e\u5316\u5b66\u6027\u8d28\u4f1a\u53d1\u751f\u53d8\u5316\u3002\u5177\u4f53\u800c\u8a00\uff0c\u5c31\u662f\u5728\u6676\u5706\u4e0a\u6d82\u8986\u5149\u523b\u80f6\u540e\uff0c\u7528\u5149\uff08\u6fc0\u5149\uff09\u7167\u5c04\u6676\u5706\uff0c\u4f7f\u5149\u523b\u80f6\u7684\u6307\u5b9a\u90e8\u5206\u7684\u6027\u8d28\u53d1\u751f\u6539\u53d8\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9313\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29171327\/SK-hynix_%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%953%ED%8E%B8_04.png\" alt=\"\" width=\"1000\" height=\"700\" \/><\/p>\n<p class=\"caption\">\u25b2 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style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u5149\u523b\u80f6\uff08Photoresist\uff09<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u5982\u4e0a\u6240\u8ff0\uff0c\u5149\u523b\u80f6\u7ecf\u66dd\u5149\u540e\uff0c\u5176\u5316\u5b66\u6027\u8d28\u4f1a\u53d1\u751f\u6539\u53d8\u3002\u66f4\u51c6\u786e\u5730\u8bf4\uff0c\u7ecf\u66dd\u5149\u540e\uff0c\u5149\u523b\u80f6\u5728\u663e\u5f71\u6db2\u4e2d\u7684\u6eb6\u89e3\u5ea6\u53d1\u751f\u4e86\u53d8\u5316\uff1a\u66dd\u5149\u540e\u6eb6\u89e3\u5ea6\u4e0a\u5347\u7684\u7269\u8d28\u79f0\u4f5c\u6b63\u6027\u5149\u523b\u80f6\uff08\u6b63\u80f6\uff09\uff0c\u53cd\u4e4b\u5219\u4e3a\u8d1f\u6027\u5149\u523b\u80f6\uff08\u8d1f\u80f6\uff09\u3002\u4e3a\u4e86\u66f4\u597d\u533a\u5206\uff0c\u6211\u4eec\u53ef\u4ee5\u628a\u6700\u76f4\u89c2\u53ef\u89c1\u7684\u7269\u8d28\u7406\u89e3\u4e3a\u6b63\u80f6\u3002\u6b63\u80f6\u7ecf\u663e\u5f71\u5904\u7406\u540e\uff0c\u88ab\u66dd\u5149\u7684\u533a\u57df\u6eb6\u4e8e\u663e\u5f71\u6db2\uff0c\u5728\u540e\u7eed\u7684\u523b\u8680\u3001\u6c89\u79ef\u7b49\u5de5\u827a\u4e2d\uff0c\u8d28\u53d8\u7684\u90e8\u5206\u4f1a\u88ab\u523b\u8680\u53bb\u9664\u6389\uff0c\u800c\u6ca1\u6709\u88ab\u66dd\u5149\u90e8\u5206\u4e0d\u4f1a\u53d7\u540e\u7eed\u5de5\u827a\u7684\u5f71\u54cd\u3002<\/p>\n<p>\u534a\u5bfc\u4f53\u5236\u9020\u5546\u4e00\u822c\u4f1a\u6839\u636e\u5de5\u827a\u7684\u76ee\u7684\u9009\u62e9\u5408\u9002\u7684\u5149\u523b\u80f6\u3002\u4f8b\u5982\uff0c\u8d1f\u80f6\u7ecf\u66dd\u5149\u800c\u56fa\u5316\u7684\u90e8\u5206\uff0c\u5728\u663e\u5f71\u8fc7\u7a0b\u4e2d\uff0c\u56e0\u5438\u6536\u90e8\u5206\u663e\u5f71\u6db2\u800c\u5bb9\u6613\u81a8\u80c0\u3001\u53d8\u5f62\uff0c\u4e0d\u9002\u5408\u7ed8\u5236\u7cbe\u7ec6\u56fe\u5f62\u3002\u56e0\u6b64\uff0c\u7ed8\u5236\u7cbe\u7ec6\u56fe\u5f62\u901a\u5e38\u91c7\u7528\u6b63\u80f6\u3002\u4f46\u8d1f\u80f6\u5374\u5177\u6709\u6210\u672c\u4f4e\u4ee5\u53ca\u5728\u523b\u8680\uff08Etching\uff09\u5de5\u827a\u4e2d\u6297\u523b\u8680\u80fd\u529b\u66f4\u5f3a\u7684\u7684\u4f18\u70b9\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9314\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29171330\/SK-hynix_%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%953%ED%8E%B8_05.png\" alt=\"\" width=\"1000\" height=\"700\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe5\uff1a\u6b63\u6027\u5149\u523b\u80f6\uff08\u6b63\u80f6\uff09\u4e0e\u8d1f\u6027\u5149\u523b\u80f6\uff08\u8d1f\u80f6\uff09<\/p>\n<p>\u9009\u597d\u5149\u523b\u80f6\u540e\uff0c\u5c31\u5f97\u7528\u6d82\u5e03\u673a\uff08Coater\uff09\u6d82\u62b9\u5149\u523b\u80f6\u3002\u901a\u8fc7\u6d82\u5e03\u673a\u7684\u9ad8\u901f\u65cb\u8f6c\uff0c\u6ef4\u843d\u5230\u6676\u5706\u7684\u5149\u523b\u80f6\u53ef\u5747\u5300\u4f38\u5c55\u5230\u6574\u4e2a\u6676\u5706\u8868\u9762\u3002<\/p>\n<p>\u5149\u523b\u80f6\u6d82\u597d\u540e\uff0c\u5e94\u53bb\u9664\u6cbe\u67d3\u5728\u6676\u5706\u80cc\u9762\u6216\u8fb9\u7f18\u7684\u591a\u4f59\u80f6\u6c34\uff0c\u518d\u653e\u5165\u70d8\u7bb1\u5185\u52a0\u70ed\u70d8\u70e4\uff0c\u4f7f\u6eb6\u5242\u84b8\u53d1\uff0c\u4e3a\u4e0b\u4e00\u9053\u5de5\u827a\u505a\u51c6\u5907\u3002<\/p>\n<p>\u968f\u7740\u65f6\u4ee3\u7684\u53d1\u5c55\uff0c\u5149\u523b\u80f6\u7684\u7ed3\u6784\u4e5f\u53d8\u5f97\u8d8a\u6765\u8d8a\u590d\u6742\u3002\u6211\u4eec\u901a\u5e38\u8bf4\u201c\u6d82\u8986\u5149\u523b\u80f6\u201d\uff0c\u4f46\u5176\u5b9e\uff0c\u5927\u90e8\u5206\u7684\u5149\u523b\u80f6\u5e76\u4e0d\u662f\u4e00\u5c42\uff0c\u800c\u662f\u591a\u5c42\u7ed3\u6784\u3002 \u5e95\u90e8\u6297\u53cd\u5c04\u6d82\u5c42\uff08BARC\uff0cBottom\u202fAnti-reflective\u202fCoatings\uff09\u5c31\u662f\u5176\u4e2d\u7684\u4e00\u79cd\u3002\u968f\u7740\u5fae\u7ec6\u5316\u6280\u672f\u7684\u8fdb\u4e00\u6b65\u5347\u7ea7\uff0c\u5149\u523b\u673a\u7167\u5c04\u7684\u5149\u5728\u6676\u5706\u8868\u9762\u88ab\u53cd\u5c04\uff0c\u8fdb\u800c\u5f71\u54cd\u5230\u56fe\u5f62\u7684\u7ed8\u5236\u3002\u4e3a\u89e3\u51b3\u8fd9\u4e00\u6280\u672f\u95ee\u9898\uff0c\u5728\u6d82\u8986\u5149\u523b\u80f6\u524d\uff0c\u53ef\u5148\u5c06\u6297\u53cd\u5c04\u6d82\u5c42\u6d82\u8986\u5728\u6676\u5706\u8868\u9762\uff0c\u4ee5\u51cf\u5c11\u5e95\u90e8\u5149\u7684\u53cd\u5c04\uff08\u56e0\u6d82\u8986\u5728\u5149\u523b\u80f6\u7684\u5e95\u90e8\uff0c\u6545\u79f0\u4e3aBottom\uff09\u3002\u6b64\u5916\uff0c\u968f\u7740\u4ee5\u6c34\u4e3a\u4ecb\u8d28\u7684\u6d78\u6ca1\u5f0f\u5149\u523b\u8bbe\u5907ArF Immersion<sup style=\"color: #ff0000;\">* <\/sup>\u95ee\u4e16\uff0c\u53ef\u4ee5\u6296\u51fa\u6c34\u5206\u5e76\u4e14\u4e0d\u4f1a\u635f\u4f24\u7684\u9632\u6c34\u6d82\u5c42\uff08\u9876\u90e8\u6297\u53cd\u5c04\u6d82\u5c42\uff0cTop Anti-Reflective Coat\uff09\u4fbf\u5e94\u8fd0\u800c\u751f\u3002<\/p>\n<p>\u5728\u6b64\u6211\u4eec\u8981\u628a\u91cd\u70b9\u653e\u5728\u7406\u89e3\u5982\u4f55\u514b\u670d\u5f15\u8fdb\u65b0\u6280\u672f\u540e\u7684\u65b0\u6311\u6218\u3002\u4ee5EUV\u5149\u523b\u673a<sup style=\"color: #ff0000;\">* <\/sup>\u4e3a\u4f8b\uff0c\u9ad8\u80fd\u91cf\u7684\u6781\u7d2b\u5916\u7ebf\u51fb\u4e2d\u5149\u523b\u80f6\u5e76\u53d1\u751f\u53cd\u5e94\u540e\u4f1a\u6c61\u67d3\u63a9\u6a21\u7248\u3002\u4e3a\u89e3\u51b3\u8fd9\u4e00\u6280\u672f\u96be\u9898\uff0c\u4e00\u65b9\u9762\u5e94\u6df1\u5165\u7814\u7a76\u5149\u523b\u80f6\u6750\u6599\uff0c\u53e6\u4e00\u65b9\u9762\u8981\u901a\u8fc7\u5f15\u8fdb\u63a9\u6a21\u7248\u4fdd\u62a4\u819c\uff08Pellicle\uff09\u89e3\u51b3\u8fd9\u4e00\u95ee\u9898\u3002<\/p>\n<p class=\"footnote\">\u00b9ArF\u6d78\u6ca1\u5f0f\u5149\u523b\u673a\uff08ArF immersion\uff09 \uff1a\u4ee5\u6c34\u53d6\u4ee3\u5149\u523b\u673a\u5185\u5149\u7684\u4ecb\u8d28\uff08\u7a7a\u6c14\uff09\uff0c\u4ece\u800c\u8fdb\u4e00\u6b65\u6539\u5584\u6027\u80fd<br \/>\n\u00b2EUV\u5149\u523b\u673a \uff1a\u91c7\u7528\u6781\u7d2b\u5916\u7ebf\u7ed8\u5236\u8d85\u7cbe\u7ec6\u56fe\u5f62\u7684\u5149\u523b\u673a<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u63a9\u6a21\u7248\uff08Photomask\uff09<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9315\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29171332\/SK-hynix_%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%953%ED%8E%B8_06.png\" alt=\"\" width=\"1000\" height=\"700\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe6\uff1a\u5149\u523b\u673a\u8fd0\u4f5c\u56fe\u793a<\/p>\n<p>\u6d82\u8986\u597d\u5149\u523b\u80f6\u540e\uff0c\u4e0b\u4e00\u6b65\u5c31\u662f\u5728\u5149\u523b\u80f6\u4e0a\u7ed8\u5236\u56fe\u5f62\u3002\u4e3a\u6b64\uff0c\u9700\u8981\u4e00\u79cd\u540d\u4e3a\u63a9\u6a21\u7248\u7684\u900f\u660e\u7248\u3002\u63a9\u6a21\u7248\u5206\u4e3a\u5149\u53ef\u901a\u8fc7\u7684\u900f\u660e\u533a\u548c\u906e\u5149\u7684\u4e0d\u900f\u660e\u533a\u3002\u5149\u6e90\u901a\u8fc7\u63a9\u6a21\u7248\u628a\u56fe\u5f62\u6295\u5c04\u5230\u5149\u523b\u80f6\u4e0a\uff0c\u4ece\u800c\u5c06\u63a9\u6a21\u56fe\u5f62\u8f6c\u5370\u5230\u6676\u4f53\u4e0a\u3002\u8bbe\u8ba1\u63a9\u6a21\u56fe\u5f62\u65f6\u4f1a\u8003\u8651\u5149\u7684\u5e72\u6d89\u6548\u679c\uff0c\u56e0\u6b64\uff0c\u63a9\u6a21\u7248\u7684\u56fe\u5f62\u4e0e\u6211\u4eec\u5b9e\u9645\u60f3\u7ed8\u5236\u7684\u56fe\u5f62\u4f1a\u6709\u6240\u4e0d\u540c\u3002<\/p>\n<p>\u63a9\u6a21\u7248\u7684\u56fe\u5f62\u8bbe\u8ba1\u5176\u5b9e\u5c31\u662f\u534a\u5bfc\u4f53\u8bbe\u8ba1\uff0c\u8fd9\u51b3\u5b9a\u4e86\u534a\u5bfc\u4f53\u7684\u7528\u9014\u3002\u6bd4\u5982\uff0c\u7528\u4e8eDRAM\u3001NAND\u95ea\u5b58\u7b49\u5b58\u50a8\u5668\u5236\u9020\u7684\u63a9\u6a21\u7248\u4f1a\u6709\u5f88\u591a\u8089\u773c\u770b\u4e0d\u5230\u3001\u975e\u5e38\u6709\u89c4\u5f8b\u7684\u91cd\u590d\u7684\u56fe\u5f62\uff1b\u800c\u7528\u4e8eCPU\u3001GPU\u7b49\u903b\u8f91\u534a\u5bfc\u4f53\uff08Logic Semiconductor\uff09\u7684\u63a9\u6a21\u7248\uff0c\u7ed3\u6784\u5219\u76f8\u5f53\u590d\u6742\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u534a\u5bfc\u4f53\u5236\u9020\u9700\u8981\u591a\u4e2a\u63a9\u6a21\u7248\u3002\u4f7f\u7528\u63a9\u6a21\u7248\u66dd\u5149\u540e\uff0c\u5728\u968f\u540e\u7684\u523b\u8680\u3001\u6c89\u79ef\u548c\u6c27\u5316\u5de5\u827a\u4e2d\u518d\u7ecf\u591a\u79cd\u5904\u7406\uff0c\u7136\u540e\u518d\u91cd\u590d\u4e0a\u8ff0\u8fc7\u7a0b\uff0c\u5806\u53e0\u534a\u5bfc\u4f53\u7684\u4e0b\u4e00\u5c42\u3002\u53ef\u89c1\uff0c\u6240\u8c13\u201c\u8bbe\u8ba1\u201d\uff0c\u5176\u5b9e\u5c31\u662f\u4e3a\u8d4b\u4e88\u82af\u7247\u4e00\u5b9a\u529f\u80fd\uff0c\u4e0d\u65ad\u5236\u4f5c\u7528\u4e8e\u7ed8\u5236\u534a\u5bfc\u4f53\u5404\u5c42\u7684\u63a9\u6a21\u7248\u7684\u8fc7\u7a0b\u3002<\/p>\n<p>\u63a9\u6a21\u7248\u662f\u4e8b\u5148\u9884\u5907\u597d\u7684\u3002\u56e0\u6b64\uff0c\u4e0b\u4e00\u6b65\u5c31\u662f\u627e\u51c6\u66dd\u5149\u7684\u8d77\u59cb\u4f4d\u7f6e\uff0c\u5373\u5bf9\u51c6\uff08Alignment\uff09\u3002\u5728\u4e4b\u524d\u7684\u6587\u7ae0\u4e2d\u6211\u4eec\u4e5f\u8bf4\u8fc7\uff0c\u5728\u534a\u5bfc\u4f53\u5236\u7a0b\u5de5\u5e8f\u4e2d\uff0c\u5149\u523b\u5de5\u827a\u53ef\u80fd\u9700\u8981\u53cd\u590d\u6570\u5341\u6b21\u3002\u534a\u5bfc\u4f53\u5185\u7ec6\u5fae\u56fe\u5f62\u7684\u95f4\u9694\u4ec5\u4e3a\u6570\u5341\u7eb3\u7c73\uff0c\u56e0\u6b64\uff0c\u8bef\u5dee\u4e00\u65e6\u7d2f\u79ef\u6570\u5341\u6b21\uff0c\u5c31\u5f88\u53ef\u80fd\u9020\u6210\u4e25\u91cd\u4e0d\u826f\u3002\u56e0\u6b64\uff0c\u9700\u8981\u5728\u66dd\u5149\u4e4b\u524d\uff0c\u5bfb\u627e\u5728\u524d\u7aef\u5de5\u827a\u5df2\u5f62\u6210\u7684\u5bf9\u51c6\u6807\u5fd7\uff08Alignment Mark\uff09\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u66dd\u5149\uff08Exposure\uff09<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u7ec8\u4e8e\u5230\u4e86\u66dd\u5149\u9636\u6bb5\uff0c\u8fd9\u662f\u5b9e\u9645\u6295\u5c04\u5149\u6e90\u7684\u9636\u6bb5\u3002\u628a\u5149\uff08\u6fc0\u5149\uff09\u6295\u5c04\u5230\u6676\u5706\u4e00\u4e2a\u82af\u7247\u5927\u5c0f\u7684\u72ed\u7a84\u533a\u57df\uff0c\u5f85\u66dd\u5149\u4e00\u5b9a\u65f6\u95f4\u540e\uff0c\u5149\u523b\u673a\u5c06\u5411\u65c1\u8fb9\u7a0d\u52a0\u79fb\u52a8\uff0c\u91cd\u590d\u4e0a\u8ff0\u8fc7\u7a0b\u3002<\/p>\n<p>\u5149\u523b\u673a\u5206\u8fa8\u4e24\u7269\u70b9\u7684\u80fd\u529b\u53eb\u505a\u201c\u7269\u955c\u7684\u5206\u8fa8\u80fd\u529b\uff08\u9274\u522b\u7387\uff09\u201d\u3002\u7269\u955c\u5206\u8fa8\u80fd\u529b\u7684\u516c\u5f0f\u4e3a<span style=\"background-color: #d9d9d9;\">d=\u03bb\/(2NA) \uff08\u03bb\uff1a\u5165\u5c04\u5149\u7684\u6ce2\u957f\uff0cNA\uff1a\u8868\u793a\u7269\u955c\u7684\u6570\u503c\u5b54\u5f84\uff09<\/span>\u3002\u7269\u955c\u7684\u5206\u8fa8\u80fd\u529b\u8d8a\u9ad8\uff0c\u4e24\u7269\u70b9\u95f4\u6700\u5c0f\u8ddd\u79bbd\u8d8a\u5c0f\uff0c\u5373\u4e24\u7269\u4f53\u4eff\u4f5b\u91cd\u5408\u4e3a\u4e00\u4e2a\u7269\u4f53\uff0c\u5f88\u96be\u5206\u8fa8\u3002\u56e0\u6b64\uff0c\u63a9\u6a21\u7248\u7ed8\u5236\u518d\u7cbe\u7ec6\u7684\u7248\u56fe\u4e5f\u65e0\u6cd5\u8f6c\u5370\u5230\u5b9e\u9645\u7684\u6676\u5706\u8868\u9762\u4e0a\u3002<\/p>\n<p>\u53ef\u89c1\uff0c\u964d\u4f4e\u5206\u8fa8\u80fd\u529b\u975e\u5e38\u91cd\u8981\u3002\u4e0a\u8ff0\u516c\u5f0f\u7ed9\u6211\u4eec\u63ed\u793a\u4e86\u4e24\u79cd\u65b9\u6cd5\uff1a\u4e00\u662f\u901a\u8fc7\u8c03\u8282\u5165\u5c04\u5149\u7684\u6ce2\u957f\u6765\u514b\u670d\u3002\u589e\u52a0\u6fc0\u5149\u7684\u80fd\u91cf\u53ef\u7f29\u77ed\u5165\u5c04\u5149\u7684\u6ce2\u957f\u3002\u6211\u4eec\u7ecf\u5e38\u5728\u65b0\u95fb\u4e2d\u542c\u5230\u7684\u6781\u7d2b\u5916\u7ebf\uff08EUV\uff0cExtreme Ultraviolet Lithography\uff09\u5149\u523b\u673a\u6b63\u662f\u901a\u8fc7\u5c06\u6df1\u7d2b\u5916\u7ebf\uff08DUV\uff0cDeep Ultraviolet Lithography\uff09\u5149\u523b\u673a\u7684\u6ce2\u957f\u7f29\u77ed\u81f31\/14\uff08=\u63d0\u9ad8\u5149\u80fd\uff09\uff0c\u5b9e\u73b0\u7cbe\u7ec6\u56fe\u5f62\u7ed8\u5236\u7684\uff1b\u53e6\u4e00\u65b9\u9762\uff0c\u8fd8\u53ef\u901a\u8fc7\u63d0\u9ad8\u7269\u955c\u7684\u6570\u503c\u5b54\u5f84\uff08NA\uff09\u6765\u5bfb\u627e\u7a81\u7834\u53e3\u3002\u63d0\u9ad8\u5149\u6e90\u955c\u5934\u6570\u503c\u5b54\u5f84\uff0c\u6216\u4f7f\u7528\u9ad8\u6298\u5c04\u7387\u7684\u4ecb\u8d28\u589e\u52a0\u7269\u955c\u7684\u6570\u503c\u5b54\u5f84\u3002\u9ad8\u6570\u503c\u5b54\u5f84\u6781\u7d2b\u5916\u7ebf\uff08High NA EUV\uff09\u5149\u523b\u673a\u5c31\u662f\u91c7\u7528\u4e86\u63d0\u9ad8\u5149\u6e90\u955c\u5934\u6570\u503c\u5b54\u5f84\u7684\u65b9\u6cd5\uff0c\u800c\u5e38\u7528\u7684\u6df1\u7d2b\u5916\u7ebf\u5149\u523b\u673a\uff08ArF immersion\uff09\u5219\u91c7\u7528\u4e86\u9ad8\u6298\u5c04\u7387\u4ecb\u8d28\u7684\u65b9\u6cd5\u3002<\/p>\n<p>\u7269\u955c\u7684\u6570\u503c\u5b54\u5f84\u5176\u5b9e\u5f88\u96be\u76f4\u89c2\u53bb\u7406\u89e3\uff0c&lt;\u56fe7&gt;\u63ed\u793a\u4e86\u4e00\u79cd\u76f8\u5bf9\u8f83\u901a\u4fd7\u7684\u7406\u89e3\u65b9\u6cd5\u3002\u76f8\u4fe1\u8bfb\u8005\u53ef\u4ee5\u4ece\u4e2d\u7406\u89e3\u5149\u6e90\u955c\u5934\u53d8\u5927\uff0c\u5206\u8fa8\u7387\u5c31\u4f1a\u63d0\u9ad8\uff08\u53d8\u5c0f\uff09\u7684\u539f\u7406\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-9316\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29171335\/SK-hynix_%EB%B0%98%EB%8F%84%EC%B2%B4-%EC%A0%84%EA%B3%B5%EC%A0%953%ED%8E%B8_07.png\" alt=\"\" width=\"1000\" height=\"700\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe7\uff1a\u7269\u955c\u7684\u6570\u503c\u5b54\u5f84\u4e0e\u7269\u955c\u7684\u5206\u8fa8\u80fd\u529b<\/p>\n<p>\u5bfb\u627e\u5149\u523b\u673a\u7684\u5149\u6e90\u53ef\u975e\u540c\u5c0f\u53ef\u3002\u76f4\u523021\u4e16\u7eaa\u521d\uff0c\u79d1\u7814\u4eba\u5458\u4eec\u8fd8\u5728\u4e0d\u65ad\u53d1\u73b0\u66f4\u597d\u7684\u5149\u6e90\u3002\u4f46\u4ece\u627e\u5230193nm\u7684\u6c1f\u5316\u6c29\uff08ArF\uff09\u6fc0\u5149\uff0c\u5230\u53d1\u73b013.5nm\u7684\u6781\u7d2b\u5916\u7ebf\u4f5c\u4e3a\u5149\u6e90\uff0c\u79d1\u5b66\u5bb6\u4eec\u8db3\u8db3\u82b1\u4e8610\u591a\u5e74\u7684\u65f6\u95f4\u3002\u8fd9\u4e3b\u8981\u7f18\u4e8e\u5149\u7684\u6027\u8d28\uff0c\u5149\u7684\u6ce2\u957f\u8d8a\u77ed\uff0c\u8d8a\u4e0d\u5bb9\u6613\u53d1\u751f\u6298\u5c04\uff0c\u4e14\u5bb9\u6613\u88ab\u6750\u6599\u5438\u6536\u3002<\/p>\n<p>\u6b64\u5916\uff0c\u66dd\u5149\u5bf9\u534a\u5bfc\u4f53\u7684\u751f\u4ea7\u91cf\u4e5f\u975e\u5e38\u91cd\u8981\u3002\u4ece\u4e0a\u8ff0\u8bb2\u89e3\u4e2d\u53ef\u4ee5\u770b\u51fa\uff0c\u66dd\u5149\u4e0e\u6c27\u5316\u5de5\u827a\u4e0d\u540c\uff0c\u65e0\u6cd5\u540c\u65f6\u5904\u7406\u6570\u5341\u4e2a\u6676\u5706\uff0c\u5373\u65e0\u6cd5\u6253\u9020\u53ef\u4ee5\u4e00\u6b21\u5904\u7406\u76f4\u5f84\u4e3a300mm\u7684\u6676\u5706\u7684\u5747\u5300\u5149\u6e90\uff0c\u5149\u523b\u673a\u6bcf\u6b21\u53ea\u80fd\u66dd\u51491~4\u4e2a\u82af\u7247\u3002\u6700\u65b0\u7248\u5149\u523b\u673a\u6bcf\u53f0\u7ea61000\u4ebf\u97e9\u5143\u4ee5\u4e0a\uff0c\u76f8\u5f53\u6602\u8d35\uff0c\u4f46\u6bcf\u5c0f\u65f6\u4e5f\u53ea\u80fd\u5904\u7406100\u5f20\u5de6\u53f3\u7684\u6676\u5706\u3002<span style=\"text-decoration: underline;\"><a href=\"https:\/\/www.semiconductors.org\/wp-content\/uploads\/2021\/05\/BCG-x-SIA-Strengthening-the-Global-Semiconductor-Value-Chain-April-2021_1.pdf\" target=\"_blank\" rel=\"noopener noreferrer\">\u4ec5\u6295\u5165\u5230\u66dd\u5149\u5de5\u827a\u7684\u8d44\u91d1\u5c31\u662f\u6c27\u5316\u5de5\u827a\u768412\u500d<\/a><\/span>\u3002\u5bf9\u4e8e\u6781\u7d2b\u5916\u7ebf\u6765\u8bf4\uff0c\u4e0e\u5176\u8bf4\u201c\u662f\u5426\u80fd\u4f5c\u4e3a\u5149\u6e90\u201d\u91cd\u8981\uff0c\u4e0d\u5982\u8bf4\u201c\u662f\u5426\u80fd\u63d0\u9ad8\u5904\u7406\u91cf\uff0c\u5b9e\u73b0\u5546\u4e1a\u4ef7\u503c\u201d\u66f4\u52a0\u91cd\u8981\u3002\u4e3a\u89e3\u51b3\u8fd9\u4e00\u95ee\u9898\uff0c\u4e0d\u4ec5\u8981\u4ece\u5149\u6e90\u5165\u624b\uff0c\u8fd8\u8981\u4ece\u6750\u6599\u65b9\u9762\u5165\u624b\uff0c\u5bfb\u627e\u5bf9\u5c11\u91cf\u5149\u4e5f\u80fd\u654f\u611f\u53cd\u5e94\u7684\u5149\u523b\u80f6\u6750\u6599\u3002<\/p>\n<p>\u66dd\u5149\u7ed3\u675f\u540e\uff0c\u5c31\u8981\u68c0\u6d4b\u6676\u5706\u7684\u5957\u523b\uff08Overlay\uff09\u8bef\u5dee\u3002\u5957\u523b\uff0c\u662f\u4e3a\u6d4b\u91cf\u5149\u523b\u673a\u7684\u5bf9\u51c6\u7cbe\u5ea6\u800c\u5728\u6676\u5706\u4e0a\u505a\u7684\u5c0f\u6807\u8bc6\u3002\u6bcf\u6b21\u66dd\u5149\u65f6\u56f4\u7ed5\u540c\u4e00\u4e2a\u4e2d\u5fc3\uff0c\u4ee5\u4e0d\u540c\u5927\u5c0f\u7684\u6807\u8bb0\u5957\u523b\u6807\u8bc6\uff0c\u5c31\u53ef\u6d4b\u91cf\u66dd\u5149\u7684\u5bf9\u51c6\u7a0b\u5ea6\u6216\u6676\u5706\u662f\u5426\u6709\u6240\u504f\u79bb\u7b49\u3002\u4f46\u5957\u523b\u5de5\u827a\u4e0e\u5bf9\u51c6\uff08Alignment\uff09\u5de5\u827a\u4e0d\u540c\uff0c\u4e0d\u4f1a\u68c0\u6d4b\u6bcf\u4e00\u4e2a\u6676\u5706\u7684\u5957\u523b\u7cbe\u5ea6\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u663e\u5f71\uff08Develop\uff09<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u5149\u523b\u80f6\u66dd\u5149\u540e\uff0c\u66dd\u5149\u533a\u5149\u523b\u80f6\u7684\u5316\u5b66\u6027\u8d28\u4f1a\u53d1\u751f\u6539\u53d8\u3002\u8fd9\u4e9b\u53d8\u8d28\u7684\u5149\u523b\u80f6\u8981\u7528\u663e\u5f71\u6db2\u6eb6\u89e3\u540e\u53bb\u9664\uff0c\u8fd9\u4e00\u5de5\u827a\u88ab\u79f0\u4f5c\u663e\u5f71\uff08Develop\uff09\u3002<\/p>\n<p>\u5f53\u7136\uff0c\u5728\u8fdb\u5165\u663e\u5f71\u5de5\u827a\u524d\uff0c\u8981\u628a\u6676\u5706\u653e\u5165\u70d8\u7bb1\u70d8\u70e4\uff0c\u8fd9\u6837\u53ef\u4ee5\u8fdb\u4e00\u6b65\u4fc3\u8fdb\u66dd\u5149\u533a\u5149\u523b\u80f6\u7684\u6027\u8d28\u53d8\u5316\uff0c\u8fd9\u4e00\u8fc7\u7a0b\u88ab\u79f0\u4f5c\u66dd\u5149\u540e\u70d8\u70e4\uff08PEB\uff0cPost Exposure Bake\uff09\u3002<\/p>\n<p>\u7ecfPEB\u540e\uff0c\u5728\u6676\u7247\u6d82\u8986\u663e\u5f71\u6db2\uff0c\u53bb\u9664\u53d8\u8d28\u7684\u5149\u523b\u80f6\u90e8\u5206\uff0c\u5fc5\u8981\u65f6\u8fd8\u53ef\u8fdb\u884c\u6e05\u6d17\uff08Rinse\uff09\u3002\u6e05\u6d17\u65f6\uff0c\u8981\u6839\u636e\u5149\u523b\u80f6\u7684\u6750\u6599\u9009\u62e9\u5408\u9002\u7684\u6e05\u6d17\u6eb6\u6db2\u3002\u800c\u6e05\u6d17\u8bbe\u5907\u4e5f\u662f\u79cd\u7c7b\u7e41\u591a\uff0c\u4e14\u5f80\u5f80\u8981\u5728\u5904\u7406\u901f\u5ea6\u548c\u826f\u7387\u4e4b\u95f4\u505a\u6743\u8861\u3002<\/p>\n<p>\u7ecf\u4e0a\u8ff0\u4e00\u7cfb\u5217\u8fc7\u7a0b\uff0c\u534a\u5bfc\u4f53\u7684\u201c\u997c\u5e72\u6a21\u5177\u201d\u7ec8\u4e8e\u5236\u6210\u4e86\u3002\u6700\u540e\uff0c\u5728\u8fd9\u201c\u6a21\u5177\u201d\u7684\u7f1d\u9699\u6d82\u8986\u6240\u9700\u7684\u6750\u6599\uff0c\u6216\u524a\u51cf\u4e0d\u9700\u8981\u7684\u90e8\u5206\u7b49\uff0c\u7ecf\u4e00\u756a\u5b8c\u5584\u5de5\u4f5c\u540e\u5728\u8868\u9762\u96d5\u523b\u6676\u4f53\u7ba1\u548c\u91d1\u5c5e\u5e03\u7ebf\u5373\u53ef\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u5149\u523b\u673a\u7684\u53d1\u5c55\u4e0e\u7eb5\u5411\u601d\u8003<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 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style=\"text-decoration: underline;\"><a href=\"https:\/\/www.prnewswire.com\/news-releases\/lam-research-teams-up-with-sk-hynix-to-enhance-dram-production-cost-efficiency-with-breakthrough-dry-resist-euv-technology-301567359.html\" target=\"_blank\" rel=\"noopener noreferrer\">\u6700\u8fd1\uff0cSK\u6d77\u529b\u58eb\u4e0e\u6750\u6599\u516c\u53f8\u8054\u624b\uff0c\u5171\u540c\u7814\u53d1\u4e86\u5e72\u6cd5\u5149\u523b\u5de5\u827a\u6d41\u7a0b<\/a><\/span>\u3002<\/p>\n<p>\u6211\u4eec\u5728\u524d\u4e00\u7bc7\uff08\u6c27\u5316\u5de5\u827a\uff09\u4e2d\u4e5f\u66fe\u8bf4\u5230\uff0c\u5e72\u6cd5\u5de5\u827a\uff0c\u987e\u540d\u601d\u4e49\u5c31\u662f\u6ca1\u6709\u6c34\u7684\u4ecb\u5165\u3002\u4e5f\u5c31\u662f\u8bf4\uff0c\u8fd9\u662f\u4e00\u79cd\u4e0e\u4e4b\u524d\u5b8c\u5168\u4e0d\u540c\u7684\u5d2d\u65b0\u5de5\u827a\u6280\u672f\u3002\u5b83\u50cf\u6c89\u79ef\u5de5\u827a\u90a3\u6837\u5728\u5149\u523b\u80f6\u8868\u9762\u4e0a\u5f62\u6210\u8584\u819c\uff0c\u5728\u663e\u5f71\u8fc7\u7a0b\u4e2d\u4e5f\u4e0d\u6e05\u6d17\u3002\u9700\u7814\u53d1\u8fd9\u4e9b\u6280\u672f\u7684\u7406\u7531\u4e0d\u80dc\u679a\u4e3e\uff0c\u4f46\u6700\u91cd\u8981\u7684\uff0c\u5c31\u662f\u5fae\u7ec6\u5316\u6c34\u5e73\u5df2\u7ecf\u8fbe\u5230\u4e86\u6781\u81f4\uff0c\u5149\u523b\u673a\u7ed8\u5236\u51fa\u7684\u7cbe\u7ec6\u56fe\u5f62\uff0c\u5728\u6d82\u8986\u548c\u6e05\u6d17\u5149\u523b\u80f6\u7684\u8fc7\u7a0b\u4e2d\u4f1a\u88ab\u7834\u574f\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u7ed3\u8bed \uff1a\u6210\u529f\u7ed8\u5236\u4e0d\u7b49\u4e8e\u7ed3\u675f<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u5728\u672c\u7bc7\u6587\u7ae0\u4e2d\uff0c\u6211\u4eec\u5feb\u901f\u6d4f\u89c8\u4e86\u5149\u523b\u5de5\u827a\uff0c\u901a\u8fc7\u8be5\u5de5\u827a\uff0c\u56fe\u5f62\u7684\u7ed8\u5236\u5df2\u7ecf\u5b8c\u6210\u3002\u4e0b\u4e00\u6b65\u5c31\u9700\u8981\u5728\u7ed8\u5236\u7684\u56fe\u5f62\u4e0a\u6dfb\u52a0\u70b9\u4ec0\u4e48\u6216\u524a\u51cf\u4e0d\u9700\u8981\u7684\u90e8\u5206\u3002\u867d\u8bf4\u5149\u523b\u5de5\u827a\u5f88\u91cd\u8981\uff0c\u4f46\u4e5f\u4e0d\u80fd\u5ffd\u89c6\u5176\u4ed6\u5de5\u827a\u3002\u56e0\u4e3a\u5236\u4f5c\u5fae\u7ec6\u6a21\u5177\uff08\u5149\u523b\u5de5\u827a\uff09\u548c\u5229\u7528\u8fd9\u4e2a\u6a21\u5177\u5b8c\u6210\u6240\u9700\u7684\u64cd\u4f5c\u53ef\u662f\u5b8c\u5168\u4e0d\u540c\u7684\u95ee\u9898\u3002<\/p>\n<p class=\"footnote\">\u203b\u202f\u672c\u6587\u4e3a\u5916\u90e8\u4e13\u5bb6\u5bf9\u534a\u5bfc\u4f53\/ICT\u7684\u89c1\u89e3\uff0c\u5e76\u4e0d\u4ee3\u8868SK\u6d77\u529b\u58eb\u7684\u7acb\u573a\u3002<\/p>\n<p><a href=\"https:\/\/news.skhynix.com.cn\/tag\/%e5%89%8d%e7%ab%af%e5%b7%a5%e8%89%ba\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span style=\"text-decoration: underline;\"><strong><span class=\"ui-provider ee bog boh boi boj bok bol bom bon boo bop boq bor bos bot bou bov bow box boy boz bpa bpb bpc bpd bpe bpf bpg bph bpi bpj bpk bpl bpm bpn\" dir=\"ltr\">\u534a\u5bfc\u4f53\u524d\u7aef\u5de5\u827a\u7cfb\u5217\u6587\u7ae0<\/span><\/strong><\/span><\/a><\/p>\n<p><a href=\"https:\/\/news.skhynix.com.cn\/tag\/%e5%90%8e%e7%ab%af%e5%b7%a5%e8%89%ba\/\" target=\"_blank\" rel=\"noopener noreferrer\"><span style=\"text-decoration: underline;\"><strong><span class=\"ui-provider ee bog boh boi boj bok bol bom bon boo bop boq bor bos bot bou bov bow box boy boz bpa bpb bpc bpd bpe bpf bpg bph bpi bpj bpk bpl bpm bpn\" dir=\"ltr\">\u534a\u5bfc\u4f53\u540e\u7aef\u5de5\u827a\u7cfb\u5217\u6587\u7ae0<\/span><\/strong><\/span><\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u7ed8\u5236\u7cbe\u7ec6\u7535\u8def\u7684\u7b2c\u4e00\u6b65 \u91d1\u5c5e-\u6c27\u5316\u7269\u534a\u5bfc\u4f53\u573a\u6548\u5e94\u6676\u4f53\u7ba1\uff08MOSFET\uff09\u7684\u9769\u547d\uff0c\u8ba9\u6211\u4eec\u53ef\u4ee5\u5728\u76f8\u540c\u9762\u79ef\u7684\u6676\u5706\u4e0a\u540c\u65f6\u5236 [\u2026]<\/p>\n","protected":false},"author":2,"featured_media":1136,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_migrated_source_id":9307,"footnotes":"","_members_access_role":[],"_members_access_error":""},"categories":[5],"tags":[614,645,646],"class_list":["post-1144","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-tech-and-ai","tag-614","tag-645","tag-646"],"acf":[],"_links":{"self":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1144","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/comments?post=1144"}],"version-history":[{"count":2,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1144\/revisions"}],"predecessor-version":[{"id":4202,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1144\/revisions\/4202"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media\/1136"}],"wp:attachment":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media?parent=1144"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/categories?post=1144"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/tags?post=1144"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}