{"id":1233,"date":"2022-11-08T06:00:53","date_gmt":"2022-11-08T06:00:53","guid":{"rendered":"http:\/\/localhost:8080\/sk-hynix-leading-the-way-in-the-hkmg-revolution\/"},"modified":"2026-06-16T05:01:25","modified_gmt":"2026-06-16T05:01:25","slug":"sk-hynix-leading-the-way-in-the-hkmg-revolution","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/sk-hynix-leading-the-way-in-the-hkmg-revolution\/","title":{"rendered":"SK\u6d77\u529b\u58eb\u5f15\u9886High-k\/Metal Gate\u5de5\u827a\u53d8\u9769"},"content":{"rendered":"

\u7531\u4e8e\u4f20\u7edf\u5fae\u7f29(scaling)\u6280\u672f\u7cfb\u7edf\u7684\u9650\u5236\uff0cDRAM\u7684\u6027\u80fd\u88ab\u8981\u6c42\u4e0d\u65ad\u63d0\u9ad8\uff0c\u800cHKMG(High-k\/Metal Gate)\u5219\u6210\u4e3a\u7a81\u7834\u8fd9\u4e00\u56f0\u5c40\u7684\u89e3\u51b3\u65b9\u6848\u3002SK\u6d77\u529b\u58eb\u901a\u8fc7\u91c7\u7528\u8be5\u65b0\u6280\u672f\uff0c\u5e76\u5c06\u5176\u5e94\u7528\u4e8e\u5168\u65b0\u76841anm LPDDR5X DRAM, \u5373\u4fbf\u5728\u4f4e\u529f\u7387\u8bbe\u7f6e\u4e0b\u4e5f\u5b9e\u73b0\u4e86\u6676\u4f53\u7ba1\u6027\u80fd\u7684\u663e\u8457\u63d0\u9ad8\u3002\u672c\u6587\u9488\u5bf9HKMG\u53ca\u5176\u4f7f\u7528\u76ca\u5904\u8fdb\u884c\u63a2\u8ba8\u3002<\/p>\n

\u00a0<\/p>\n

\n
\n
<\/div>\n

\u539a\u5ea6\u6311\u6218: \u9700\u8981\u5168\u65b0\u7684\u89e3\u51b3\u65b9\u6848<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

\u7ec4\u6210DRAM\u7684\u6676\u4f53\u7ba1(Transistor)\u5305\u62ec\u5b58\u50a8\u6570\u636e\u7684\u5355\u5143\u6676\u4f53\u7ba1(Cell Transistor)\u3001\u6062\u590d\u6570\u636e\u7684\u6838\u5fc3\u6676\u4f53\u7ba1(Core Transistor)\uff0c\u4ee5\u53ca\u6d89\u53ca\u63a7\u5236\u903b\u8f91\u548c\u6570\u636e\u8f93\u5165\u548c\u8f93\u51fa\u7684\u5916\u56f4\u6676\u4f53\u7ba1(Peripheral Transistor)\u3002\u968f\u7740\u6280\u672f\u7684\u8fdb\u6b65\uff0c\u5355\u5143\u7535\u5bb9\u5668\u548c\u5355\u5143\u6676\u4f53\u7ba1\u5728\u63d0\u9ad8DRAM\u5b58\u50a8\u5bb9\u91cf\u65b9\u9762\u53d6\u5f97\u4e86\u4e00\u4e9b\u6280\u672f\u7a81\u7834\u3002\u53e6\u4e00\u65b9\u9762\uff0c\u5bf9\u4e8e\u5916\u56f4\u6676\u4f53\u7ba1\uff0c\u91cd\u70b9\u662f\u5b9e\u73b0\u5de5\u827a\u5c3a\u5bf8\u5fae\u7f29\u4ee5\u63d0\u9ad8\u6027\u80fd\u3002<\/p>\n

\u6805\u6781\u7531\u7edd\u7f18\u819c(\u6805\u6c27\u5316\u5c42, gate oxide)\u548c\u7535\u6781(\u6805\u7535\u6781, gate electrode)\u7ec4\u6210\uff0c\u5728\u6676\u4f53\u7ba1\u5f00\u5173\u529f\u80fd\u4e2d\u53d1\u6325\u4e3b\u8981\u4f5c\u7528\u3002\u6805\u6c27\u5316\u5c42\u7531SiON\u6c27\u5316\u7269\u7edd\u7f18\u4f53\u548c\u805a\u7845\u57fa\u7535\u6781\u7ec4\u6210\u3002\u968f\u7740\u6676\u4f53\u7ba1\u5fae\u7f29\u7684\u63d0\u5347\uff0c\u6e90\u6781* <\/sup>\u548c\u6f0f\u6781* <\/sup>\u4e4b\u95f4\u7684\u8ddd\u79bb\u8d8a\u6765\u8d8a\u8fd1\uff0c\u7535\u6d41\u79fb\u52a8\u901f\u5ea6\u52a0\u5feb\uff0c\u4f46\u65bd\u52a0\u5728\u6805\u6781\u4e0a\u7684\u7535\u538b\u4e5f\u4f1a\u964d\u4f4e\uff0c\u4ee5\u964d\u4f4e\u529f\u8017\u3002<\/p>\n

\u4f46\u8fd8\u5b58\u5728\u4e00\u4e2a\u95ee\u9898\uff1a\u4e3a\u4e86\u5728\u8f83\u4f4e\u7535\u538b\u4e0b\u63d0\u9ad8\u6027\u80fd\uff0c\u5fc5\u987b\u51cf\u5c0f\u6805\u6c27\u5316\u6750\u6599(SiON)\u7684\u539a\u5ea6(Tox)\u3002\u4f46\u968f\u7740\u539a\u5ea6\u4e0d\u65ad\u51cf\u5c0f\uff0c\u6805\u6c27\u5316\u5c42\u7684\u53ef\u9760\u6027\u4e5f\u4f1a\u964d\u4f4e\uff0c\u4ece\u800c\u5bfc\u81f4\u529f\u7387\u635f\u8017\uff0c\u8fd9\u9650\u5236\u4e86\u539a\u5ea6\u7684\u8fdb\u4e00\u6b65\u51cf\u5c0f\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u56fe1. Transistor Scaling(\u6676\u4f53\u7ba1\u5fae\u7f29)<\/p>\n

\u00a0<\/p>\n

\n
\n
<\/div>\n

HKMG: \u5fae\u7f29\u4e0e\u6027\u80fd\u7684\u7a81\u7834<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

\u57282005\u5e74\u524d\u540e\uff0c\u903b\u8f91\u534a\u5bfc\u4f53* <\/sup>\u4e2d\u57fa\u4e8e\u591a\u6676\u7845\u6805\u6781(Poly-Si Gate)\/SiON\u6c27\u5316\u7269(poly\/SiON)\u7684\u4f20\u7edf\u5fae\u7f29\u5728\u6027\u80fd\u6539\u8fdb\u65b9\u9762\u5f00\u59cb\u8868\u73b0\u51fa\u5c40\u9650\u6027\uff0c\u56e0\u4e3a\u5b83\u65e0\u6cd5\u51cf\u5c0fSiON\u6805\u6c27\u5316\u5c42\u7684\u539a\u5ea6\u3002\u4e3a\u4e86\u514b\u670d\u8fd9\u4e9b\u5c40\u9650\u6027\uff0c\u6839\u636e\u903b\u8f91\u6676\u4f53\u7ba1\u884c\u4e1a\u53d1\u5c55\u8d8b\u52bf\uff0c\u8bb8\u591a\u5177\u6709\u98a0\u8986\u6027\u7684\u521b\u65b0\u6280\u672f\u88ab\u5f00\u53d1\u51fa\u6765\u3002<\/p>\n

\u540c\u6837\u660e\u663e\u7684\u662f\uff0c\u5916\u56f4\/\u6838\u5fc3\u6676\u4f53\u7ba1\u7279\u6027\u6b63\u6210\u4e3aDRAM\u7684\u74f6\u9888\uff0c\u5728\u9700\u8981\u5feb\u901f\u63d0\u9ad8\u6027\u80fd\u7684\u9ad8\u7aef\u4ea7\u54c1\u4e2d\u5c24\u4e3a\u5982\u6b64\u3002\u56e0\u6b64\uff0c\u9700\u8981\u4e00\u79cd\u5168\u65b0\u7684\u89e3\u51b3\u65b9\u6848\u6765\u514b\u670d\u5fae\u7f29\u57fa\u4e8e\u591a\u6676\u7845\u6805\u6781\/SiON\u6c27\u5316\u7269\u7684\u6676\u4f53\u7ba1\u65f6\u5b58\u5728\u57fa\u672c\u9650\u5236\uff0c\u5e76\u4e14\u9700\u8981\u5728DRAM\u4e2d\u91c7\u7528\u9ad8k\/\u91d1\u5c5e\u6805\u6781(HKMG)\u6280\u672f\uff0c\u8fd9\u4fc3\u4f7f\u903b\u8f91\u6676\u4f53\u7ba1\u6280\u672f\u5b9e\u73b0\u4e86\u6700\u91cd\u5927\u7684\u521b\u65b0\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u56fe2. Logic Scaling(\u903b\u8f91\u5fae\u7f29)\u7684\u673a\u9047\u4e0e\u6311\u6218<\/p>\n

\u501f\u52a9HKMG\uff0c\u4e00\u5c42\u8584\u8584\u7684\u9ad8k\u8584\u819c\u53ef\u53d6\u4ee3\u6676\u4f53\u7ba1\u6805\u6781\u4e2d\u73b0\u6709\u7684SiON\u6805\u6c27\u5316\u5c42\uff0c\u4ee5\u9632\u6b62\u6cc4\u6f0f\u7535\u6d41\u548c\u53ef\u9760\u6027\u964d\u4f4e\u3002\u6b64\u5916\uff0c\u901a\u8fc7\u51cf\u5c0f\u539a\u5ea6\uff0c\u53ef\u4ee5\u5b9e\u73b0\u6301\u7eed\u5fae\u7f29\uff0c\u4ece\u800c\u663e\u8457\u51cf\u5c11\u6cc4\u6f0f\uff0c\u5e76\u6539\u5584\u57fa\u4e8e\u591a\u6676\u7845\/SiON\u7684\u6676\u4f53\u7ba1\u7684\u901f\u5ea6\u7279\u6027\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u56fe3. \u8bbe\u5907\u67b6\u6784\u7684\u5fae\u7f29\u8fdb\u7a0b<\/p>\n

\u5728\u5b66\u672f\u754c\u548c\u5de5\u4e1a\u754c\uff0c\u7814\u7a76\u4eba\u5458\u7814\u7a76\u4e86\u591a\u79cd\u9ad8k\u8584\u819c\u6750\u6599\u3002\u901a\u5e38\u60c5\u51b5\u4e0b\uff0c\u57fa\u4e8eHf\u7684\u6805\u6c27\u5316\u5c42\u7528\u4e8e\u9ad8\u6e29\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\uff0c\u56e0\u4e3a\u5b83\u4eec\u53ef\u4ee5\u786e\u4fdd\u81ea\u8eab\u548c\u7845\u7684\u70ed\u7a33\u5b9a\u6027\u3002\u4e3a\u4e86\u9632\u6b62\u73b0\u6709\u591a\u6676\u7845\u7535\u6781\u6750\u6599\u4e0e\u9ad8k\u6805\u6c27\u5316\u5c42\u4e4b\u95f4\u7684\u76f8\u4e92\u4f5c\u7528\uff0c\u5fc5\u987b\u5f15\u5165\u91d1\u5c5e\u7535\u6781\u6765\u4ee3\u66ff\u591a\u6676\u7845\u3002\u8fd9\u4f7f\u5f97\u540d\u4e3a\u9ad8k\/\u91d1\u5c5e\u6805\u6781\u7684\u96c6\u6210\u89e3\u51b3\u65b9\u6848\u5e94\u8fd0\u800c\u751f\uff0c\u8be5\u89e3\u51b3\u65b9\u6848\u5c06\u9ad8\u4ecb\u7535\u5e38\u6570\u6805\u6c27\u5316\u5c42\u4e0e\u91d1\u5c5e\u7535\u6781\u76f8\u7ed3\u5408\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u56fe4. \u91c7\u7528HKMG\u7684\u6548\u679c<\/p>\n

\u4e3a\u4e86\u5c06SiON\/Poly\u6805\u6781\u8f6c\u6362\u4e3aHKMG\u6805\u6781\uff0c\u5bf9\u76f8\u5173\u5de5\u827a\u7684\u51e0\u4e2a\u90e8\u5206\u8fdb\u884c\u4e86\u66f4\u6539\uff0c\u5305\u62ec\u5728DRAM\u5de5\u827a\u6d41\u7a0b\u4e2d\u5f62\u6210\u5916\u56f4\u7535\u8def\uff08\u5916\u56f4\u6676\u4f53\u7ba1\uff09\u7684\u6805\u6781\u6750\u6599(SiON\/Poly\u6805\u6781\u62d4\u51fa\u2192HKMG\u7535\u6781\u63d2\u5165)\u3002\u7136\u800c\uff0c\u5fc5\u987b\u5bf9HKMG\u6750\u6599\u3001\u5de5\u827a\u548c\u96c6\u6210\u6d41\u7a0b\u8fdb\u884c\u4f18\u5316\uff0c\u4ee5\u9002\u5408\u65b0\u6750\u6599\u548c\u65b0\u5de5\u827a\u7684\u6784\u5efa\u5757\u3002\u56e0\u6b64\uff0c\u9700\u8981\u5229\u7528\u590d\u6742\u7684\u5f00\u53d1\u5de5\u827a\u6765\u5e94\u5bf9\u4ee5\u4e0b\u6311\u6218\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u56fe5. HKMG\u8ba9DRAM\u5f00\u53d1\u66f4\u52a0\u6709\u6548\u4e14\u7ecf\u6d4e<\/p>\n

1. \u517c\u5bb9\u6027: <\/strong>\u4e0eSiON\/Poly\u6805\u6781\u76f8\u6bd4\uff0cHKMG\u7684\u70ed\u7a33\u5b9a\u6027\u76f8\u5bf9\u8f83\u5f31\u3002\u5177\u4f53\u6765\u8bf4\uff0cDRAM\u9700\u8981\u5728\u9ad8\u6e29\u4e0b\u8fdb\u884c\u989d\u5916\u5904\u7406\uff0c\u4ee5\u5b9e\u73b0\u5355\u5143\u9635\u5217\u7ed3\u6784\uff0c\u4e0e\u540e\u7eed\u5de5\u827a\u6d41\u7a0b\u4e2d\u5bf9\u901a\u7528\u903b\u8f91\u534a\u5bfc\u4f53\u7684\u5904\u7406\u65b9\u5f0f\u622a\u7136\u4e0d\u540c\u3002\u7531\u4e8e\u8fd9\u4e2a\u539f\u56e0\uff0cHKMG\u672c\u8eab\u7684\u53ef\u9760\u6027\u4e0b\u964d\uff0c\u5bfc\u81f4\u5728\u4f20\u7edf\u903b\u8f91\u534a\u5bfc\u4f53\u4e2d\u672a\u51fa\u73b0\u76f8\u4e92\u4f5c\u7528\u3002\u56e0\u6b64\uff0c\u5fc5\u987b\u5bf9HKMG\u5de5\u827a\u672c\u8eab\u548c\u73b0\u6709DRAM\u96c6\u6210\u5de5\u827a\u8fdb\u884c\u4f18\u5316\uff0c\u4ee5\u4e86\u89e3\u65b0\u4ea4\u4e92\u5e26\u6765\u7684\u65b0\u95ee\u9898\u5e76\u627e\u5230\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n

2. \u65b0\u6750\u6599\u63a7\u5236: <\/strong>\u9700\u8981\u5f15\u5165\u5de5\u827a\u63a7\u5236\u63aa\u65bd\uff0c\u4f8b\u5982\u9488\u5bf9\u65b0\u7269\u8d28\u7684\u6d4b\u91cf\u89e3\u51b3\u65b9\u6848\uff0c\u4ee5\u9632\u6b62\u73b0\u6709\u8bbe\u5907\u548c\u4ea7\u54c1\u53d7\u5230\u65b0\u7269\u8d28\u548c\u65b0\u5de5\u827a\u7684\u5f71\u54cd\u3002<\/p>\n

3. \u8bbe\u8ba1\u4e0e\u6d4b\u8bd5\u4f18\u5316: <\/strong>\u968f\u7740\u6805\u6781\u6750\u6599\u7684\u53d8\u5316\uff0c\u6676\u4f53\u7ba1\u7279\u6027\u548c\u53ef\u9760\u6027\u8868\u73b0\u4e0e\u4f20\u7edf\u7684poly\/SiON\u6805\u6781\u622a\u7136\u4e0d\u540c\uff0c\u4e3a\u4e86\u6700\u5927\u9650\u5ea6\u5730\u53d1\u6325HKMG\u7684\u4f18\u52bf\uff0c\u589e\u5f3a\u4e0d\u540c\u4e8epoly\/SiON\u6805\u6781\u7684\u53ef\u9760\u6027\u7279\u5f81\uff0c\u6709\u5fc5\u8981\u5e94\u7528\u65b0\u8bbe\u8ba1\u548c\u8bbe\u8ba1\u65b9\u6848\uff0c\u5e76\u4f18\u5316\u6b64\u7c7b\u6d4b\u8bd5\u3002<\/p>\n

4. \u7ecf\u6d4e\u9ad8\u6548\u7684\u5de5\u827a\u89e3\u51b3\u65b9\u6848: <\/strong>\u6700\u540e\uff0c\u5fc5\u987b\u63d0\u4f9b\u7ecf\u6d4e\u9ad8\u6548\u7684\u89e3\u51b3\u65b9\u6848\uff0c\u901a\u8fc7\u5de5\u827a\u96c6\u6210\u4f18\u5316\uff0c\u6700\u5927\u9650\u5ea6\u5730\u51cf\u5c11\u56e0\u5f15\u5165\u65b0\u6750\u6599\u548c\u65b0\u5de5\u827a\u800c\u589e\u52a0\u7684\u6210\u672c\u3002\u901a\u8fc7\u8fd9\u79cd\u65b9\u6cd5\uff0c\u53ef\u4ee5\u63a7\u5236\u56e0\u5f15\u5165\u65b0\u5de5\u827a\u3001\u65b0\u8bbe\u5907\u548c\u65b0\u5de5\u827a\u6b65\u9aa4\u800c\u589e\u52a0\u6210\u672c\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u56fe6. HKMG Application<\/p>\n

\u00a0<\/p>\n

\n
\n
<\/div>\n

\u9886\u5148\u7684\u4f4e\u529f\u8017\u89e3\u51b3\u65b9\u6848<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

SK\u6d77\u529b\u58eb\u901a\u8fc7\u5c06HKMG\u5de5\u827a\u6574\u5408\u4e3a\u9002\u7528\u4e8eDRAM\u5de5\u827a\u7684\u5f62\u5f0f\uff0c\u8fdb\u884c\u4e86\u5e73\u53f0\u5f00\u53d1\u3002\u5c3d\u7ba1\u9762\u4e34\u6781\u7aef\u7684\u6280\u672f\u6311\u6218\uff0c\u4f46\u516c\u53f8\u901a\u8fc7\u8bc6\u522b\u4e0eDRAM\u6d41\u76f8\u4e92\u4f5c\u7528\u76f8\u5173\u7684\u4efb\u4f55\u6f5c\u5728\u98ce\u9669\uff0c\u5e76\u901a\u8fc7\u5305\u62ec\u8bd5\u70b9\u64cd\u4f5c\u5728\u5185\u7684\u9884\u9a8c\u8bc1\u5de5\u827a\u6765\u786e\u4fdd\u89e3\u51b3\u65b9\u6848\uff0c\u6210\u529f\u5f00\u53d1\u548c\u6279\u91cf\u751f\u4ea7HKMG\u3002\u516c\u53f8\u7684\u76ee\u6807\u662f\u901a\u8fc7\u63a8\u8fdb\u4eceSiON\/Poly\u6805\u6781\u5230\u5347\u7ea7\u6784\u4ef6HKMG\u7684\u8fc7\u6e21\uff0c\u4e3a\u4e0b\u4e00\u4ee3\u6280\u672f\u8282\u70b9\u548c\u4ea7\u54c1\u5e26\u6765\u5353\u8d8a\u7684\u6280\u672f\u521b\u65b0\u3002<\/p>\n

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