{"id":1641,"date":"2021-12-13T07:00:03","date_gmt":"2021-12-13T07:00:03","guid":{"rendered":"http:\/\/localhost:8080\/people-who-put-a-uniform-drawing-paper-on-a-wafer-thinfilm-technology\/"},"modified":"2026-07-17T23:48:17","modified_gmt":"2026-07-17T15:48:17","slug":"people-who-put-a-uniform-drawing-paper-on-a-wafer-thinfilm-technology","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/people-who-put-a-uniform-drawing-paper-on-a-wafer-thinfilm-technology\/","title":{"rendered":"\u8584\u819c\u6280\u672f\u90e8\u95e8\uff1a\u5728\u6676\u5706\u4e0a\u94fa\u8bbe\u5747\u5300\u7684\u201c\u7ed8\u56fe\u7eb8\u201d"},"content":{"rendered":"
\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u8584\u819c\u6c89\u79ef\uff08Thinfilm Deposition\uff09\u662f\u6307\u5c061\u339b\uff08\u5fae\u7c73\uff09\u6216\u66f4\u5c0f\u7684\u5206\u5b50\u6216\u539f\u5b50\u6750\u6599\u7684\u8d85\u8584\u8584\u819c\u8986\u76d6\u5230\u6676\u5706\u8868\u9762\u7684\u6280\u672f\u3002<\/div>\n

\"\"<\/p>\n

\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u8584\u819c\u6c89\u79ef\uff08Thinfilm Deposition\uff09\u662f\u6307\u5c061\u00b5m\uff08\u5fae\u7c73\uff09\u6216\u66f4\u5c0f\u7684\u5206\u5b50\u6216\u539f\u5b50\u6750\u6599\u7684\u8d85\u8584\u8584\u819c\u8986\u76d6\u5230\u6676\u5706\u8868\u9762\u7684\u6280\u672f\u3002\u8fd9\u5c42\u8584\u819c\u80fd\u8ba9\u539f\u672c\u5904\u4e8e\u975e\u5bfc\u7535\u72b6\u6001\u7684\u6676\u5706\u5177\u6709\u5bfc\u7535\u7279\u6027\u3002\u6362\u53e5\u8bdd\u8bf4\uff0c\u5b83\u5145\u5f53\u4e86\u201c\u4e00\u5f20\u767d\u7eb8\u201d\uff0c\u4e3a\u968f\u540e\u7ed8\u5236\u7684\u7cbe\u7ec6\u7535\u8def\u94fa\u8bbe\u4e86\u7a7a\u95f4\u3002\u5728SK\u6d77\u529b\u58eb\u4e2d\uff0c\u8d1f\u8d23\u8fd9\u9879\u4efb\u52a1\u7684\u4fbf\u662f\u5236\u9020\u4e0e\u6280\u672f\u90e8\u95e8\u4e2d\u7684\u8584\u819c\u6280\u672f\u90e8\u95e8\u3002<\/p>\n

\u8fd9\u6b21\uff0cSK\u6d77\u529b\u58eb\u65b0\u95fb\u4e2d\u5fc3\u4e0e\u6e05\u5ddeNAND M11 CVD\uff08\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff0cChemical Vapor Deposition\uff09 \u548c PVD\uff08\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff0cPhysical Vapor Deposition\uff09\u6280\u672f\u56e2\u961f\u7684\u6210\u5458\u89c1\u9762\uff0c\u6df1\u5165\u4e86\u89e3\u4ed6\u4eec\u7684\u5de5\u4f5c\u548c\u5bfb\u6c42\u7684\u4eba\u624d\u3002<\/p>\n

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\u7b26\u5408\u5de5\u827a\u6761\u4ef6\u7684\u5747\u5300\u8584\u819c\u6c89\u79ef<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

\u8584\u819c\u6c89\u79ef\u7684\u76ee\u7684\u662f\u5728\u6676\u5706\u4e0a\u589e\u52a0\u5bfc\u7535\u7279\u6027\uff0c\u5e76\u4e3a\u4e0b\u4e00\u6b65\u5de5\u827a\u5960\u5b9a\u57fa\u7840\u3002\u4e3a\u6ee1\u8db3\u5de5\u827a\u6761\u4ef6\uff0c\u6c89\u79ef\u8584\u819c\u9700\u8981\u8ba1\u7b97\u8584\u819c\u7684\u539a\u5ea6\u3001\u6298\u5c04\u7387\u548c\u5438\u6536\u7387\u3002\u6700\u91cd\u8981\u7684\u6280\u672f\u662f\u5728\u6574\u4e2a\u6676\u5706\u4e0a\u5747\u5300\u5730\u6c89\u79ef\u8584\u819c\uff0c\u56e0\u4e3a\u8fd9\u79cd\u5747\u5300\u6027\u51b3\u5b9a\u4e86\u5728\u968f\u540e\u7684\u5149\u523b\u548c\u8680\u523b\u8fc7\u7a0b\u4e2d\u521b\u5efa\u7535\u8def\u56fe\u6848\u7684\u7cbe\u5ea6\u6c34\u5e73\u3002<\/p>\n

\u5728\u5404\u79cd\u6c89\u79ef\u65b9\u6cd5\u4e2d\uff0c\u6700\u53d7\u6b22\u8fce\u7684\u662f\u7269\u7406\u6c14\u76f8\u6c89\u79ef (PVD, Physical Vapor Deposition) \u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef (CVD, Chemical Vapor Deposition)\u3002<\/p>\n

\"\"<\/p>\n

PVD\u5728\u91d1\u5c5e\u677f\u4e0a\u5f15\u8d77\u7269\u7406\u53cd\u5e94\uff0c\u4ece\u800c\u5728\u6676\u5706\u4e0a\u6d82\u8986\u91d1\u5c5e\u79bb\u5b50\u3002\u7531\u4e8ePVD\u53d1\u751f\u5728\u4f4e\u6e29\u9ad8\u771f\u7a7a\u72b6\u6001\uff0c\u8be5\u65b9\u6cd5\u5177\u6709\u6742\u8d28\u6c61\u67d3\u5c11\u548c\u6c89\u79ef\u901f\u5ea6\u5feb\u7684\u4f18\u70b9\uff0c\u4e3b\u8981\u7528\u4e8e\u6c89\u79ef\u53ef\u4ee5\u4f20\u9012\u6676\u5706\u7535\u529b\u548c\u4fe1\u53f7\u7684\u91d1\u5c5e\u5c42\u3002<\/p>\n

\u6e85\u5c04\uff08Sputtering\uff09\u662fPVD\u7684\u5178\u578b\u65b9\u6cd5\u4e4b\u4e00\u3002\u5f53\u6c29\u6c14\u8fdb\u5165\u771f\u7a7a\u5ba4\u5e76\u8fde\u63a5\u9ad8\u538b\u7535\u6e90\u65f6\uff0c\u6c14\u4f53\u53d8\u6210\u7b49\u79bb\u5b50\u4f53\u3002\u6b64\u65f6\u65bd\u52a0\u8d1f\u76f4\u6d41\u7535\u538b\uff0c\u4f1a\u5c06\u6c29\u539f\u5b50\u8f6c\u5316\u4e3a\u9633\u79bb\u5b50\u3002\u5f53\u9633\u79bb\u5b50\u4e0e\u91d1\u5c5e\u677f\u78b0\u649e\u65f6\uff0c\u4f1a\u6709\u5c11\u91cf\u91d1\u5c5e\u5143\u7d20\u5265\u843d\u3002\u6e85\u5c04\u662f\u4e00\u79cd\u5c06\u8fd9\u4e9b\u5265\u843d\u7684\u91d1\u5c5e\u5143\u7d20\u6c89\u79ef\u5230\u6676\u5706\u4e0a\u7684\u65b9\u6cd5\u3002<\/p>\n

\"\"<\/p>\n

CVD\u5219\u662f\u5bf9\u84b8\u6c7d\u65bd\u52a0\u70ed\u91cf\u6216\u7b49\u79bb\u5b50\u4f53\uff0c\u5f15\u53d1\u5316\u5b66\u53cd\u5e94\uff0c\u4ece\u800c\u5c06\u53cd\u5e94\u4ea7\u7269\u6c89\u79ef\u5230\u6676\u5706\u4e0a\u3002\u4e0ePVD\u76f8\u6bd4\uff0c\u5b83\u5177\u6709\u66f4\u9ad8\u7684\u9636\u68af\u8986\u76d6\u7387\uff08\u6307\u5e95\u90e8\/\u4fa7\u58c1\u5904\u7684\u8584\u819c\u539a\u5ea6\u4e0e\u9876\u90e8\u7684\u4e00\u81f4\u7a0b\u5ea6\uff09\u3002\u8fd9\u79cd\u65b9\u6cd5\u4e3b\u8981\u7528\u4e8e\u7535\u4ecb\u8d28\u5c42\u7684\u6c89\u79ef\u3002\u6b64\u5916\uff0c\u5b83\u8fd8\u53ef\u7528\u4e8e\u6c89\u79ef\u6297\u53cd\u5c04\u6d82\u5c42 (ARC\uff0cAnti-Reflective Coating)\uff0c\u4ee5\u5728\u5149\u523b\u5de5\u827a\u7ed8\u5236\u56fe\u6848\u65f6\u63a7\u5236\u6f2b\u53cd\u5c04\uff1b\u6216\u7528\u4e8e\u8680\u523b\u524d\uff0c\u5728\u6676\u5706\u4e0a\u6c89\u79ef\u786c\u63a9\u6a21\uff0c\u4ee5\u4fdd\u62a4\u5e95\u5c42\u3002<\/p>\n

CVD\u6839\u636e\u64cd\u4f5c\u6761\u4ef6\u5206\u4e3a\u56db\u79cd\u65b9\u6cd5\uff1a\u5e38\u538bCVD (APCVD\uff0cAtmospheric Pressure CVD)\u3001\u70edCVD\uff08Thermal CVD\uff09\u3001\u7b49\u79bb\u5b50\u589e\u5f3aCVD\uff08PECVD\uff0cPlasma Enhanced CVD) \u548c\u9ad8\u5bc6\u5ea6\u7b49\u79bb\u5b50CVD (HDP-CVD\uff0cHigh Density Plasma CVD)\u3002<\/p>\n

APCVD\u662f\u5927\u6c14\u538b\u4e0b\u7684CVD\u65b9\u6cd5\u3002\u9ad8\u6676\u5706\u4ea7\u91cf\u548c\u7b80\u5355\u7684\u5668\u4ef6\u7ed3\u6784\u662f\u8be5\u5de5\u827a\u7684\u4e00\u5927\u4f18\u70b9\uff0c\u4f46\u7531\u4e8e\u771f\u7a7a\u5ea6\u4f4e\uff0c\u6240\u4ee5\u6b64\u65b9\u6cd5\u7684\u9636\u68af\u8986\u76d6\u7387\u6bd4\u8f83\u5dee\u3002<\/p>\n

\u70edCVD\u5229\u7528\u9ad8\u6e29\u73af\u5883\u4e0b\u7684\u70ed\u80fd\uff0c\u8fd9\u79cd\u65b9\u6cd5\u6c89\u79ef\u7684\u8584\u819c\u5747\u5300\u6027\u9ad8\u4e8eAPCVD\u3002\u7136\u800c\uff0c\u5b83\u7684\u6c89\u79ef\u901f\u5ea6\u5f88\u6162\uff0c\u4e14\u9ad8\u6e29\u73af\u5883\u4f1a\u5e26\u6765\u98ce\u9669\u56e0\u7d20\u3002<\/p>\n

PECVD\u901a\u8fc7\u964d\u4f4e\u4e0e\u7b49\u79bb\u5b50\u4f53\u4e2d\u81ea\u7531\u57fa\u53d1\u751f\u5316\u5b66\u53cd\u5e94\u6240\u9700\u7684\u6d3b\u5316\u80fd\uff0c\u5728\u4f4e\u6e29\u4e0b\u5f62\u6210\u8584\u819c\u3002\u5b83\u80fd\u5e26\u6765\u9ad8\u4ea7\u91cf\u548c\u4ee4\u4eba\u6ee1\u610f\u7684\u9636\u68af\u8986\u76d6\u7387\u3002<\/p>\n

\u5728HDP-CVD\u7684\u5de5\u827a\u4e2d\uff0c\u6c89\u79ef\u548c\u8680\u523b\u5728\u8154\u5ba4\u4e2d\u540c\u65f6\u8fdb\u884c\uff0c\u5e76\u5728\u4f4e\u538b\u548c\u9ad8\u5bc6\u5ea6\u7b49\u79bb\u5b50\u4f53\u72b6\u6001\u4e0b\u8fdb\u884c\u6c89\u79ef\uff0c\u5bf9\u4e8e\u586b\u5145\u7a7a\u9699\u7279\u522b\u6709\u7528\u3002<\/p>\n

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\u8584\u819c\u7684\u6838\u5fc3\u4ef7\u503c\uff1a\u201c\u5b9e\u73b0\u6280\u672f\u521b\u65b0\uff0c\u4ee5\u786e\u4fdd\u6700\u4f73\u91cf\u4ea7\u6280\u672f\u201d<\/h3>\n
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\u4e0e\u8584\u819c\u5de5\u827a\u76f8\u5173\u7684\u56e2\u961f\u6709\u4e03\u4e2a\uff1a\u5229\u5dddFAB\u548c\u6e05\u5ddeFAB\u90fd\u6709CVD\u6280\u672f\u56e2\u961f\u548cPVD\u6280\u672f\u56e2\u961f\uff0c\u4ed6\u4eec\u5c5e\u4e8e\u8584\u819c\u6280\u672f\u90e8\u95e8\u7684\u4e00\u90e8\u5206\uff0c\u8d1f\u8d23\u6c89\u79ef\u5de5\u5e8f\u3002\u6280\u672f\u521b\u65b0\u56e2\u961f\u548c\u5206\u5e03\u589e\u5f3a\u56e2\u961f\u4e5f\u4f1a\u4e3a\u8fd9\u9053\u5de5\u5e8f\u63d0\u4f9b\u76f8\u5173\u652f\u6301\u3002<\/p>\n

\u9664\u6e85\u5c04\u4e4b\u5916\uff0cPVD\u6280\u672f\u56e2\u961f\u8fd8\u4f7f\u7528\u5176\u4ed6\u4e0d\u540c\u65b9\u6cd5\u8fdb\u884c\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff0c\u4f8b\u5982\u53cd\u5e94\u79bb\u5b50\u8680\u523b (RIE\uff0cReactive Ion Etching)* <\/sup> \u548c\u9576\u5d4c\u5de5\u827a\uff08Damascene Process\uff09* <\/sup> \u3002\u4ed6\u4eec\u52aa\u529b\u5bfb\u6c42\u5e76\u5b9e\u8df5\u6bcf\u9053\u5de5\u5e8f\u4e2d\u6700\u4f73\u7684\u6c89\u79ef\u65b9\u6cd5\uff0c\u5e76\u4e00\u76f4\u81f4\u529b\u4e8e\u5f00\u53d1\u6c89\u79ef\u6280\u672f\uff0c\u4ee5\u4fbf\u5728\u5143\u4ef6\u4e0b\u65b9\u7a33\u5b9a\u5f62\u6210\u91d1\u5c5e\u7ebf\u3002<\/p>\n

CVD\u6280\u672f\u56e2\u961f\u8d1f\u8d23\u901a\u8fc7HDP-CVD\u548cPECVD\u65b9\u6cd5\u7a33\u5b9a\u6c89\u79ef\u7535\u4ecb\u8d28\u5c42\uff0c\u8fd8\u8d1f\u8d23\u6c89\u79efARC\u548c\u786c\u63a9\u6a21\uff0c\u8fd9\u5bf9\u4e8e\u63d0\u9ad8\u540e\u7eed\u5de5\u827a\u7684\u6548\u7387\u81f3\u5173\u91cd\u8981\u3002\u6700\u8fd1\u56e2\u961f\u66f4\u4e00\u76f4\u4e13\u6ce8\u4e8e\u5f00\u53d1\u4e00\u79cd\u4ea4\u66ff\u5806\u53e0\u6c27\u5316\u7845\u5c42\u548c\u6c2e\u5316\u7845\u5c42\u7684\u6280\u672f\uff0c\u4ee5\u4f7f\u8584\u819c\u66f4\u5747\u5300\u3002<\/p>\n

\u6bcf\u4e2a\u56e2\u961f\u53c8\u6839\u636e\u4efb\u52a1\u7684\u6027\u8d28\uff0c\u5206\u4e3a\u5de5\u827a\u90e8\u548c\u8bbe\u5907\u90e8\u3002\u5de5\u827a\u90e8\u8d1f\u8d23\u4f18\u5316\u5de5\u827a\uff0c\u4ee5\u786e\u4fdd\u8584\u819c\u5728\u6676\u5706\u4e0a\u7684\u7a33\u5b9a\u6c89\u79ef\uff0c\u8fd8\u901a\u8fc7\u5206\u6790\u54cd\u5e94\u6570\u636e\u548c\u7f3a\u9677\u6570\u636e\u6765\u589e\u5f3a\u5206\u5e03\u3002<\/p>\n

\u8bbe\u5907\u90e8\u8d1f\u8d23\u8bbe\u5907\u7ef4\u62a4\u53ca\u5176\u6027\u80fd\u7684\u63d0\u9ad8\u3002\u4f8b\u5982\uff0c\u7ba1\u7406\u8bbe\u5907\u7684\u4f7f\u7528\u5386\u53f2\uff0c\u5e94\u5bf9\u8584\u819c\u7f3a\u9677\uff0c\u5e76\u6839\u636e\u5de5\u4f5c\u548c\u751f\u4ea7\u8ba1\u5212\u8fdb\u884c\u8bbe\u5907\u7684\u8bbe\u7f6e\u6216\u642c\u8fc1\u3002<\/p>\n

\u6280\u672f\u521b\u65b0\u56e2\u961f\u81f4\u529b\u4e8e\u5229\u7528\u4ece\u6bcf\u4e2aFAB\u7684\u8bbe\u5907\u6536\u96c6\u800c\u6765\u7684\u5404\u79cd\u6570\u636e\u7a33\u5b9a\u8bbe\u5907\uff0c\u800c\u5206\u5e03\u589e\u5f3a\u56e2\u961f\u5219\u8d1f\u8d23\u6539\u8fdb\u6bcf\u4e2aFAB\u7684\u5de5\u5e8f\u5206\u5e03\u3002\u8fd9\u4e24\u4e2a\u56e2\u961f\u4e3a\u6bcf\u4e2aFAB\u7684\u56e2\u961f\u63d0\u4f9b\u652f\u6301\uff0c\u5e76\u4e3a\u63d0\u9ad8\u4ea7\u91cf\u505a\u51fa\u8d21\u732e\u3002<\/p>\n

\u5c3d\u7ba1\u56e2\u961f\u6309\u5de5\u5e8f\u6d41\u7a0b\u5212\u5206\uff0c\u4f46\u4ed6\u4eec\u6709\u7740\u540c\u6837\u7684\u76ee\u6807\uff1a\u201c\u5b9e\u73b0\u6280\u672f\u521b\u65b0\uff0c\u4ee5\u786e\u4fdd\u6700\u4f73\u91cf\u4ea7\u6280\u672f\u3002\u201d\u5728\u6b64\u8fc7\u7a0b\u4e2d\uff0c\u4ed6\u4eec\u4e0d\u65ad\u5730\u76f8\u4e92\u6c9f\u901a\u5e76\u6539\u8fdb\u5de5\u827a\u6280\u672f\u3002<\/p>\n

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\u4ee5\u4e0b\u662f\u6765\u81ea\u6211\u4eec\u5de5\u7a0b\u5e08\u7684\u4e00\u4e9b\u5efa\u8bae\u3002<\/h3>\n
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SK\u6d77\u529b\u58eb\u65b0\u95fb\u4e2d\u5fc3\u4e0e\u8584\u819c\u6280\u672f\u90e8\u95e8\u7684\u521d\u7ea7\u6210\u5458\u8fdb\u884c\u4e86\u89c1\u9762\u5bf9\u8c08\uff0c\u4ee5\u4e86\u89e3\u4ed6\u4eec\u5de5\u4f5c\u6240\u9700\u7684\u80fd\u529b\u4ee5\u53ca\u7d20\u8d28\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u6e05\u5ddeNAND M11 PVD\u6280\u672f\u56e2\u961f\uff0c\u91d1\u70ab\u7118Technical Leader(TL)<\/p>\n

\u95ee\uff1a\u8bf7\u5411\u6211\u4eec\u4ecb\u7ecd\u4e00\u4e0b\u60a8\u7684\u5de5\u4f5c\u3002<\/strong><\/p>\n

\u6211\u662f\u6e05\u5ddeNAND M11 PVD\u6280\u672f\u56e2\u961f\u7684\u5de5\u827a\u5de5\u7a0b\u5e08\uff0c\u81f4\u529b\u4e8e\u63d0\u9ad8\u8584\u819c\u8d28\u91cf\u3002\u6211\u8d1f\u8d23\u76d1\u63a7\u56e2\u961f\u6574\u4e2aPVD\u8fc7\u7a0b\uff0c\u4ee5\u68c0\u67e5\u5728\u7ebf\uff08\u751f\u4ea7\u7ebf\u4e2d\u7684\u8fde\u7eed\u64cd\u4f5c\u5e8f\u5217\uff09\u53ef\u80fd\u4f1a\u51fa\u73b0\u7684\u4efb\u4f55\u95ee\u9898\u3002\u51fa\u73b0\u7f3a\u9677\u65f6\uff0c\u6211\u4f1a\u5206\u6790\u54cd\u5e94\u6570\u636e\u548c\u7f3a\u9677\u6570\u636e\uff0c\u4ee5\u786e\u5b9a\u539f\u56e0\u5e76\u6539\u8fdb\u5206\u5e03\u3002<\/p>\n

\u95ee\uff1a\u60a8\u80fd\u4ecb\u7ecd\u4e00\u4e0b\u60a8\u7684\u5de5\u4f5c\u9700\u8981\u7684\u4e00\u4e9b\u80fd\u529b\u5417\uff1f<\/strong><\/p>\n

\u4f60\u5fc5\u987b\u5bf9PVD\u6280\u672f\u6709\u5f88\u597d\u7684\u4e86\u89e3\uff0c\u5b66\u4e60\u534a\u5bfc\u4f53\u6750\u6599\u7684\u6027\u8d28\u548c\u771f\u7a7a\u72b6\u6001\u7684\u7269\u7406\u539f\u7406\u4e5f\u4f1a\u5f88\u6709\u5e2e\u52a9\u3002\u6b64\u5916\uff0c\u7531\u4e8e\u6211\u4eec\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u4f1a\u4f7f\u7528\u5927\u6570\u636e\uff0c\u719f\u6089\u7edf\u8ba1\u5b66\u4e5f\u5f88\u91cd\u8981\uff0c\u5c24\u5176\u662f\u5982\u4f55\u4f7f\u7528\u7edf\u8ba1\u5de5\u5177\uff0c\u5e76\u89e3\u8bfb\u5904\u7406\u540e\u7684\u6570\u636e\u3002<\/p>\n

\u95ee\uff1a\u60a8\u9047\u5230\u8fc7\u54ea\u4e9b\u6311\u6218\uff1f\u53c8\u662f\u5982\u4f55\u514b\u670d\u5b83\u4eec\u7684\uff1f<\/strong><\/p>\n

\u6211\u89c9\u5f97\u751f\u4ea7\u6570\u91cf\u548c\u8d28\u91cf\u95ee\u9898\u53d1\u751f\u51b2\u7a81\u65f6\u6700\u5177\u6311\u6218\u6027\uff0c\u56e0\u4e3a\u5f53\u6211\u4eec\u8fc7\u5ea6\u589e\u52a0\u4ea7\u91cf\u65f6\uff0c\u5c31\u4f1a\u51fa\u73b0\u8d28\u91cf\u95ee\u9898\u3002\u4e3a\u4e86\u5e94\u5bf9\u8fd9\u4e00\u6311\u6218\uff0c\u6211\u4eec\u6839\u636e\u5176\u4ed6FAB\u7684\u5907\u4efd\u8bc4\u4f30\u548c\u589e\u4ea7\u5b9e\u9a8c\u7ed3\u679c\uff0c\u589e\u52a0\u4e86\u4ea7\u91cf\u3002\u6211\u4eec\u8fd8\u4ed4\u7ec6\u7ba1\u7406\u6570\u636e\uff0c\u4ee5\u9632\u51fa\u73b0\u4efb\u4f55\u8d28\u91cf\u95ee\u9898\u3002\u6b64\u5916\uff0c\u6211\u4eec\u6b63\u52aa\u529b\u5bfb\u627e\u7528\u4e8e\u7f3a\u9677\u5206\u6790\u7684\u65b0\u6570\u636e\u3002<\/p>\n

\u95ee\uff1a\u60a8\u7684\u5de5\u4f5c\u6709\u54ea\u4e9b\u5438\u5f15\u4eba\u7684\u65b9\u9762\uff1f<\/strong><\/p>\n

\u6211\u559c\u6b22\u5728\u51fa\u73b0\u95ee\u9898\u65f6\uff0c\u4e0e\u56e2\u961f\u6210\u5458\u6216\u5176\u4ed6\u56e2\u961f\u4e0d\u65ad\u6c9f\u901a\uff0c\u4ee5\u4fbf\u627e\u51fa\u95ee\u9898\u7684\u539f\u56e0\u3002<\/p>\n

\u95ee\uff1a\u60a8\u6240\u5728\u7684\u56e2\u961f\u6c1b\u56f4\u5982\u4f55\uff1f<\/strong><\/p>\n

\u6211\u4eec\u81ea\u7531\u5730\u8868\u8fbe\u548c\u5206\u4eab\u6211\u4eec\u7684\u610f\u89c1\u3002\u6bcf\u5f53\u9700\u8981\u5e2e\u52a9\u65f6\uff0c\u6211\u4eec\u90fd\u4f1a\u4e00\u8d77\u5de5\u4f5c\u5e76\u516c\u5f00\u5206\u4eab\u6211\u4eec\u7684\u60f3\u6cd5\u3002\u8fd9\u4e2a\u8fc7\u7a0b\u4f7f\u6211\u4eec\u80fd\u591f\u62d3\u5bbd\u89c6\u91ce\u5e76\u6210\u957f\u3002<\/p>\n

\u95ee\uff1a\u5b8c\u6210\u60a8\u7684\u56e2\u961f\u5de5\u4f5c\u9700\u8981\u54ea\u4e9b\u6280\u80fd\uff1f\u60a8\u5bf9\u90a3\u4e9b\u60f3\u52a0\u5165\u56e2\u961f\u7684\u4eba\u6709\u4ec0\u4e48\u60f3\u8bf4\u7684\uff1f<\/strong><\/p>\n

\u8d23\u4efb\u611f\u548c\u5bf9\u7ec6\u8282\u7684\u5173\u6ce8\u3002\u7531\u4e8e\u6211\u4eec\u5904\u7406\u8584\u819c\u7684\u5de5\u4f5c\u6027\u8d28\uff0c\u53d1\u751f\u4e8b\u6545\u7684\u98ce\u9669\u66f4\u9ad8\u3002\u56e0\u6b64\uff0c\u91cd\u8981\u7684\u662f\u6ce8\u91cd\u7ec6\u8282\u5e76\u575a\u6301\u5230\u5e95\u3002\u6b64\u5916\uff0c\u90a3\u4e9b\u80fd\u591f\u4e0e\u4ed6\u4eba\u826f\u597d\u6c9f\u901a\u7684\u4eba\u975e\u5e38\u9002\u5408\u6211\u4eec\u7684\u56e2\u961f\uff0c\u56e0\u4e3a\u5728\u56e2\u961f\u5185\u90e8\u4ee5\u53ca\u4e0e\u5176\u4ed6\u56e2\u961f\u9700\u8981\u8fdb\u884c\u5f88\u591a\u5408\u4f5c\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u6e05\u5ddeNAND M11 PVD\u6280\u672f\u56e2\u961f\uff0c\u91d1\u6c11\u6d69TL<\/p>\n

\u95ee\uff1a\u8bf7\u5411\u6211\u4eec\u4ecb\u7ecd\u4e00\u4e0b\u60a8\u7684\u5de5\u4f5c\u3002<\/strong><\/p>\n

\u4f5c\u4e3a\u6e05\u5ddeNAND M11 PVD\u6280\u672f\u56e2\u961f\u7684\u4e00\u5458\uff0c\u6211\u8d1f\u8d23\u63a7\u5236PVD\u5de5\u827a\u4e2d\u4f7f\u7528\u7684\u949b (Ti) \u548c\u6c2e\u5316\u949b (TiN) \u6c14\u4f53\u7684\u8bbe\u5907\u3002\u6211\u7684\u5de5\u4f5c\u662f\u9879\u76ee\u7ba1\u7406\uff08PM\uff0cProject Management\uff09\uff0c\u6d89\u53ca\u8bbe\u5907\u64cd\u4f5c\u548c\u6839\u636e\u751f\u4ea7\u91cf\u8fdb\u884c\u5de5\u4f5c\u7ba1\u7406\u3002\u5f53\u5728\u6676\u5706\u4e2d\u53d1\u73b0\u7f3a\u9677\u65f6\uff0c\u6211\u4f1a\u4e0e\u5de5\u827a\u5de5\u7a0b\u5e08\u4e00\u8d77\u89e3\u51b3\u95ee\u9898\u3002<\/p>\n

\u95ee\uff1a\u80fd\u4ecb\u7ecd\u4e00\u4e0b\u60a8\u5de5\u4f5c\u6240\u9700\u7684\u4e00\u4e9b\u80fd\u529b\u5417\uff1f<\/strong><\/p>\n

\u534a\u5bfc\u4f53\u8bbe\u5907\u5904\u7406\u529f\u7387\u3001\u6e29\u5ea6\u3001\u538b\u529b\u548c\u6d41\u91cf\u7b49\u4e0d\u540c\u7684\u6761\u4ef6\uff0c\u5e76\u6839\u636e\u6bcf\u79cd\u60c5\u51b5\u5e94\u7528\u8fd9\u4e9b\u6761\u4ef6\u3002\u56e0\u6b64\uff0c\u6211\u4eec\u8981\u80fd\u6839\u636e\u6240\u5b66\u7684\u77e5\u8bc6\u6709\u6240\u62d3\u5c55\uff0c\u4ece\u5927\u5b66\u7684\u4e3b\u8981\u8bfe\u7a0b\u4e2d\u79ef\u7d2f\u57fa\u7840\u77e5\u8bc6\u662f\u975e\u5e38\u6709\u5e2e\u52a9\u7684\u3002\u53e6\u4e00\u4e2a\u6709\u52a9\u4e8e\u5b8c\u6210\u8fd9\u9879\u5de5\u4f5c\u7684\u80fd\u529b\uff0c\u662f\u6570\u636e\u5206\u6790\u80fd\u529b\uff0c\u8981\u80fd\u5904\u7406\u901a\u8fc7\u5404\u79cd\u4f20\u611f\u5668\u76d1\u63a7\u53c2\u6570\u6240\u5f97\u5230\u7684\u4fe1\u606f\uff08\u4f8b\u5982\u8bbe\u5907\u7684\u6e29\u5ea6\u548c\u538b\u529b\uff09\u3002<\/p>\n

\u95ee\uff1a\u60a8\u9047\u5230\u8fc7\u54ea\u4e9b\u6311\u6218\uff1f\u53c8\u662f\u5982\u4f55\u514b\u670d\u5b83\u4eec\u7684\uff1f<\/strong><\/p>\n

\u5728\u64cd\u4f5c\u8bbe\u5907\u548c\u89e3\u51b3\u95ee\u9898\u65f6\uff0c\u4f1a\u4e0e\u8bb8\u591a\u4eba\u4e00\u8d77\u5de5\u4f5c\u3002\u5f53\u751f\u4ea7\u7ebf\u4e0a\u51fa\u73b0\u95ee\u9898\u65f6\uff0c\u73b0\u573a\u548c\u529e\u516c\u5ba4\u4e4b\u95f4\u7684\u987a\u7545\u6c9f\u901a\uff0c\u662f\u9488\u5bf9\u60c5\u51b5\u91c7\u53d6\u9002\u5f53\u63aa\u65bd\u7684\u5173\u952e\u3002\u516c\u53f8\u4e3a\u5458\u5de5\u63d0\u4f9b\u4e86\u66f4\u6df1\u5165\u4e86\u89e3\u534a\u5bfc\u4f53\u4ee5\u53ca\u4e0d\u540c\u60c5\u51b5\u4e0b\u91cd\u8981\u4fe1\u606f\u7684\u673a\u4f1a\uff0c\u4f8b\u5982SK\u6d77\u529b\u58eb\u5927\u5b66\uff08SKHU\uff0cSK hynix University\uff09\u8bfe\u7a0b\uff0c\u8fd8\u6709\u5236\u9020\u4e0e\u6280\u672f\u90e8\u95e8\u6bcf\u5468\u7ec4\u7ec7\u7684\u5468\u56db\u8bfe\u7a0b\u3002<\/p>\n

\u95ee\uff1a\u60a8\u7684\u5de5\u4f5c\u6709\u54ea\u4e9b\u5438\u5f15\u4eba\u7684\u65b9\u9762\uff1f<\/strong><\/p>\n

\u901a\u8fc7\u4e00\u4e2a\u65b0\u5047\u8bbe\u89e3\u51b3\u4e00\u4e2a\u96be\u9898\u65f6\uff0c\u611f\u89c9\u975e\u5e38\u68d2\u3002\u5f53\u6676\u5706\u5728\u5de5\u827a\u8fc7\u7a0b\u4e2d\u51fa\u73b0\u95ee\u9898\u65f6\uff0c\u6211\u4eec\u662f\u65e0\u6cd5\u68c0\u67e5\u8154\u5ba4\u5185\u90e8\u7684\u3002\u56e0\u6b64\uff0c\u6211\u4eec\u5fc5\u987b\u6839\u636e\u89c2\u5bdf\u63d0\u51fa\u4e0d\u540c\u7684\u5047\u8bbe\u3002\u8fd9\u4e2a\u8fc7\u7a0b\u5e76\u4e0d\u5bb9\u6613\uff0c\u4f46\u5f53\u6211\u4eec\u627e\u5230\u89e3\u51b3\u65b9\u6848\u65f6\uff0c\u5c31\u662f\u6700\u6fc0\u52a8\u4eba\u5fc3\u7684\u65f6\u523b\u3002<\/p>\n

\u95ee\uff1a\u60a8\u6240\u5728\u7684\u56e2\u961f\u6c1b\u56f4\u5982\u4f55\uff1f<\/strong><\/p>\n

PVD\u6280\u672f\u56e2\u961f\u5185\u90fd\u662f\u601d\u60f3\u5f00\u653e\u3001\u5c0a\u91cd\u4ed6\u4eba\u610f\u89c1\u7684\u6210\u5458\u3002\u8fd9\u6837\u7684\u73af\u5883\uff0c\u8ba9\u6211\u5728\u5de5\u4f5c\u4e2d\u57f9\u517b\u4e86\u7075\u6d3b\u7684\u601d\u7ef4\uff0c\u4e5f\u63d0\u9ad8\u4e86\u6211\u7684\u5de5\u4f5c\u6548\u7387\u3002<\/p>\n

\u95ee\uff1a\u5b8c\u6210\u60a8\u6240\u5728\u7684\u56e2\u961f\u5de5\u4f5c\u9700\u8981\u54ea\u4e9b\u6280\u80fd\uff1f\u60a8\u5bf9\u90a3\u4e9b\u60f3\u52a0\u5165\u56e2\u961f\u7684\u4eba\u6709\u4ec0\u4e48\u60f3\u8bf4\u7684\uff1f<\/strong><\/p>\n

\u6211\u60f3\u8bf4\uff0c\u7b2c\u4e00\u6280\u80fd\u662f\u7075\u6d3b\u7684\u601d\u7ef4\u3002\u968f\u7740\u534a\u5bfc\u4f53\u4ea7\u54c1\u53d8\u5f97\u8d8a\u6765\u8d8a\u6210\u719f\u590d\u6742\uff0c\u6709\u65f6\u73b0\u6709\u65b9\u6cd5\u4e0d\u8db3\u4ee5\u89e3\u51b3\u95ee\u9898\u3002\u90a3\u6837\u7684\u8bdd\uff0c\u6b7b\u677f\u7684\u601d\u7ef4\u65b9\u5f0f\u662f\u89e3\u51b3\u4e0d\u4e86\u96be\u9898\u7684\uff1b\u76f8\u53cd\uff0c\u4f60\u5fc5\u987b\u4ece\u4e00\u5f00\u59cb\u5c31\u63d0\u51fa\u4e00\u4e2a\u65b0\u7684\u5047\u8bbe\u3002\u5bf9\u4e8e\u672a\u6765\u52a0\u5165PVD\u6280\u672f\u56e2\u961f\u7684\u6210\u5458\uff0c\u6211\u5efa\u8bae\u4ed6\u4eec\u5c06\u6b64\u8fc7\u7a0b\u89c6\u4e3a\u6bcf\u5929\u5b66\u4e60\u65b0\u4e8b\u7269\u3001\u79ef\u7d2f\u77e5\u8bc6\u5e76\u6210\u4e3a\u4e13\u5bb6\u7684\u673a\u4f1a\uff0c\u800c\u4e0d\u662f\u4e00\u4e2a\u8270\u96be\u7684\u8fc7\u7a0b\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u6e05\u5ddeNAND M11 CVD\u6280\u672f\u56e2\u961f\uff0c\u6c88\u5347\u5f67TL<\/p>\n

\u95ee\uff1a\u8bf7\u5411\u6211\u4eec\u4ecb\u7ecd\u4e00\u4e0b\u60a8\u7684\u5de5\u4f5c\u3002<\/strong><\/p>\n

\u6211\u5728\u6e05\u5ddeNAND M11 CVD\u6280\u672f\u56e2\u961f\u62c5\u4efb\u5de5\u827a\u5de5\u7a0b\u5e08\u3002\u6211\u6839\u636e\u5236\u9020\u8ba1\u5212\u7ba1\u7406\u5de5\u5e8f\u5386\u53f2\uff0c\u5e76\u68c0\u67e5\u8fde\u9501 \u3002\u6211\u7684\u53e6\u4e00\u4e2a\u91cd\u8981\u4efb\u52a1\u662f\u5728\u5f00\u53d1\u4e0b\u4e00\u4ee3\u4ea7\u54c1\u6216\u8f6c\u79fb\u65b0\u8bbe\u5907\u65f6\uff0c\u4e0e\u76f8\u5173\u56e2\u961f\u5408\u4f5c\u5efa\u7acb\u6d41\u7a0b\u3002<\/p>\n

\u95ee\uff1a\u60a8\u80fd\u4ecb\u7ecd\u4e00\u4e0b\u60a8\u5de5\u4f5c\u6240\u9700\u7684\u4e00\u4e9b\u80fd\u529b\u5417\uff1f<\/strong><\/p>\n

\u80fd\u51c6\u786e\u5206\u6790\u8bbe\u5907\u95f4\u6570\u636e\u663e\u8457\u5dee\u5f02\u7684\u7ec6\u81f4\u80fd\u529b\u662f\u81f3\u5173\u91cd\u8981\u7684\u3002\u56e0\u4e3a\u5bf9\u4e8e\u63d0\u9ad8\u4ea7\u91cf\u6765\u8bf4\uff0c\u8bbe\u5907\u95f4\u65e0\u7269\u7406\u5dee\u5f02\u7684\u5747\u5300\u6c89\u79ef\u8584\u819c\u662f\u5fc5\u4e0d\u53ef\u5c11\u7684\u3002\u4e3a\u6b64\uff0c\u4f60\u5e94\u8be5\u5177\u6709\u5206\u6790\u80fd\u529b\uff0c\u53ef\u4ee5\u5feb\u901f\u4e0e\u56e2\u961f\u5206\u4eab\u6c89\u79ef\u540e\u6536\u96c6\u7684\u7ed3\u679c\u3002<\/p>\n

\u95ee\uff1a\u60a8\u9047\u5230\u8fc7\u54ea\u4e9b\u6311\u6218\uff1f\u53c8\u662f\u5982\u4f55\u514b\u670d\u5b83\u4eec\u7684\uff1f<\/strong><\/p>\n

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\u95ee\uff1a\u60a8\u6240\u5728\u7684\u56e2\u961f\u6c1b\u56f4\u5982\u4f55\uff1f<\/strong><\/p>\n

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\u53ea\u8981\u4f60\u70ed\u8877\u4e8e\u89e3\u51b3\u95ee\u9898\uff0c\u4e0d\u60e7\u6015\u6311\u6218\uff0c\u52a0\u5165\u516c\u53f8\u540e\u4efb\u4f55\u56f0\u96be\u4fbf\u90fd\u53ef\u4ee5\u514b\u670d\u3002\u8584\u819c\u6280\u672f\u90e8\u95e8\u8fd8\u7279\u522b\u4e3a\u65b0\u4eba\u63d0\u4f9b\u4e86\u7ed3\u6784\u5408\u7406\u7684\u57f9\u8bad\u8ba1\u5212\uff0c\u8ba9\u4f60\u5728\u56e2\u961f\u4e2d\u770b\u5230\u81ea\u5df1\u7684\u6210\u957f\u3002<\/p>\n

\"\"<\/p>\n

\u25b2 \u6e05\u5ddeNAND M11 CVD\u6280\u672f\u56e2\u961f\uff0c\u8d75\u6cf0\u6631TL<\/p>\n

\u95ee\uff1a\u8bf7\u5411\u6211\u4eec\u4ecb\u7ecd\u4e00\u4e0b\u60a8\u7684\u5de5\u4f5c\u3002<\/strong><\/p>\n

\u6211\u5728\u6e05\u5ddeNAND M11 CVD\u6280\u672f\u56e2\u961f\u7684\u8bbe\u5907\u90e8\u5de5\u4f5c\u3002\u6211\u4e3a\u6279\u91cf\u751f\u4ea7\u8bbe\u5907\u7684\u7a33\u5b9a\u8fd0\u884c\u5236\u5b9a\u4e86PM\uff08Project Management\uff09\u8ba1\u5212\u3002\u540c\u65f6\uff0c\u6211\u8d1f\u8d23\u8bbe\u7f6e\u65b0\u8bbe\u5907\u6216\u8f6c\u79fb\u591a\u4f59\u8bbe\u5907\uff0c\u4ee5\u53ca\u5ba1\u67e5\u8bbe\u5907\u7684\u95ee\u9898\u5e76\u4e0e\u76f8\u5173\u56e2\u961f\u5408\u4f5c\u89e3\u51b3\u95ee\u9898\u3002<\/p>\n

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* <\/sup>\u53cd\u5e94\u79bb\u5b50\u8680\u523b \uff08RIE\uff0cReactive Ion Etching\uff09\uff1a\u91d1\u5c5e\u5316\u5de5\u5e8f\u7684\u4e00\u90e8\u5206\uff0c\u5b83\u201c\u4e3a\u7535\u6d41\u521b\u9020\u4e86\u4e00\u6761\u8def\u5f84\u201d\u3002\u9996\u5148\u6c89\u79ef\u94dd (AI\uff0cAluminum) \u819c\uff0c\u7136\u540e\u8fdb\u884c\u5149\u523b\u5de5\u827a\u548cAI\u8680\u523b\uff0c\u968f\u540e\u6c89\u79ef\u4e8c\u6c27\u5316\u7845\u975e\u91d1\u5c5e\u819c\u3002
\n* <\/sup>\u9576\u5d4c\uff08Damascene\uff09\uff1a\u8fd9\u662f\u91d1\u5c5e\u5316\u5de5\u5e8f\u7684\u4e00\u90e8\u5206\u3002\u9996\u5148\u6c89\u79ef\u4e8c\u6c27\u5316\u7845\u975e\u91d1\u5c5e\u8584\u819c\uff0c\u7136\u540e\u8fdb\u884c\u5149\u523b\u548c\u8680\u523b\u5de5\u827a\u4ee5\u521b\u5efa\u7535\u8def\u56fe\u6848\u3002\u4e4b\u540e\uff0c\u5728\u5185\u90e8\u6c89\u79ef\u91d1\u5c5e\u819c\uff0c\u7136\u540e\u8fdb\u884c\u5316\u5b66\u673a\u68b0\u629b\u5149 (CMP\uff0cChemical Mechanical Polish) \u5de5\u827a\uff0c\u4ece\u800c\u521b\u5efa\u72ec\u7acb\u7684\u91d1\u5c5e\u7ebf\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u5728\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\uff0c\u8584\u819c\u6c89\u79ef\uff08Thinfilm Deposition\uff09\u662f\u6307\u5c061\u339b\uff08\u5fae\u7c73\uff09\u6216\u66f4\u5c0f\u7684\u5206\u5b50\u6216\u539f\u5b50\u6750\u6599\u7684\u8d85 [\u2026]<\/p>\n","protected":false},"author":2,"featured_media":1633,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_migrated_source_id":7589,"footnotes":"","_members_access_role":[],"_members_access_error":""},"categories":[6],"tags":[791,776,1039,1051,565],"class_list":["post-1641","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-story","tag-791","tag-776","tag-1039","tag-1051","tag-565"],"acf":[],"_links":{"self":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1641","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/comments?post=1641"}],"version-history":[{"count":3,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1641\/revisions"}],"predecessor-version":[{"id":5808,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/1641\/revisions\/5808"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media\/1633"}],"wp:attachment":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media?parent=1641"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/categories?post=1641"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/tags?post=1641"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}