{"id":1983,"date":"2021-06-01T00:00:41","date_gmt":"2021-06-01T00:00:41","guid":{"rendered":"http:\/\/localhost:8080\/etching-process-to-complete-semiconductor-patterning-2\/"},"modified":"2026-07-18T00:31:50","modified_gmt":"2026-07-17T16:31:50","slug":"etching-process-to-complete-semiconductor-patterning-2","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/etching-process-to-complete-semiconductor-patterning-2\/","title":{"rendered":"\u534a\u5bfc\u4f53\u56fe\u6848\u5316\u5de5\u827a\u6d41\u7a0b\u4e4b\u523b\u8680\uff08\u4e8c\uff09"},"content":{"rendered":"

\u65e9\u671f\u7684\u6e7f\u6cd5\u523b\u8680\u4fc3\u8fdb\u4e86\u6e05\u6d01\uff08Cleansing\uff09\u6216\u7070\u5316\uff08Ashing\uff09\u5de5\u827a\u7684\u53d1\u5c55\u3002\u800c\u5728\u5982\u4eca\uff0c\u4f7f\u7528\u7b49\u79bb\u5b50\u4f53\uff08Plasma\uff09\u7684\u5e72\u6cd5\u523b\u8680\uff08Dry Etching\uff09\u65b9\u6cd5\u5df2\u7ecf\u6210\u4e3a\u4e3b\u6d41\u523b\u8680\u5de5\u827a\u3002\u7b49\u79bb\u5b50\u4f53\u7531\u7535\u5b50\u3001\u9633\u79bb\u5b50\u548c\u81ea\u7531\u57fa\uff08Radical\uff09\u7c92\u5b50\u7ec4\u6210\u3002\u5728\u7b49\u79bb\u5b50\u4f53\u4e0a\u65bd\u52a0\u7684\u80fd\u91cf\u4f7f\u4e2d\u6027\u72b6\u6001\u4e0b\u7684\u6e90\u6c14\u4f53\u6700\u5916\u5c42\u7535\u5b50\u53d1\u751f\u5265\u79bb\uff0c\u4ece\u800c\u5c06\u8fd9\u4e9b\u7535\u5b50\u8f6c\u5316\u4e3a\u9633\u79bb\u5b50\u3002\u6b64\u5916\uff0c\u8fd8\u53ef\u4ee5\u901a\u8fc7\u65bd\u52a0\u80fd\u91cf\u6765\u5265\u79bb\u5206\u5b50\u4e2d\u4e0d\u5b8c\u7f8e\u7684\u539f\u5b50\uff0c\u5f62\u6210\u7535\u4e2d\u6027\u7684\u81ea\u7531\u57fa\u3002\u5e72\u6cd5\u523b\u8680\u5229\u7528\u6784\u6210\u7b49\u79bb\u5b50\u4f53\u7684\u9633\u79bb\u5b50\u548c\u81ea\u7531\u57fa\uff0c\u5176\u4e2d\u9633\u79bb\u5b50\u5177\u6709\u5404\u5411\u5f02\u6027\uff08\u9002\u7528\u4e8e\u67d0\u4e00\u65b9\u5411\u4e0a\u7684\u523b\u8680\uff09\uff0c\u81ea\u7531\u57fa\u5177\u6709\u5404\u5411\u540c\u6027\uff08\u9002\u7528\u4e8e\u6240\u6709\u65b9\u5411\u4e0a\u7684\u523b\u8680\uff09\u3002\u81ea\u7531\u57fa\u7684\u6570\u91cf\u8981\u8fdc\u8fdc\u8d85\u8fc7\u9633\u79bb\u5b50\u7684\u6570\u91cf\u3002\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u5e72\u6cd5\u523b\u8680\u672c\u5e94\u8be5\u50cf\u6e7f\u6cd5\u523b\u8680\u4e00\u6837\u5177\u6709\u5404\u5411\u540c\u6027\u3002\u7136\u800c\uff0c\u6b63\u662f\u5e72\u6cd5\u523b\u8680\u7684\u5404\u5411\u5f02\u6027\u523b\u8680\u4f7f\u8d85\u5c0f\u578b\u5316\u7535\u8def\u6210\u4e3a\u53ef\u80fd\u3002\u8fd9\u662f\u4ec0\u4e48\u539f\u56e0\u5462\uff1f\u53e6\u5916\uff0c\u9633\u79bb\u5b50\u548c\u81ea\u7531\u57fa\u7684\u523b\u8680\u901f\u5ea6\u975e\u5e38\u6162\uff0c\u90a3\u4e48\u9762\u5bf9\u8fd9\u4e00\u7f3a\u70b9\uff0c\u6211\u4eec\u53c8\u8be5\u5982\u4f55\u5c06\u7b49\u79bb\u5b50\u4f53\u523b\u8680\u65b9\u6cd5\u5e94\u7528\u5230\u6279\u91cf\u751f\u4ea7\u4e0a\u5462\uff1f<\/p>\n

\u00a0<\/p>\n

\n
\n
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1.\u7eb5\u6a2a\u6bd4\uff08A\/R)<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

\"\"<\/p>\n

\u25b2 \u56fe1. \u7eb5\u6a2a\u6bd4\u7684\u6982\u5ff5\u4ee5\u53ca\u6280\u672f\u8fdb\u6b65\u5bf9\u5176\u7684\u5f71\u54cd<\/p>\n

\u7eb5\u6a2a\u6bd4\uff08Aspect Ratio\uff09\u662f\u6c34\u5e73\u5bbd\u5ea6\u4e0e\u5782\u76f4\u9ad8\u5ea6\u4e4b\u6bd4\uff08\u5373\u9ad8\u5ea6\u9664\u4ee5\u5bbd\u5ea6\uff09\u3002\u7535\u8def\u7684\u5173\u952e\u5c3a\u5bf8\uff08CD\uff09\u8d8a\u5c0f\uff0c\u7eb5\u6a2a\u6bd4\u503c\u8d8a\u5927\u3002\u4e5f\u5c31\u662f\u8bf4\uff0c\u5047\u8bbe\u7eb5\u6a2a\u6bd4\u503c\u4e3a10\uff0c\u5bbd\u5ea6\u4e3a10nm\uff0c\u5219\u5728\u523b\u8680\u8fc7\u7a0b\u4e2d\u94bb\u51fa\u5b54\u7684\u9ad8\u5ea6\u5e94\u4e3a100nm\u3002\u56e0\u6b64\uff0c\u5bf9\u4e8e\u8981\u6c42\u8d85\u5c0f\u578b\u5316\uff082D\uff09\u6216\u9ad8\u5bc6\u5ea6\uff083D\uff09\u7684\u4e0b\u4e00\u4ee3\u4ea7\u54c1\uff0c\u9700\u8981\u6781\u9ad8\u7684\u7eb5\u6a2a\u6bd4\u503c\u624d\u80fd\u786e\u4fdd\u9633\u79bb\u5b50\u5728\u523b\u8680\u8fc7\u7a0b\u4e2d\u80fd\u591f\u7a7f\u900f\u5e95\u90e8\u7684\u819c\u3002<\/p>\n

\u8981\u57282D\u4ea7\u54c1\u4e2d\u5b9e\u73b0\u5173\u952e\u5c3a\u5bf8\u5c0f\u4e8e10nm\u7684\u8d85\u5c0f\u578b\u5316\u6280\u672f\uff0c\u52a8\u6001\u968f\u673a\u5b58\u53d6\u5b58\u50a8\u5668\uff08DRAM\uff09\u7684\u7535\u5bb9\u7eb5\u6a2a\u6bd4\u503c\u5e94\u4fdd\u6301100\u4ee5\u4e0a\u3002\u540c\u6837\uff0c3D NAND\u95ea\u5b58\u4e5f\u9700\u8981\u66f4\u9ad8\u7684\u7eb5\u6a2a\u6bd4\u503c\u6765\u5806\u53e0256\u5c42\u6216\u66f4\u591a\u7684\u5355\u5143\u5806\u53e0\u5c42\u3002\u5373\u4fbf\u6ee1\u8db3\u5176\u4ed6\u5de5\u827a\u6240\u9700\u7684\u6761\u4ef6\uff0c\u523b\u8680\u5de5\u827a\u4e0d\u8fbe\u6807\uff0c\u4e5f\u65e0\u6cd5\u751f\u4ea7\u51fa\u6240\u9700\u7684\u4ea7\u54c1\u3002\u8fd9\u5c31\u662f\u4e3a\u4ec0\u4e48\u523b\u8680\u6280\u672f\u8d8a\u6765\u8d8a\u91cd\u8981\u7684\u539f\u56e0\u3002<\/p>\n

\u00a0<\/p>\n

\n
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2.\u7b49\u79bb\u5b50\u523b\u8680\u6982\u8ff0<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

\"\"<\/p>\n

\u25b2 \u56fe2. \u6839\u636e\u8584\u819c\u7c7b\u578b\u786e\u5b9a\u7b49\u79bb\u5b50\u4f53\u6e90\u6c14\u4f53<\/p>\n

\u5f53\u91c7\u7528\u4e2d\u7a7a\u7ba1\u9053\u65f6\uff0c\u7ba1\u9053\u76f4\u5f84\u8d8a\u7a84\uff0c\u6db2\u4f53\u8d8a\u5bb9\u6613\u8fdb\u5165\uff0c\u5373\u6240\u8c13\u6bdb\u7ec6\u73b0\u8c61\u3002\u7136\u800c\uff0c\u5982\u679c\u8981\u5728\u66b4\u9732\u533a\u57df\u94bb\u5b54\uff08\u95ed\u7aef\uff09\uff0c\u6db2\u4f53\u7684\u8f93\u5165\u5c31\u4f1a\u53d8\u5f97\u76f8\u5f53\u56f0\u96be\u3002\u56e0\u6b64\uff0c\u81ea70\u5e74\u4ee3\u4e2d\u671f\u7535\u8def\u5173\u952e\u5c3a\u5bf8\u4e3a3\u81f35\u339b\u4ee5\u6765\uff0c\u5e72\u6cd5\u523b\u8680\u9010\u6e10\u53d6\u4ee3\u6e7f\u6cd5\u523b\u8680\u6210\u4e3a\u4e3b\u6d41\u3002\u4e5f\u5c31\u662f\u8bf4\uff0c\u867d\u7136\u7ecf\u8fc7\u7535\u79bb\uff0c\u4f46\u7531\u4e8e\u5355\u4e2a\u5206\u5b50\u7684\u4f53\u79ef\u5c0f\u4e8e\u6709\u673a\u805a\u5408\u6eb6\u6db2\u5206\u5b50\u7684\u4f53\u79ef\uff0c\u6240\u4ee5\u66f4\u5bb9\u6613\u7a7f\u900f\u6df1\u5b54\u3002<\/p>\n

\u5728\u7b49\u79bb\u5b50\u4f53\u523b\u8680\u8fc7\u7a0b\u4e2d\uff0c\u5728\u6ce8\u5165\u9002\u5408\u4e8e\u76f8\u5173\u5c42\u7684\u7b49\u79bb\u5b50\u4f53\u6e90\u6c14\u4f53\u4e4b\u524d\uff0c\u5e94\u5148\u5c06\u7528\u4e8e\u8fdb\u884c\u523b\u8680\u7684\u5904\u7406\u5ba4\u5185\u90e8\u8c03\u6574\u6210\u771f\u7a7a\u72b6\u6001\u3002\u5f53\u523b\u8680\u56fa\u4f53\u6c27\u5316\u7269\u819c\u65f6\uff0c\u5e94\u4f7f\u7528\u8f83\u5f3a\u7684\u78b3\u6c1f\u57fa\u6e90\u6c14\u4f53\u3002\u5bf9\u4e8e\u76f8\u5bf9\u8f83\u5f31\u7684\u7845\u6216\u91d1\u5c5e\u819c\uff0c\u5219\u5e94\u4f7f\u7528\u6c2f\u57fa\u7b49\u79bb\u5b50\u4f53\u6e90\u6c14\u4f53\u3002<\/p>\n

\u90a3\u4e48\uff0c\u6805\u6781\u5c42\u548c\u5e95\u5c42\u4e8c\u6c27\u5316\u7845\uff08SiO2\uff09\u7edd\u7f18\u5c42\u5e94\u8be5\u5982\u4f55\u523b\u8680\u5462\uff1f<\/p>\n

\u9996\u5148\uff0c\u5bf9\u4e8e\u6805\u6781\u5c42\uff0c\u5e94\u5229\u7528\u5e26\u6709\u591a\u6676\u7845\u523b\u8680\u9009\u62e9\u6027\u7684\u6c2f\u57fa\u7b49\u79bb\u5b50\u4f53\uff08\u7845\uff0b\u6c2f\u6c14\uff09\u53bb\u9664\u7845\u3002\u5bf9\u4e8e\u5e95\u90e8\u7edd\u7f18\u5c42\uff0c\u5e94\u4f7f\u7528\u5177\u6709\u523b\u8680\u9009\u62e9\u6027\u548c\u6548\u529b\u66f4\u5f3a\u7684\u78b3\u6c1f\u57fa\u7b49\u79bb\u5b50\u4f53\u6e90\u6c14\uff08\u4e8c\u6c27\u5316\u7845\uff0b\u56db\u6c1f\u5316\u78b3\uff09\u5206\u4e24\u6b65\u5bf9\u4e8c\u6c27\u5316\u7845\u819c\u8fdb\u884c\u523b\u8680\u3002<\/p>\n

\u00a0<\/p>\n

\n
\n
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3.\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08RIE\u6216\u7269\u7406\u5316\u5b66\u523b\u8680\uff09\u5de5\u827a<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

\"\"<\/p>\n

\u25b2 \u56fe3. \u53cd\u5e94\u79bb\u5b50\u523b\u8680\u6cd5\u7684\u4f18\u52bf\uff08\u5404\u5411\u5f02\u6027\u548c\u9ad8\u523b\u8680\u901f\u7387\uff09<\/p>\n

\u7b49\u79bb\u5b50\u4f53\u540c\u65f6\u5305\u542b\u5404\u5411\u540c\u6027\u7684\u81ea\u7531\u57fa\u548c\u5404\u5411\u5f02\u6027\u7684\u9633\u79bb\u5b50\uff0c\u90a3\u4e48\u5b83\u662f\u5982\u4f55\u8fdb\u884c\u5404\u5411\u5f02\u6027\u523b\u8680\u5462\uff1f<\/p>\n

\u7b49\u79bb\u5b50\u4f53\u5e72\u6cd5\u523b\u8680\u4e3b\u8981\u901a\u8fc7\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08RIE\uff0cReactive Ion Etching\uff09\u6216\u57fa\u4e8e\u8be5\u65b9\u6cd5\u7684\u5e94\u7528\u8fdb\u884c\u3002RIE\u65b9\u5f0f\u7684\u6838\u5fc3\u662f\u901a\u8fc7\u5229\u7528\u5404\u5411\u5f02\u6027\u9633\u79bb\u5b50\u653b\u51fb\u523b\u8680\u533a\u57df\uff0c\u4ece\u800c\u5f31\u5316\u8584\u819c\u4e2d\u76ee\u6807\u5206\u5b50\u4e4b\u95f4\u7684\u7ed3\u5408\u529b\u3002\u5f31\u5316\u7684\u533a\u57df\u88ab\u81ea\u7531\u57fa\u5438\u6536\uff0c\u4e0e\u6784\u6210\u8be5\u5c42\u7684\u7c92\u5b50\u7ed3\u5408\uff0c\u8f6c\u5316\u4e3a\u6c14\u4f53\uff08\u4e00\u79cd\u6325\u53d1\u6027\u5316\u5408\u7269\uff09\u5e76\u91ca\u653e\u51fa\u6765\u3002<\/p>\n

\u867d\u7136\u81ea\u7531\u57fa\u5177\u6709\u5404\u5411\u540c\u6027\u7684\u7279\u5f81\uff0c\u4f46\u4e0e\u5177\u6709\u5f3a\u5927\u7ed3\u5408\u529b\u7684\u4fa7\u58c1\u76f8\u6bd4\uff0c\u6784\u6210\u5e95\u5c42\u8868\u9762\u7684\u5206\u5b50\uff08\u5176\u7ed3\u5408\u529b\u56e0\u9633\u79bb\u5b50\u7684\u653b\u51fb\u800c\u51cf\u5f31\uff09\u66f4\u5bb9\u6613\u88ab\u81ea\u7531\u57fa\u6355\u83b7\u5e76\u8f6c\u5316\u4e3a\u65b0\u7684\u5316\u5408\u7269\u3002\u56e0\u6b64\u5411\u4e0b\u523b\u8680\u6210\u4e3a\u4e3b\u6d41\u3002\u88ab\u6355\u83b7\u7684\u7c92\u5b50\u53d8\u6210\u5e26\u6709\u81ea\u7531\u57fa\u7684\u6c14\u4f53\uff0c\u5728\u771f\u7a7a\u7684\u4f5c\u7528\u4e0b\u4ece\u8868\u9762\u89e3\u5438\u5e76\u91ca\u653e\u51fa\u6765\u3002<\/p>\n

\u6b64\u65f6\uff0c\u5c06\u901a\u8fc7\u7269\u7406\u4f5c\u7528\u5f97\u5230\u7684\u9633\u79bb\u5b50\u548c\u5316\u5b66\u4f5c\u7528\u5f97\u5230\u7684\u81ea\u7531\u57fa\u7ed3\u5408\u8fdb\u884c\u7269\u7406\u5316\u5b66\u523b\u8680\uff0c\u4e0e\u5355\u72ec\u8fdb\u884c\u9633\u79bb\u5b50\u523b\u8680\u6216\u81ea\u7531\u57fa\u523b\u8680\u7684\u60c5\u51b5\u76f8\u6bd4\uff0c\u523b\u8680\u901f\u7387\uff08Etch Rate\uff0c\u4e00\u5b9a\u65f6\u95f4\u5185\u523b\u8680\u7a0b\u5ea6\uff09\u589e\u52a0\u4e8610\u500d\u3002\u8fd9\u79cd\u65b9\u6cd5\u4e0d\u4f46\u80fd\u591f\u589e\u52a0\u5404\u5411\u5f02\u6027\u5411\u4e0b\u523b\u8680\u7684\u523b\u8680\u901f\u7387\uff0c\u540c\u65f6\u4e5f\u80fd\u591f\u89e3\u51b3\u523b\u8680\u540e\u805a\u5408\u7269\u6b8b\u7559\u7684\u95ee\u9898\u3002\u8fd9\u79cd\u65b9\u6cd5\u88ab\u79f0\u4e3a\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08RIE\uff09\u6cd5\u3002RIE\u523b\u8680\u6cd5\u6210\u529f\u7684\u5173\u952e\u662f\u627e\u5230\u9002\u5408\u4e8e\u523b\u8680\u819c\u7684\u7b49\u79bb\u5b50\u6e90\u6c14\u4f53\u3002\u6ce8\u610f\uff1a\u7b49\u79bb\u5b50\u4f53\u523b\u8680\u5373RIE\u523b\u8680\uff0c\u4e24\u8005\u53ef\u89c6\u4e3a\u540c\u4e00\u6982\u5ff5\u3002<\/p>\n

\u00a0<\/p>\n

\n
\n
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4.\u523b\u8680\u901f\u7387\uff08Etch Rate\uff09\u548c\u6838\u5fc3\u6027\u80fd\u6307\u6570<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

\"\"<\/p>\n

\u25b2 \u56fe4. \u4e0e\u523b\u8680\u901f\u7387\u76f8\u5173\u7684\u6838\u5fc3\u523b\u8680\u6027\u80fd\u6307\u6570<\/p>\n

\u523b\u8680\u901f\u7387\u662f\u6307\u523b\u8680\u8584\u819c\u4e00\u5206\u949f\u5e0c\u671b\u8fbe\u5230\u7684\u523b\u8680\u6df1\u5ea6\u3002\u90a3\u4e48\uff0c\u5355\u4e2a\u6676\u5706\u4e0a\u5404\u4e2a\u90e8\u5206\u7684\u523b\u8680\u901f\u7387\u4e92\u4e0d\u76f8\u540c\u53c8\u610f\u5473\u7740\u4ec0\u4e48\u5462\uff1f<\/p>\n

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\u00a0<\/p>\n

\n
\n
<\/div>\n

5.\u523b\u8680\u8fc7\u7a0b<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

\"\"<\/p>\n

\u25b2 \u56fe5. \u523b\u8680\u8fc7\u7a0b<\/p>\n

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\n

\"\"<\/p>\n

\n

\u9648\u953a\u6587<\/strong>\u534a\u5bfc\u4f53\u4e13\u680f\u4f5c\u5bb6<\/p>\n

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