{"id":2014,"date":"2021-05-18T00:00:43","date_gmt":"2021-05-18T00:00:43","guid":{"rendered":"http:\/\/localhost:8080\/etching-process-to-complete-semiconductor-patterning-1\/"},"modified":"2026-07-18T00:39:28","modified_gmt":"2026-07-17T16:39:28","slug":"etching-process-to-complete-semiconductor-patterning-1","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/etching-process-to-complete-semiconductor-patterning-1\/","title":{"rendered":"\u534a\u5bfc\u4f53\u56fe\u6848\u5316\u5de5\u827a\u6d41\u7a0b\u4e4b\u523b\u8680\uff08\u4e00\uff09"},"content":{"rendered":"

\u56fe\u6848\u5316\u5de5\u827a\u5305\u62ec\u66dd\u5149(Exposure)\u3001\u663e\u5f71(Develope)\u3001\u523b\u8680(Etching)\u548c\u79bb\u5b50\u6ce8\u5165\u7b49\u6d41\u7a0b\u3002\u5176\u4e2d\uff0c\u523b\u8680\u5de5\u827a\u662f\u5149\u523b\uff08Photo\uff09\u5de5\u827a\u7684\u4e0b\u4e00\u6b65\uff0c\u7528\u4e8e\u53bb\u9664\u5149\u523b\u80f6\uff08Photo Resist\uff0cPR\uff09\u672a\u8986\u76d6\u7684\u5e95\u90e8\u533a\u57df\uff0c\u4ec5\u7559\u4e0b\u6240\u9700\u7684\u56fe\u6848\u3002\u8fd9\u4e00\u5de5\u827a\u6d41\u7a0b\u65e8\u5728\u5c06\u63a9\u6a21\uff08Mask\uff09\u56fe\u6848\u56fa\u5b9a\u5230\u6d82\u6709\u5149\u523b\u80f6\u7684\u6676\u5706\u4e0a\uff08\u66dd\u5149\u2192\u663e\u5f71\uff09\u5e76\u5c06\u5149\u523b\u80f6\u56fe\u6848\u8f6c\u5370\u56de\u5149\u523b\u80f6\u4e0b\u65b9\u819c\u5c42\u3002\u968f\u7740\u7535\u8def\u7684\u5173\u952e\u5c3a\u5bf8\uff08Critical Dimension, CD\uff09\u5c0f\u578b\u5316\uff082D\u89c6\u89d2\uff09\uff0c\u523b\u8680\u5de5\u827a\u4ece\u6e7f\u6cd5\u523b\u8680\u8f6c\u4e3a\u5e72\u6cd5\u523b\u8680\uff0c\u56e0\u6b64\u6240\u9700\u7684\u8bbe\u5907\u548c\u5de5\u827a\u66f4\u52a0\u590d\u6742\u3002\u7531\u4e8e\u79ef\u6781\u91c7\u75283D\u5355\u5143\u5806\u53e0\u65b9\u6cd5\uff0c\u523b\u8680\u5de5\u827a\u7684\u6838\u5fc3\u6027\u80fd\u6307\u6570\u51fa\u73b0\u6ce2\u52a8\uff0c\u4ece\u800c\u523b\u8680\u5de5\u827a\u4e0e\u5149\u523b\u5de5\u827a\u6210\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u91cd\u8981\u5de5\u827a\u6d41\u7a0b\u4e4b\u4e00\u3002<\/p>\n

\u00a0<\/p>\n

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1.\u6c89\u79ef\u548c\u523b\u8680\u6280\u672f\u7684\u53d1\u5c55\u8d8b\u52bf<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

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\u25b2 \u56fe1. \u6c89\u79ef\u548c\u523b\u8680\u6280\u672f\u53d1\u5c55\u8d8b\u52bf<\/p>\n

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\u81ea\u4ece\u534a\u5bfc\u4f53\u51fa\u73b0\u4ee5\u6765\uff0c\u523b\u8680\u548c\u6c89\u79ef\u6280\u672f\u90fd\u6709\u4e86\u663e\u8457\u53d1\u5c55\u3002\u800c\u6c89\u79ef\u6280\u672f\u6700\u5f15\u4eba\u6ce8\u76ee\u7684\u521b\u65b0\u662f\u4ece\u6c9f\u69fd\u6cd5\uff08Trench\uff09\u8f6c\u5411\u5806\u53e0\u6cd5\uff08Stack\uff09\uff0c\u8fd9\u4e0e20\u4e16\u7eaa90\u5e74\u4ee3\u521d\u88c5\u7f6e\u5bb9\u91cf\u4ece1\u5146\u4f4d\uff08Mb\uff09DRAM\u53d1\u5c55\u62104\u5146\u4f4d\uff08Mb\uff09DRAM\u76f8\u5951\u5408\u3002\u523b\u8680\u6280\u672f\u7684\u4e00\u4e2a\u5173\u952e\u8282\u70b9\u662f\u57282010\u5e74\u4ee3\u521d\uff0c\u5f53\u65f63D NAND\u95ea\u5b58\u5355\u5143\u5806\u53e0\u5c42\u6570\u8d85\u8fc7\u4e8624\u5c42\u3002\u968f\u7740\u5806\u53e0\u5c42\u6570\u589e\u52a0\u5230128\u5c42\u3001256\u5c42\u548c512\u5c42\uff0c\u523b\u8680\u5de5\u827a\u5df2\u6210\u4e3a\u6280\u672f\u96be\u5ea6\u6700\u5927\u7684\u5de5\u827a\u4e4b\u4e00\u3002<\/p>\n

\u00a0<\/p>\n

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2.\u523b\u8680\u65b9\u6cd5\u7684\u53d8\u5316<\/h3>\n
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\"\"<\/p>\n

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\u00a0<\/p>\n

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3.\u6e7f\u6cd5\u523b\u8680\u548c\u5e72\u6cd5\u523b\u8680\u7684\u4f18\u7f3a\u70b9<\/h3>\n
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\u25b2 \u56fe3. \u6e7f\u6cd5\u523b\u8680\u548c\u5e72\u6cd5\u523b\u8680\u7684\u4f18\u7f3a\u70b9<\/p>\n

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\u00a0<\/p>\n

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4.\u523b\u8680\u5de5\u827a\u6d41\u7a0b\u53ca\u76f8\u5173\u95ee\u9898<\/h3>\n
<\/div>\n<\/div>\n<\/div>\n

\"\"<\/p>\n

\u25b2 \u56fe4. \u523b\u8680\u76f8\u5173\u5de5\u827a\u6d41\u7a0b<\/p>\n

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\u56e0\u6b64\uff0c\u5728\u5e72\u523b\u8680\u5de5\u827a\u4e2d\u7cbe\u51c6\u63a7\u5236\u7ec8\u70b9\uff08EOP\uff1aEnd of Point\uff09\u81f3\u5173\u91cd\u8981\u3002\u5f7b\u5e95\u68c0\u67e5\u523b\u8680\u6761\u4ef6\u4ee5\u53ca\u7070\u5316\u548c\u6e05\u6d01\u8fc7\u7a0b\u4e5f\u975e\u5e38\u91cd\u8981\u3002\u5982\u679c\u6676\u5706\u523b\u8680\u4e0d\u5747\u5300\uff0c\u5219\u6676\u5706\u53ef\u80fd\u906d\u5230\u9000\u8d27\uff0c\u800c\u4e14\u523b\u8680\u4e0d\u8db3\u6bd4\u8fc7\u5ea6\u523b\u8680\u66f4\u4e3a\u81f4\u547d\u3002<\/p>\n

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\n

\"\"<\/p>\n

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