{"id":2272,"date":"2021-01-28T10:00:57","date_gmt":"2021-01-28T10:00:57","guid":{"rendered":"http:\/\/localhost:8080\/singulation-the-moment-when-a-wafer-is-separated-into-multiple-semiconductor-chips\/"},"modified":"2026-06-17T21:15:08","modified_gmt":"2026-06-17T21:15:08","slug":"singulation-the-moment-when-a-wafer-is-separated-into-multiple-semiconductor-chips","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/singulation-the-moment-when-a-wafer-is-separated-into-multiple-semiconductor-chips\/","title":{"rendered":"\u5207\u5355\uff08Singulation\uff09\uff0c\u4e00\u4e2a\u6676\u5706\u88ab\u5206\u5272\u6210 \u591a\u4e2a\u534a\u5bfc\u4f53\u82af\u7247\u7684\u5de5\u827a"},"content":{"rendered":"<p>\u4e00\u4e2a\u6676\u5706\u8981\u7ecf\u5386\u4e09\u6b21\u7684\u53d8\u5316\u8fc7\u7a0b\uff0c\u624d\u80fd\u6210\u4e3a\u4e00\u4e2a\u771f\u6b63\u7684\u534a\u5bfc\u4f53\u82af\u7247\uff1a\u9996\u5148\uff0c\u662f\u5c06\u5757\u513f\u72b6\u7684\u94f8\u952d\u5207\u6210\u6676\u5706\uff1b\u5728\u7b2c\u4e8c\u9053\u5de5\u5e8f\u4e2d\uff0c\u901a\u8fc7\u524d\u9053\u5de5\u5e8f\u8981\u5728\u6676\u5706\u7684\u6b63\u9762\u96d5\u523b\u6676\u4f53\u7ba1\uff1b\u6700\u540e\uff0c\u518d\u8fdb\u884c\u5c01\u88c5\uff0c\u5373\u901a\u8fc7\u5207\u5272\u8fc7\u7a0b\uff0c\u4f7f\u6676\u5706\u6210\u4e3a\u4e00\u4e2a\u5b8c\u6574\u7684\u534a\u5bfc\u4f53\u82af\u7247\u3002\u53ef\u89c1\uff0c\u5c01\u88c5\u5de5\u5e8f\u5c5e\u4e8e\u540e\u9053\u5de5\u5e8f\uff0c\u5728\u8fd9\u9053\u5de5\u5e8f\u4e2d\uff0c\u4f1a\u628a\u6676\u5706\u5207\u5272\u6210\u82e5\u5e72\u516d\u9762\u4f53\u5f62\u72b6\u7684\u5355\u4e2a\u82af\u7247\uff0c\u8fd9\u79cd\u5f97\u5230\u72ec\u7acb\u82af\u7247\u7684\u8fc7\u7a0b\u88ab\u79f0\u4f5c\u505a\u201c\u5207\u5355\uff08Singulaton\uff09\u201d,\u800c\u628a\u6676\u5706\u677f\u952f\u5207\u6210\u72ec\u7acb\u957f\u65b9\u4f53\u7684\u8fc7\u7a0b\u5219\u53eb\u505a\u201c\u6676\u7247\u5207\u5272(Die Sawing)\u201d\u3002\u8fd1\u6765\uff0c\u968f\u7740\u534a\u5bfc\u4f53\u96c6\u6210\u5ea6\u7684\u63d0\u9ad8\uff0c\u6676\u5706\u539a\u5ea6\u53d8\u5f97\u8d8a\u6765\u8d8a\u8584\uff0c\u8fd9\u5f53\u7136\u7ed9\u201c\u5207\u5355\u201d\u5de5\u827a\u4e5f\u5e26\u6765\u4e86\u4e0d\u5c11\u96be\u5ea6\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u4e00\u3001\u6676\u5706\u5207\u5272(Wafer Dicing)\u7684\u53d1\u5c55\u5386\u7a0b<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p><img decoding=\"async\" class=\"size-full wp-image-4330 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29181207\/Figure1-Change_of_the_dicing_method_for_separating_into_individual_chips.png\" alt=\"\" width=\"800\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe1. \u6676\u5706\u5207\u5272\u65b9\u6cd5\u7684\u53d1\u5c55\u5386\u7a0b\uff08\u5207\u5355\uff09<\/p>\n<p>\u00a0<\/p>\n<p>\u524d\u9053\u548c\u540e\u9053\u5de5\u5e8f\u901a\u8fc7\u5404\u79cd\u4e0d\u540c\u65b9\u5f0f\u7684\u4e92\u52a8\u800c\u8fdb\u4e00\u6b65\u53d1\u5c55\uff1a\u540e\u9053\u5de5\u5e8f\u7684\u8fdb\u5316\u53ef\u4ee5\u51b3\u5b9a\u6676\u5706\u4e0adie\u5355\u72ec\u5206\u79bb\u51fa\u7684\u516d\u9762\u4f53\u5c0f\u82af\u7247\uff09\u7684\u7ed3\u6784\u548c\u4f4d\u7f6e\uff0c\u4ee5\u53ca\u6676\u7247\u4e0a\u710a\u76d8\uff08\u7535\u8fde\u63a5\u8def\u5f84\uff09\u7684\u7ed3\u6784\u548c\u4f4d\u7f6e\uff1b\u4e0e\u4e4b\u76f8\u53cd\uff0c\u524d\u7aef\u5de5\u827a\u7684\u8fdb\u5316\u5219\u6539\u53d8\u4e86\u540e\u7aef\u5de5\u827a\u4e2d\u7684\u6676\u5706\u80cc\u9762\u51cf\u8584\u548c\u201c\u6676\u7247\u5207\u5272(Die Sawing)\u201d\u6676\u5706\u7684\u6d41\u7a0b\u548c\u65b9\u6cd5\u3002\u56e0\u6b64\uff0c\u5c01\u88c5\u7684\u5916\u89c2\u65e5\u76ca\u53d8\u5f97\u7cbe\u5de7\uff0c\u4f1a\u5bf9\u540e\u7aef\u5de5\u827a\u5e26\u6765\u5f88\u5927\u7684\u5f71\u54cd\u3002\u800c\u4e14\uff0c\u6839\u636e\u5305\u88c5\u5916\u89c2\u7684\u53d8\u5316\uff0c\u5207\u5272\u6b21\u6570\u3001\u7a0b\u5e8f\u548c\u7c7b\u578b\u4e5f\u4f1a\u53d1\u751f\u76f8\u5e94\u7684\u53d8\u5316\u3002<a href=\"https:\/\/news.skhynix.com.cn\/light-thin-short-and-small-the-development-of-semiconductor-packages\/\" target=\"_blank\" rel=\"noopener\">&gt; \u8bf7\u53c2\u89c1\u201c\u8f7b\u3001\u8584\u3001\u77ed\u3001\u5c0f\u201d\uff0c\u534a\u5bfc\u4f53\u5c01\u88c5\u7684\u6f14\u53d8\uff08\u201cLight, Thin, Short and Small\u201d, The Development of Semiconductor Packages\uff09<\/a>\u3002\u90a3\u4e48\uff0c\u73b0\u5728\u5c31\u8ba9\u6211\u4eec\u4e00\u8d77\u901a\u8fc7\u82af\u7247\u201c\u5207\u5355\u201d\u7684\u6f14\u5316\u8fc7\u7a0b\uff0c\u6765\u770b\u770b\u4e94\u79cd\u5207\u5272\u65b9\u6cd5\u5427\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u4e8c\u3001\u5212\u7247\u5207\u5272\uff08Scribe Dicing\uff09<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p><img decoding=\"async\" class=\"size-full wp-image-4330 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29181210\/Figure2-Scribe_dicing_method_in_the_early_period.png\" alt=\"\" width=\"800\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe2. \u65e9\u671f\u7684\u5212\u7247\u5207\u5272\u6cd5\uff1a\u5212\u7247\u540e\u8fdb\u884c\u7269\u7406\u4e0a\u7684\u5206\u5272\uff08Breaking\uff09@\u76f4\u5f84\u4e3a6\u82f1\u5bf8\u4ee5\u4e0b\u7684\u7684\u6676\u5706<\/p>\n<p>\u65e9\u671f\uff0c\u901a\u8fc7\u65bd\u52a0\u5916\u529b\u5207\u5272\u7684\u201c\u63b0\u5f00\uff08Breaking\uff09\u201d\u662f\u552f\u4e00\u53ef\u4ee5\u628a\u6676\u5706\u5206\u5272\u6210\u516d\u9762\u5f62\u7684Die\u7684\u5207\u5272\u6cd5\u3002\u7136\u800c\uff0c\u8fd9\u79cd\u65b9\u6cd5\u5374\u5b58\u5c0f\u82af\u7247\u8fb9\u7f18\u5265\u843d\uff08Chipping\uff09\u6216\u4ea7\u751f\u88c2\u7eb9\u7b49\u5f0a\u7aef\u3002\u800c\u4e14\uff0c\u7531\u4e8e\u6ca1\u6709\u5b8c\u5168\u53bb\u9664\u91d1\u5c5e\u8868\u9762\u7684\u6bdb\u523a\uff08Burr\uff1a\u5207\u5272\u65f6\u4ea7\u751f\u7684\u4e00\u4e9b\u6b8b\u6e23\uff09\uff0c\u6240\u4ee5\u5207\u5272\u8868\u9762\u4e5f\u975e\u5e38\u7c97\u7cd9\u3002<\/p>\n<p>\u4e3a\u4e86\u89e3\u51b3\u8fd9\u4e00\u95ee\u9898\uff0c\u201c\u5212\u7247\uff08Scribing\uff09\u201d\u5207\u5272\u6cd5\u5e94\u8fd0\u800c\u751f\uff0c\u5373\u5728\u201c\u63b0\u5f00\uff08Breaking\uff09\u201d\u524d\uff0c\u5c06\u6676\u5706\u8868\u9762\u5207\u5272\u81f3\u5927\u7ea6\u4e00\u534a\u7684\u6df1\u5ea6\u3002\u201c\u5212\u7247\u201d\uff0c\u987e\u540d\u601d\u4e49\uff0c\u662f\u6307\u4f7f\u7528\u53f6\u8f6e\u5728\u6676\u5706\u7684\u6b63\u9762\u4e8b\u5148\u952f\u5207\uff08\u534a\u5207\uff09\u3002\u65e9\u671f\uff0c6\u82f1\u5bf8\u4ee5\u4e0b\u7684\u6676\u5706\u5927\u90e8\u5206\u90fd\u4f7f\u7528\u4e86\u8fd9\u79cd\u73b0\u5728\u82af\u7247\u4e4b\u95f4\u5148\u201c\u5212\u7247\u201d\uff0c\u518d\u201c\u63b0\u5f00\uff08Breaking\uff09\u201d\u7684\u5207\u5272\u6cd5\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u4e09\u3001\u5200\u7247\u5207\u5272 (\u6216\u952f\u5207) (Blade Dicing or Blade Sawing)<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p><img decoding=\"async\" class=\"size-full wp-image-4330 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29181213\/Figure3-1_Blade_dicing_method.png\" alt=\"\" width=\"800\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe3-1. \u5200\u7247\u5207\u5272\uff08\u952f\u5207\uff09\u65b9\u6cd5@\u4f20\u7edf\u65b9\u6cd5<\/p>\n<p>\u201c\u5212\u7247\u201d\u5207\u5272\u6cd5\u9010\u6e10\u53d1\u5c55\u6210\u4e3a\u201c\u5200\u7247\uff08Blade dicing\uff09\u201d\u5207\u5272\uff08\u6216\u952f\u5207\uff09\u6cd5\uff0c\u5373\u8fde\u7eed\u4f7f\u7528\u5200\u7247\u4e24\u5230\u4e09\u6b21\u8fdb\u884c\u5207\u5272\u7684\u65b9\u6cd5\u3002\u201c\u5200\u7247\u201d\u5207\u5272\u6cd5\u53ef\u4ee5\u5f25\u8865\u201c\u5212\u7247\u201d\u540e\u201c\u63b0\u5f00\uff08Breaking\uff09\u201d\u65f6\uff0c\u5c0f\u82af\u7247\u5265\u843d\u7684\u73b0\u8c61\uff0c\u53ef\u5728\u201c\u5207\u5355\uff08Singulation\uff09\u201d\u8fc7\u7a0b\u4e2d\u8d77\u5230\u4fdd\u62a4\u5c0f\u82af\u7247\u7684\u4f5c\u7528\u3002\u201c\u5200\u7247\u201d\u5207\u5272\u4e0e\u4e4b\u524d\u7684\u201c\u5212\u7247\u201d\u5207\u5272\u6709\u6240\u4e0d\u540c\uff0c\u5373\u8fdb\u884c\u5b8c\u4e00\u6b21\u201c\u5200\u7247\u201d\u5207\u5272\u540e\uff0c\u4e0d\u662f\u201c\u63b0\u5f00\uff08Breaking\uff09\u201d\uff0c\u800c\u662f\u518d\u6b21\u7528\u5200\u7247\u5207\u5272\u3002\u6240\u4ee5\uff0c\u4e5f\u628a\u5b83\u79f0\u4e3a\u201c\u5206\u6b65\u5207\u5272\uff08Step Dicing\uff09\u201d\u6cd5\u3002<\/p>\n<p><img decoding=\"async\" class=\"size-full wp-image-4330 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29181215\/Figure3-2_Attachment_and_dettachment_of_film_during_blade_dicing.png\" alt=\"\" width=\"800\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe3-2. \u5200\u7247\u5207\u5272\uff08\u952f\u5207\uff09\u8fc7\u7a0b\u4e2d\uff0c\u4fdd\u62a4\u819c\u7684\u9644\u7740\u4e0e\u6458\u9664<\/p>\n<p>\u4e3a\u4e86\u4fdd\u62a4\u6676\u5706\u5728\u5207\u5272\u8fc7\u7a0b\u4e2d\u514d\u53d7\u5916\u90e8\u635f\u4f24\uff0c\u4e8b\u5148\u4f1a\u5728\u6676\u5706\u4e0a\u8d34\u6577\u80f6\u819c\uff0c\u4ee5\u4fbf\u4fdd\u8bc1\u66f4\u5b89\u5168\u7684\u201c\u5207\u5355\u201d\u3002\u201c\u80cc\u9762\u51cf\u8584\uff08Back Grinding\uff09\u201d\u8fc7\u7a0b\u4e2d\uff0c\u80f6\u819c\u4f1a\u8d34\u5728\u6676\u5706\u7684\u6b63\u9762\u3002\u4f46\u4e0e\u6b64\u76f8\u53cd\uff0c\u5728\u201c\u5200\u7247\u201d\u5207\u5272\u4e2d\uff0c\u80f6\u819c\u8981\u8d34\u5728\u6676\u5706\u7684\u80cc\u9762\u3002<a style=\"text-decoration: underline;\" href=\"https:\/\/news.skhynix.com.cn\/back-grinding-determines-the-thickness-of-a-wafer\/\" target=\"_blank\" rel=\"noopener noreferrer\">&gt; \u8bf7\u53c2\u9605&lt;\u80cc\u9762\u51cf\u8584\u51b3\u5b9a\u6676\u5706\u7684\u539a\u5ea6\uff08Back graining Determines the Thickness of a Wafer Back&gt;<\/a> \u800c\u5728\u5171\u6676\u8d34\u7247\uff08Die Bonding\uff0c\u628a\u5206\u79bb\u7684\u82af\u7247\u56fa\u5b9a\u5728PCB\u6216\u5b9a\u67b6\u4e0a\uff09\u8fc7\u7a0b\u4e2d\uff0c\u8d34\u4f1a\u80cc\u9762\u7684\u8fd9\u4e00\u80f6\u819c\u4f1a\u81ea\u52a8\u8131\u843d\u3002\u5207\u5272\u65f6\u7531\u4e8e\u6469\u64e6\u5f88\u5927\uff0c\u6240\u4ee5\u8981\u4ece\u5404\u4e2a\u65b9\u5411\u8fde\u7eed\u55b7\u6d12DI\u6c34\u3002\u800c\u4e14\uff0c\u53f6\u8f6e\u8981\u9644\u6709\u91d1\u521a\u77f3\u9897\u7c92\uff0c\u8fd9\u6837\u624d\u53ef\u4ee5\u66f4\u597d\u5730\u5207\u7247\u3002\u6b64\u65f6\uff0c\u5207\u53e3\uff08\u5200\u7247\u539a\u5ea6\uff1a\u51f9\u69fd\u7684\u5bbd\u5ea6\uff09\u5fc5\u987b\u5747\u5300\uff0c\u4e0d\u5f97\u8d85\u8fc7\u5212\u7247\u69fd\u7684\u5bbd\u5ea6\u3002<\/p>\n<p>\u5f88\u957f\u4e00\u6bb5\u65f6\u95f4\uff0c\u952f\u5207\u4e00\u76f4\u662f\u88ab\u6700\u5e7f\u6cdb\u4f7f\u7528\u7684\u4f20\u7edf\u7684\u5207\u5272\u65b9\u6cd5\uff0c\u5176\u6700\u5927\u7684\u4f18\u70b9\u5c31\u662f\u53ef\u4ee5\u5728\u77ed\u65f6\u95f4\u5185\u5207\u5272\u5927\u91cf\u7684\u6676\u5706\u3002\u7136\u800c\uff0c\u5982\u679c\u5207\u7247\u7684\u8fdb\u7ed9\u901f\u5ea6\uff08Feeding Speed\uff09\u5927\u5e45\u63d0\u9ad8\uff0c\u5c0f\u82af\u7247\u8fb9\u7f18\u5265\u843d\u7684\u53ef\u80fd\u6027\u5c31\u4f1a\u53d8\u5927\u3002\u56e0\u6b64\uff0c\u5e94\u5c06\u53f6\u8f6e\u7684\u65cb\u8f6c\u6b21\u6570\u63a7\u5236\u5728\u6bcf\u5206\u949f30000\u6b21\u5de6\u53f3\u3002\u53ef\u89c1\uff0c\u534a\u5bfc\u4f53\u5de5\u827a\u7684\u6280\u672f\u5f80\u5f80\u662f\u901a\u8fc7\u5f88\u957f\u4e00\u6bb5\u65f6\u95f4\u7684\u79ef\u7d2f\u548c\u8bd5\u9519\uff0c\u6162\u6162\u79ef\u7d2f\u7684\u79d8\u8bc0\uff08\u5728\u4e0b\u4e00\u8282\u6709\u5173\u5171\u6676\u8d34\u7247\u7684\u5185\u5bb9\u4e0a\uff0c\u5c06\u8ba8\u8bba\u6709\u5173\u5207\u5272\u4e0eDAF\u7684\u5185\u5bb9\uff09\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u56db\u3001\u5148\u5207\u5272\u3001\u540e\u51cf\u8584 (DBG\uff0cDicing Before Grinding): \u5207\u5272\u987a\u5e8f\u6539\u53d8\u4e86\u65b9\u6cd5<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p><img decoding=\"async\" class=\"size-full wp-image-4330 aligncenter\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29181217\/Figure4-Existing_blading_dicing_method_and_dicing_before_grinding_method.png\" alt=\"\" width=\"800\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe4. \u73b0\u5b58\u7684\u5200\u7247\u5207\u5272&amp;DBG\uff08\u5148\u5207\u5272\uff0c\u540e\u51cf\u8584\uff09\u65b9\u6cd5<\/p>\n<p>\u5728\u76f4\u5f84\u4e3a8\u82f1\u5bf8\u6676\u5706\u4e0a\u8fdb\u884c\u5200\u7247\u5207\u5272\u65f6\uff0c\u4e0d\u7528\u62c5\u5fc3\u5c0f\u82af\u7247\u8fb9\u7f18\u5265\u843d\u6216\u88c2\u7eb9\u7b49\u73b0\u8c61\u3002\u4f46\u968f\u7740\u6676\u5706\u76f4\u5f84\u589e\u52a0\u81f321\u82f1\u5bf8\uff0c\u4e14\u539a\u5ea6\u53d8\u4e5f\u5f97\u6781\u8584\uff0c\u5265\u843d\u4e0e\u88c2\u7eb9\u73b0\u8c61\u53c8\u5f00\u59cb\u51fa\u73b0\u4e86\u3002\u4e3a\u4e86\u5927\u5e45\u51cf\u5c11\u5728\u5207\u5272\u8fc7\u7a0b\u4e2d\u5bf9\u6676\u5706\u7684\u7269\u7406\u51b2\u51fb\uff0c\u201c\u5148\u5207\u5272\u3001\u540e\u7814\u78e8\u201d\u7684DBG\u65b9\u6cd5\u53d6\u4ee3\u4e86\u4f20\u7edf\u7684\u5207\u5272\u987a\u5e8f\u3002 \u4e0e\u8fde\u7eed\u8fdb\u884c\u5207\u5272\u7684\u4f20\u7edf\u201c\u5200\u7247\u201d\u5207\u5272\u6cd5\u4e0d\u540c\uff0cDBG\u5148\u8fdb\u884c\u4e00\u6b21\u201c\u5200\u7247\u201d\u5207\u5272\u540e\uff0c\u5c31\u901a\u8fc7\u4e0d\u65ad\u7684\u80cc\u9762\u51cf\u8584\u4f7f\u6676\u5706\u539a\u5ea6\u9010\u6e10\u53d8\u8584\uff0c\u76f4\u5230\u82af\u7247\u5206\u88c2\u4e3a\u6b62\u3002\u53ef\u4ee5\u8bf4\uff0cDBG\u65f6\u4ee5\u5f80\u201c\u5200\u7247\u201d\u5207\u5272\u6cd5\u7684\u5347\u7ea7\u7248\uff0c\u56e0\u4e3a\u5b83\u53ef\u4ee5\u51cf\u5c11\u7b2c\u4e8c\u6b21\u5207\u5272\u5e26\u6765\u7684\u51b2\u51fb\uff0c\u6240\u4ee5\uff0cDBG\u65b9\u6cd5\u5728\u201c\u6676\u5706\u7ea7\u5c01\u88c5\u201d\u4e0a\u5f97\u5230\u4e86\u8fc5\u901f\u7684\u666e\u53ca\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u4e94\u3001\u6fc0\u5149\u5207\u5272(Laser Dicing)<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-4330\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29181219\/Figure5-Comparasion_of_conventional_laser_dicing_method_and_laser_stealth_dicing_method.png\" alt=\"\" width=\"800\" \/><\/p>\n<p class=\"caption\">\u25b2 \u56fe5. \u4f20\u7edf\u6fc0\u5149\u5207\u5272\uff08grooving\uff09&amp;\u6fc0\u5149\u9690\u5f62\u5207\u5272\uff08SD\uff09\u65b9\u6cd5\u7684\u6bd4\u8f83<\/p>\n<p>\u6676\u5706\u7ea7\u6676\u7247\u5c3a\u5bf8\u5c01\u88c5\uff08WLCSP\uff0cWafer Level Chip Scale Package\uff09\u5de5\u827a\u4e3b\u8981\u91c7\u7528\u6fc0\u5149\u5207\u5272\u6cd5\u3002\u91c7\u7528\u6fc0\u5149\u5207\u5272\u53ef\u4ee5\u51cf\u5c11\u5265\u843d\u548c\u88c2\u7eb9\u7b49\u73b0\u8c61\uff0c\u4ece\u800c\u83b7\u5f97\u66f4\u4f18\u8d28\u7684\u82af\u7247\uff0c\u4f46\u6676\u5706\u539a\u5ea6\u4e3a100\u03bcm\u4ee5\u4e0a\u65f6\uff0c\u751f\u4ea7\u7387\u5c06\u5927\u6253\u6298\u6263\u3002\u6240\u4ee5\uff0c\u591a\u7528\u5728\u539a\u5ea6\u4e0d\u5230100\u03bcm\uff08\u76f8\u5bf9\u8f83\u8584\uff09\u7684\u6676\u5706\u4e0a\u3002\u6fc0\u5149\u5207\u5272\u662f\u901a\u8fc7\u5728\u6676\u5706\u7684\u5212\u7247\u69fd\u4e0a\u65bd\u52a0\u9ad8\u80fd\u91cf\u7684\u6fc0\u5149\u6765\u5207\u5272\u7845\u3002\u4f46\u4f7f\u7528\u4f20\u7edf\u7684\u6fc0\u5149(Conventional Laser)\u5207\u5272\u6cd5\uff0c\u8981\u5728\u6676\u5706\u8868\u9762\u4e0a\u4e8b\u5148\u6d82\u5c42\u4fdd\u62a4\u819c\u3002\u56e0\u4e3a\uff0c\u5728\u6676\u5706\u8868\u9762\u52a0\u70ed\u6216\u7167\u5c04\u6fc0\u5149\u7b49\uff0c\u8fd9\u4e9b\u7269\u7406\u4e0a\u7684\u63a5\u89e6\u4f1a\u6676\u5706\u8868\u9762\u4f1a\u4ea7\u751f\u51f9\u69fd\uff0c\u800c\u4e14\u5207\u5272\u7684\u7845\u788e\u7247\u4e5f\u4f1a\u7c98\u9644\u5728\u8868\u9762\u4e0a\u3002\u53ef\u89c1\uff0c\u4f20\u7edf\u7684\u6fc0\u5149\u5207\u5272\u6cd5\u4e5f\u662f\u76f4\u63a5\u5207\u5272\u6676\u5706\u8868\u9762\uff0c\u5728\u8fd9\u4e00\u70b9\u4e0a\uff0c\u5b83\u4e0e\u201c\u5200\u7247\u201d\u5207\u5272\u6cd5\u6709\u76f8\u4f3c\u4e4b\u5904\u3002<\/p>\n<p>\u6fc0\u5149\u9690\u5f62\u5207\u5272\uff08SD, Stealth Dicing\uff09\u5219\u662f\u5148\u7528\u6fc0\u5149\u80fd\u91cf\u5207\u5272\u6676\u5706\u7684\u5185\u90e8\uff0c\u518d\u5411\u8d34\u9644\u5728\u80cc\u9762\u7684\u80f6\u5e26\u65bd\u52a0\u5916\u90e8\u538b\u529b\uff0c\u4f7f\u5176\u65ad\u88c2\uff0c\u4ece\u800c\u5206\u79bb\u82af\u7247\u7684\u65b9\u6cd5\u3002\u5f53\u5411\u80cc\u9762\u7684\u80f6\u5e26\u65bd\u52a0\u538b\u529b\u65f6\uff0c\u7531\u4e8e\u80f6\u5e26\u7684\u62c9\u4f38\uff0c\u6676\u5706\u5c06\u88ab\u77ac\u95f4\u5411\u4e0a\u9686\u8d77\uff0c\u4ece\u800c\u4f7f\u82af\u7247\u5206\u79bb\u3002\u76f8\u5bf9\u4f20\u7edf\u7684\u6fc0\u5149\u5207\u5272\u6cd5SD\u7684\u4f18\u70b9\u4e3a\uff1a\u4e00\u662f\u6ca1\u6709\u7845\u7684\u788e\u5c51\uff1b\u4e8c\u662f\u5207\u53e3\uff08Kerf\uff1a\u5212\u7247\u69fd\u7684\u5bbd\u5ea6\uff09\u7a84\uff0c\u6240\u4ee5\u53ef\u4ee5\u83b7\u5f97\u66f4\u591a\u7684\u82af\u7247\u3002\u6b64\u5916\uff0c\u4f7f\u7528SD\u65b9\u6cd5\u5265\u843d\u548c\u88c2\u7eb9\u73b0\u8c61\u4e5f\u5c06\u5927\u5927\u51cf\u5c11\uff0c\u8fd9\u81f3\u5173\u5b9a\u5207\u5272\u7684\u6574\u4f53\u8d28\u91cf\u3002\u56e0\u6b64\uff0cSD\u65b9\u6cd5\u975e\u5e38\u6709\u671b\u6210\u4e3a\u672a\u6765\u6700\u53d7\u9752\u7750\u7684\u4e00\u9879\u6280\u672f\u3002<\/p>\n<p>\u00a0<\/p>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u516d\u3001\u7b49\u79bb\u5b50\u5207\u5272(Plasma Dicing)<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u7b49\u79bb\u5b50\u5207\u5272\u4f5c\u65f6\u6700\u8fd1\u53d1\u5c55\u8d77\u6765\u7684\u4e00\u9879\u6280\u672f\uff0c\u5373\u5728\u5236\u9020\uff08Fab\uff09\u8fc7\u7a0b\u4e2d\u4f7f\u7528\u7b49\u79bb\u5b50\u8680\u523b\u7684\u65b9\u6cd5\u8fdb\u884c\u5207\u5272\u3002\u7b49\u79bb\u5b50\u5207\u5272\u6cd5\u7528\u534a\u6c14\u4f53\u6750\u6599\u4ee3\u66ff\u4e86\u6db2\u4f53\uff0c\u6240\u4ee5\u5bf9\u73af\u5883\u5f71\u54cd\u76f8\u5bf9\u8f83\u5c0f\u3002\u800c\u4e14\u91c7\u7528\u4e86\u5bf9\u6574\u4e2a\u6676\u5706\u4e00\u6b21\u6027\u5207\u5272\u7684\u65b9\u6cd5\uff0c\u6240\u4ee5\u201c\u5207\u5355\u201d\u901f\u5ea6\u4e5f\u76f8\u5bf9\u8f83\u5feb\u3002\u7136\u800c\uff0c\u7b49\u79bb\u5b50\u65b9\u6cd5\u8981\u4ee5\u5316\u5b66\u53cd\u5e94\u6c14\u4f53\u4e3a\u539f\u6599\uff0c\u4e14\u8680\u523b\u8fc7\u7a0b\u975e\u5e38\u590d\u6742\uff0c\u56e0\u6b64\u5176\u5de5\u827a\u6d41\u7a0b\u76f8\u5bf9\u8f83\u7e41\u7410\u3002\u4f46\u4e0e\u201c\u5200\u7247\u201d\u5207\u5272\u3001\u6fc0\u5149\u5207\u5272\u76f8\u6bd4\uff0c\u7b49\u79bb\u5b50\u5207\u5272\u4e0d\u4f1a\u7ed9\u6676\u5706\u8868\u9762\u9020\u6210\u635f\u4f24\uff0c\u4ece\u800c\u53ef\u4ee5\u964d\u4f4e\u4e0d\u826f\u7387\uff0c\u83b7\u5f97\u66f4\u591a\u7684\u82af\u7247\u3002<\/p>\n<p>\u8fd1\u6765\uff0c\u7531\u4e8e\u6676\u5706\u539a\u5ea6\u5df2\u51cf\u5c0f\u81f330\u03bcm\uff0c\u4e14\u4f7f\u7528\u4e86\u5f88\u591a\u94dc\uff08Cu\uff09\u6216\u4f4e\u4ecb\u7535\u5e38\u6570\u7b49\u6750\u6599\uff08Low-k \uff09\u3002\u56e0\u6b64\uff0c\u4e3a\u4e86\u9632\u6b62\u6bdb\u523a\uff08Burr\uff09\uff0c\u7b49\u79bb\u5b50\u5207\u5272\u65b9\u6cd5\u4e5f\u5c06\u53d7\u5230\u9752\u7750\u3002\u5f53\u7136\uff0c\u7b49\u79bb\u5b50\u5207\u5272\u6280\u672f\u4e5f\u5728\u4e0d\u65ad\u7684\u53d1\u5c55\u4e2d\uff0c\u76f8\u4fe1\u4e0d\u4e45\u7684\u5c06\u6765\uff0c\u7ec8\u6709\u4e00\u5929\u8680\u523b\u65f6\u53ef\u4ee5\u4e0d\u518d\u9700\u8981\u4f69\u6234\u4e13\u7528\u53e3\u7f69\uff0c\u56e0\u4e3a\u8fd9\u5c31\u662f\u7b49\u79bb\u5b50\u5207\u5272\u7684\u4e00\u5927\u53d1\u5c55\u65b9\u5411\u3002<\/p>\n<p>\u968f\u7740\u6676\u5706\u7684\u539a\u5ea6\u4ece100\u03bcm\u523050\u03bcm\u3001\u518d\u523030\u03bcm\u3001\u4e0d\u65ad\u53d8\u8584\uff0c\u83b7\u5f97\u72ec\u7acb\u82af\u7247\u7684\u5207\u5272\u65b9\u6cd5\u4e5f\u4ece\u201c\u63b0\u5f00\uff08breaking\uff09\u201d\u3001\u201c\u5200\u7247\u201d\u5207\u5272\uff0c\u5230\u6fc0\u5149\u5207\u5272\uff0c\u518d\u5230\u7b49\u79bb\u5b50\u5207\u5272\uff0c\u4e0d\u65ad\u53d8\u5316\u53d1\u5c55\u7740\u3002\u65e5\u8d8b\u6210\u719f\u7684\u5207\u5272\u65b9\u6cd5\uff0c\u867d\u7136\u5e26\u6765\u4e86\u5207\u5272\u5de5\u827a\u672c\u8eab\u751f\u4ea7\u6210\u672c\u7684\u589e\u52a0\uff0c\u4f46\u53e6\u4e00\u65b9\u9762\uff0c\u901a\u8fc7\u5927\u5e45\u51cf\u5c11\u534a\u5bfc\u4f53\u82af\u7247\u5207\u5272\u4e2d\u7ecf\u5e38\u51fa\u73b0\u7684\u5265\u843d\u3001\u88c2\u7eb9\u7b49\u4e0d\u826f\u73b0\u8c61\u548c\u5355\u4f4d\u6676\u5706\u4e0a\u82af\u7247\u83b7\u5f97\u91cf\u7684\u589e\u591a\uff0c\u5355\u4e2a\u82af\u7247\u7684\u751f\u4ea7\u6210\u672c\u53cd\u800c\u5374\u5448\u73b0\u51fa\u4e0b\u964d\u8d8b\u52bf\u3002\u5f53\u7136\uff0c\u6676\u5706\u5355\u4f4d\u9762\u79ef\u82af\u7247\u83b7\u5f97\u91cf\u7684\u589e\u52a0\uff0c\u4e0e\u5212\u7247\u69fd\uff08Dicing 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