{"id":229,"date":"2025-09-02T23:30:00","date_gmt":"2025-09-02T23:30:00","guid":{"rendered":"http:\/\/localhost:8080\/sk-hynix-introduces-industrys-first-commercial-high-na-euv\/"},"modified":"2026-06-08T05:30:19","modified_gmt":"2026-06-08T05:30:19","slug":"sk-hynix-introduces-industrys-first-commercial-high-na-euv","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/sk-hynix-introduces-industrys-first-commercial-high-na-euv\/","title":{"rendered":"SK\u6d77\u529b\u58eb\u5f15\u8fdb\u5b58\u50a8\u5668\u4e1a\u754c\u9996\u53f0\u91cf\u4ea7\u578bHigh NA EUV\u8bbe\u5907"},"content":{"rendered":"

\u65b0\u95fb\u6982\u8981<\/strong><\/p>\n

\n

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\u97e9\u97e9\u56fd\u9996\u5c14\uff0c2025\u5e749\u67083\u65e5<\/strong><\/p>\n

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*<\/span> \u6570\u503c\u5b54\u5f84\uff08NA\uff0cNumerical Aperture\uff09\uff1a\u7528\u6765\u8861\u91cf\u900f\u955c\u6c47\u805a\u5149\u7ebf\u80fd\u529b\u7684\u6570\u503c\u3002NA\u503c\u8d8a\u5927\uff0c\u7535\u8def\u56fe\u6848\u7ed8\u5236\u7684\u7cbe\u5bc6\u5ea6\u8d8a\u9ad8\u3002
\n*<\/span> \u9ad8\u6570\u503c\u5b54\u5f84\u6781\u7d2b\u5916\u5149\u523b\u673a\uff08High NA EUV\uff0cHigh Numerical Aperture Extreme Ultraviolet Lithography\uff09\uff1a\u62e5\u6709\u6bd4\u73b0\u6709EUV\u66f4\u9ad8\u6570\u503c\u5b54\u5f84\uff08NA\uff09\uff0c\u53ef\u5927\u5e45\u63d0\u5347\u5206\u8fa8\u7387\u7684\u4e0b\u4e00\u4ee3\u5149\u523b\u673a\u3002\u80fd\u591f\u7ed8\u5236\u5f53\u524d\u6700\u5fae\u7ec6\u7684\u7535\u8def\u56fe\u6848\uff0c\u9884\u8ba1\u5c06\u5728\u7f29\u5c0f\u7ebf\u5bbd\u548c\u63d0\u5347\u96c6\u6210\u5ea6\u65b9\u9762\u53d1\u6325\u5173\u952e\u4f5c\u7528\u3002<\/p>\n

\u00a0<\/p>\n

\"\"<\/figure>\n

\u00a0<\/p>\n

\u5f53\u65e5\u4e3e\u884c\u7684\u8bbe\u5907\u5165\u5382\u5e86\u795d\u4eea\u5f0f\u4e0a\uff0cASML\u97e9\u56fd\u516c\u53f8\u603b\u7ecf\u7406\u91d1\u4e19\u707f\u793e\u957f\u3001SK\u6d77\u529b\u58eb\u672a\u6765\u6280\u672f\u7814\u7a76\u9662\u957f\u517c\u6280\u672f\u603b\u7ba1\uff08CTO\uff0cChief Technology Officer\uff09\u8f66\u5ba3\u9f99\u526f\u793e\u957f\u3001SK\u6d77\u529b\u58eb\u5236\u9020\u6280\u672f\u62c5\u5f53\u674e\u79c9\u8d77\u526f\u793e\u957f\u7b49\u9886\u5bfc\u5171\u540c\u51fa\u5e2d\uff0c\u5e86\u795d\u4e0b\u4e00\u4ee3DRAM\u751f\u4ea7\u8bbe\u5907\u7684\u5f15\u8fdb\u3002<\/p>\n

SK\u6d77\u529b\u58eb\u8868\u793a\uff1a\u201c\u5728\u5168\u7403\u534a\u5bfc\u4f53\u5e02\u573a\u7ade\u4e89\u6108\u53d1\u6fc0\u70c8\u7684\u80cc\u666f\u4e0b\uff0c\u516c\u53f8\u5df2\u6210\u529f\u6784\u5efa\u8d77\u5feb\u901f\u7814\u53d1\u5e76\u4f9b\u5e94\u9ad8\u7aef\u4ea7\u54c1\u4ee5\u6ee1\u8db3\u5ba2\u6237\u9700\u6c42\u7684\u575a\u5b9e\u57fa\u7840\u3002\u901a\u8fc7\u4e0e\u5408\u4f5c\u4f19\u4f34\u7684\u5bc6\u5207\u534f\u4f5c\uff0c\u516c\u53f8\u5c06\u8fdb\u4e00\u6b65\u63d0\u5347\u5168\u7403\u534a\u5bfc\u4f53\u4f9b\u5e94\u94fe\u7684\u53ef\u9760\u6027\u548c\u7a33\u5b9a\u6027\u3002\u201d<\/p>\n

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SK\u6d77\u529b\u58eb\u81ea2021\u5e74\u9996\u6b21\u5728\u7b2c\u56db\u4ee310\u7eb3\u7c73\u7ea7\uff081a\uff09DRAM\u4e2d\u5f15\u5165EUV\u6280\u672f\u4ee5\u6765\uff0c\u6301\u7eed\u5c06EUV\u5e94\u7528\u6269\u5c55\u81f3\u5148\u8fdbDRAM\u5236\u9020\u9886\u57df\u3002\u7136\u800c\uff0c\u4e3a\u4e86\u6ee1\u8db3\u672a\u6765\u534a\u5bfc\u4f53\u5e02\u573a\u5bf9\u8d85\u5fae\u7ec6\u5316\u548c\u9ad8\u96c6\u6210\u5ea6\u7684\u9700\u6c42\uff0c\u5f15\u8fdb\u8d85\u8d8a\u73b0\u6709EUV\u7684\u4e0b\u4e00\u4ee3\u6280\u672f\u8bbe\u5907\u5fc5\u4e0d\u53ef\u5c11\u3002<\/p>\n

\u6b64\u6b21\u5f15\u8fdb\u7684\u8bbe\u5907\u4e3a\u8377\u5170ASML\u516c\u53f8\u63a8\u51fa\u7684TWINSCAN EXE:5200B\uff0c\u5b83\u662f\u9996\u6b3e\u91cf\u4ea7\u578bHigh-NA EUV\u8bbe\u5907\u3002\u4e0e\u73b0\u6709\u7684EUV\u8bbe\u5907\uff08NA 0.33\uff09\u76f8\u6bd4\uff0c\u5176\u5149\u5b66\u6027\u80fd\uff08NA 0.55\uff09\u63d0\u5347\u4e8640%\uff0c\u8fd9\u4e00\u6539\u8fdb\u4f7f\u5176\u80fd\u591f\u5236\u4f5c\u51fa\u7cbe\u5bc6\u5ea6\u9ad8\u8fbe1.7\u500d\u7684\u7535\u8def\u56fe\u6848\uff0c\u5e76\u5c06\u96c6\u6210\u5ea6\u63d0\u53472.9\u500d\u3002<\/p>\n

SK\u6d77\u529b\u58eb\u8ba1\u5212\u901a\u8fc7\u5f15\u8fdb\u8be5\u8bbe\u5907\uff0c\u7b80\u5316\u73b0\u6709\u7684EUV\u5de5\u827a\uff0c\u5e76\u52a0\u5feb\u4e0b\u4e00\u4ee3\u534a\u5bfc\u4f53\u5b58\u50a8\u5668\u7684\u7814\u53d1\u8fdb\u7a0b\uff0c\u4ece\u800c\u786e\u4fdd\u5728\u4ea7\u54c1\u6027\u80fd\u548c\u6210\u672c\u65b9\u9762\u7684\u7ade\u4e89\u529b\u3002\u6b64\u4e3e\u6709\u671b\u5de9\u56fa\u5176\u5728\u9ad8\u9644\u52a0\u503c\u5b58\u50a8\u5668\u5e02\u573a\u4e2d\u7684\u5730\u4f4d\uff0c\u5e76\u8fdb\u4e00\u6b65\u592f\u5b9e\u6280\u672f\u9886\u5bfc\u529b\u3002<\/p>\n

ASML\u97e9\u56fd\u516c\u53f8\u603b\u7ecf\u7406\u91d1\u4e19\u707f\u793e\u957f\u8868\u793a\uff1a\u201cHigh NA EUV\u662f\u5f00\u542f\u534a\u5bfc\u4f53\u4ea7\u4e1a\u672a\u6765\u7684\u6838\u5fc3\u6280\u672f\u3002\u6211\u4eec\u5c06\u4e0eSK\u6d77\u529b\u58eb\u7d27\u5bc6\u5408\u4f5c\uff0c\u79ef\u6781\u63a8\u52a8\u4e0b\u4e00\u4ee3\u534a\u5bfc\u4f53\u5b58\u50a8\u5668\u6280\u672f\u7684\u521b\u65b0\u8fdb\u7a0b\u3002\u201d<\/p>\n

SK\u6d77\u529b\u58eb\u672a\u6765\u6280\u672f\u7814\u7a76\u9662\u957f\u517c\u6280\u672f\u603b\u7ba1\uff08CTO\uff0cChief Technology Officer\uff09\u8f66\u5ba3\u9f99\u526f\u793e\u957f\u8868\u793a\uff1a\u201c\u901a\u8fc7\u6b64\u6b21\u8bbe\u5907\u5f15\u8fdb\uff0cSK\u6d77\u529b\u58eb\u4e3a\u5b9e\u73b0\u516c\u53f8\u672a\u6765\u6280\u672f\u53d1\u5c55\u613f\u666f\u5960\u5b9a\u4e86\u6838\u5fc3\u57fa\u7840\u8bbe\u65bd\u3002\u516c\u53f8\u5c06\u4ee5\u6700\u5148\u8fdb\u6280\u672f\uff0c\u4e3a\u5feb\u901f\u589e\u957f\u7684AI\u548c\u65b0\u4e00\u4ee3\u8ba1\u7b97\u5e02\u573a\u5f00\u53d1\u6240\u9700\u9ad8\u7aef\u5b58\u50a8\u5668\uff0c\u5f15\u9886\u9762\u5411AI\u7684\u5b58\u50a8\u5668\u5e02\u573a\u3002\u201d<\/p>\n

\u00a0<\/p>\n

\"\"<\/figure>\n

\u00a0<\/p>\n

\u5173\u4e8eSK\u6d77\u529b\u58eb<\/strong><\/p>\n

SK\u6d77\u529b\u58eb\u603b\u90e8\u4f4d\u4e8e\u97e9\u56fd\uff0c\u662f\u4e00\u5bb6\u5168\u7403\u9886\u5148\u7684\u534a\u5bfc\u4f53\u4f9b\u5e94\u5546\uff0c\u4e3a\u5168\u7403\u5ba2\u6237\u63d0\u4f9bDRAM\uff08\u52a8\u6001\u968f\u673a\u5b58\u53d6\u5b58\u50a8\u5668\uff09\u548cNAND Flash\uff08NAND\u5feb\u95ea\u5b58\u50a8\u5668\uff09\u7b49\u534a\u5bfc\u4f53\u4ea7\u54c1\u3002\u516c\u53f8\u4e8e\u97e9\u56fd\u8bc1\u5238\u4ea4\u6613\u6240\u4e0a\u5e02\uff0c\u5176\u5168\u7403\u6258\u5b58\u80a1\u4efd\u4e8e\u5362\u68ee\u5821\u8bc1\u5238\u4ea4\u6613\u6240\u4e0a\u5e02\u3002
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\u5a92\u4f53\u5173\u7cfb\u8054\u7cfb\u4eba\uff08Media Contact\uff09<\/strong><\/p>\n

SK hynix Inc.
\nGlobal Public Relations<\/p>\n

Technical Leader
\n\u91d1\u91cc\u5a1c\uff08Lina Kim\uff09\uff0c\u5c39\u67f1\u73c9\uff08Jumin Yoon\uff09<\/p>\n

E-Mail: global_pr@skhynix.com<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"

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