{"id":3082,"date":"2019-10-13T05:31:28","date_gmt":"2019-10-13T05:31:28","guid":{"rendered":"http:\/\/localhost:8080\/euv-technological-innovation-shapes-the-future-of-semiconductors\/"},"modified":"2026-07-29T15:19:35","modified_gmt":"2026-07-29T06:19:35","slug":"euv-technological-innovation-shapes-the-future-of-semiconductors","status":"publish","type":"post","link":"https:\/\/news.skhynix.com\/cn\/euv-technological-innovation-shapes-the-future-of-semiconductors\/","title":{"rendered":"EUV\u6280\u672f\u521b\u65b0\u7ed8\u5236\u534a\u5bfc\u4f53\u84dd\u56fe"},"content":{"rendered":"<p>\u534a\u5bfc\u4f53\u7ec6\u5fae\u5316\uff08Scaling\uff09\u662f\u76ee\u524d\u534a\u5bfc\u4f53\u884c\u4e1a\u6700\u70ed\u95e8\u7684\u8bdd\u9898\u4e4b\u4e00\u3002\u968f\u7740DRAM\u7b49\u7684\u82af\u7247\u5143\u5668\u4ef6\u5728\u5185\u7684\u5927\u90e8\u5206\u7535\u5b50\u5143\u5668\u4ef6\u548c\u5b58\u50a8\u5355\u5143\u8d8b\u4e8e\u8d85\u5c0f\u578b\u5316\uff0c\u5bf9\u4e8e\u9ad8\u5ea6\u96c6\u6210\u6280\u672f\u7684\u9700\u6c42\u4e5f\u9010\u6e10\u63d0\u9ad8\uff0c\u8d85\u5c0f\u578b\u82af\u7247\u5c06\u53ef\u4ee5\u50a8\u5b58\u5e76\u5feb\u901f\u5904\u7406\u5929\u6587\u6570\u5b57\u822c\u7684\u6570\u636e\u91cf\u3002\u5982\u4eca\uff0c\u534a\u5bfc\u4f53\u7ec6\u5fae\u5316\uff08Scaling\uff09\u6700\u4e3a\u6838\u5fc3\u7684\u662f\u65b0\u4e00\u4ee3\u66dd\u5149\u6280\u672f\u2014\u2014\u6781\u7d2b\u5916\u5149\u523b\uff08Extreme Ultra Violet\uff0c\u7b80\u79f0EUV\uff09\u6280\u672f\u3002\u73b0\u5728\uff0cSK\u6d77\u529b\u58eb\u6b63\u81f4\u529b\u4e8e\u5b9e\u73b0\u65b0\u4e00\u4ee3DRAM\u7684\u91cf\u4ea7\u5316\uff0c\u5e76\u5df2\u5728\u97e9\u56fd\u5229\u5ddd\u6b63\u5f0f\u5f00\u5de5\u65b0\u5efa\u4e00\u5ea7\u5c16\u7aef\u7684\u50a8\u5b58\u7c7b\u534a\u5bfc\u4f53\u5de5\u5382\u201cM16\u201d\u3002\u8fd9\u5ea7\u5168\u65b0\u5de5\u5382\u5c06\u4e3aEUV\u5149\u523b\u5de5\u827a\u5f00\u8bbe\u5355\u72ec\u5382\u95f4\u3002<\/p>\n<div style=\"height: 16px; line-height: 16px;\"><\/div>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u201c\u6469\u5c14\u5b9a\u5f8b\uff08Moore\u2019s Law\uff09\u5df2\u7ecf\u7ec8\u7ed3\u201d \u534a\u5bfc\u4f53\u7ec6\u5fae\u5316\u6280\u672f\u9677\u5165\u74f6\u9888<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u534a\u5bfc\u4f53\u7ec6\u5fae\u5316\u5df2\u8fdb\u516510\u7eb3\u7c73\u65f6\u4ee3\uff0c\u4e4b\u524d\u7684\u201c\u591a\u91cd\u6210\u50cf\uff08Multi Patterning\uff09\u201d\u6280\u672f\u5df2\u4e0d\u518d\u594f\u6548\u3002\u56e0\u4e3a\uff0c\u572810\u7eb3\u7c73\u7ea7\u82af\u7247\u5236\u7a0b\u4e2d\uff0c\u4e4b\u524d\u7684\u6c1f\u5316\u6c29\u66dd\u5149\u6280\u672f\uff08Argon Fluoride, \u7b80\u79f0ArF\uff09\u5df2\u7ecf\u9677\u5165\u74f6\u9888\u3002\u8fc4\u4eca\u4e3a\u6b62\uff0c\u534a\u5bfc\u4f53\u884c\u4e1a\u4e00\u76f4\u9075\u5faa\u6bcf\u969424\u4e2a\u6708\u82af\u7247\u96c6\u6210\u5ea6\u7ffb\u4e00\u756a\u7684\u201c\u6469\u5c14\u5b9a\u5f8b\u201d\u3002\u7136\u800c\uff0c\u5982\u4eca\u968f\u7740\u5149\u523b\u5de5\u827a\u96be\u5ea6\u8d8a\u6765\u8d8a\u9ad8\uff0c\u66fe\u7ecf\u8f89\u714c\u6cbf\u7528\u7684\u6469\u5c14\u5b9a\u5f8b\u4e5f\u7ec8\u5c06\u88ab\u6dd8\u6c70\u3002\u3002<\/p>\n<p>\u5149\u523b\u5de5\u827a\u662f\u7528\u6fc0\u5149\u5728\u6676\u5706\u4e0a\u7ed8\u5236\u8d85\u5fae\u7535\u8def\u7684\u534a\u5bfc\u4f53\u5236\u9020\u6d41\u7a0b\u4e4b\u4e00\uff0c\u5176\u7535\u8def\u56fe\u6848\u8f6c\u79fb\u5230\u6676\u5706\u7684\u8fc7\u7a0b\u4e0e\u4f20\u7edf\u76f8\u7247\u7684\u5236\u4f5c\u8fc7\u7a0b\u7c7b\u4f3c\uff0c\u6545\u201c\u5149\u523b\u5de5\u827a\u201d\u7684\u82f1\u6587\u6709\u201cPhoto\u201d\u4e00\u8bcd\u3002\u201c\u5149\u523b\u6cd5\uff08Photolithography\uff09\u201d\u662f\u4e00\u79cd\u56fe\u6848\u8f6c\u79fb\u53ca\u590d\u5370\u6280\u672f\uff0c\u901a\u8fc7\u628a\u5149\u7167\u5c04\u5728\u5305\u542b\u7535\u8def\u56fe\u5f62\u4fe1\u606f\u5e76\u9884\u5236\u6210\u91d1\u5c5e\u56fe\u6848\u7684\u63a9\u819c\u7248\uff08Mask\uff09\u6216\u539f\u88c5\u73bb\u7483\u677f\u4e0a\uff0c\u4ece\u800c\u5b9e\u73b0\u5c06\u51fa\u73b0\u7684\u5f71\u5b50\u590d\u5236\u8f6c\u79fb\u5230\u6676\u5706\u4e0a\u3002\u8fd9\u79cd\u5728\u6676\u5706\u4e0a\u5f62\u6210\u9884\u8bbe\u8ba1\u7684\u56fe\u6848\u4e3a\u534a\u5bfc\u4f53\u5236\u9020\u7684\u5173\u952e\u5de5\u827a\u3002\u5728\u6b64\u8fc7\u7a0b\u4e2d\uff0c\u7535\u8def\u56fe\u6848\u7684\u7ec6\u5fae\u7a0b\u5ea6\u662f\u534a\u5bfc\u4f53\u6280\u672f\u7ade\u4e89\u529b\u7684\u51b3\u5b9a\u6027\u56e0\u7d20\u3002<\/p>\n<p>\u201c\u7ec6\u5fae\u5316\uff08Scaling\uff09\u201d\uff0c\u5373\u7f29\u5c0f\u534a\u5bfc\u4f53\u7535\u8def\u6676\u4f53\u7ba1\u5668\u4ef6\u7535\u95e8\u7684\u957f\u5ea6\u7684\uff0c\u4e00\u76f4\u88ab\u89c6\u4f5c\u4e1a\u754c\u6700\u4e3a\u91cd\u8981\u7684\u8bfe\u9898\u3002\u6676\u4f53\u7ba1\u7535\u95e8\u5c31\u5982\u540c\u4e00\u5ea7\u8fde\u63a5\u6e90\u7ea7\u548c\u6f0f\u7ea7\u7684\u6865\u6881\uff0c\u662f\u8c03\u8282\u7535\u6d41\u7684\u9600\u95e8\u3002\u56e0\u6b64\uff0c\u7535\u95e8\u957f\u5ea6\u8d8a\u77ed\uff0c\u4ece\u6e90\u6781\u6d41\u5411\u6f0f\u6781\u7684\u7535\u5b50\u6570\u91cf\u4e5f\u5c31\u8d8a\u5927\uff0c\u7535\u8def\u8fd0\u884c\u901f\u5ea6\u4e5f\u76f8\u5e94\u8d8a\u5feb\u3002<\/p>\n<p>\u8fd1\u5e74\u4ee5\u6765\uff0c\u534a\u5bfc\u4f53\u66dd\u5149\u8bbe\u5907\u8fdb\u5c55\u8fc5\u901f\uff0c\u5747\u4f7f\u7528\u5e26\u6709\u9ad8\u6570\u503c\u5b54\u5f84\uff08numerical aperture\uff0c\u7b80\u79f0NA\uff09\u7684\u8f83\u5927\u900f\u955c\u6216\u77ed\u6ce2\u5149\u6e90\u3002\u4f46\u5f53\u6805\u6781\u957f\u5ea6\u7f29\u5c0f\u523030\u7eb3\u7c73\u4ee5\u4e0b\u540e\uff0c\u73b0\u6709\u7684\u6db2\u4f53\u6d78\u6ca1\u5f0f\u6c1f\u5316\u6c29\u66dd\u5149\u8bbe\u5907\uff08ArF\uff09\u5c06\u4f1a\u8fbe\u5230\u6781\u9650\u3002\u523018\u7eb3\u7c73\u7684DRAM\u82af\u7247\u91c7\u7528\u7684\u662f\u591a\u91cd\u6210\u50cf\u6280\u672f\uff0c\u4f46\u8fd9\u4f1a\u9020\u6210\u5de5\u5e8f\u589e\u52a0\u3001\u751f\u4ea7\u7387\u4e0b\u964d\u3001\u6750\u6599\u8d39\u4e0a\u5347\u7684\u95ee\u9898\uff0c\u4ece\u800c\u5bfc\u81f4\u6210\u672c\u4e0a\u5347\u3002\u5f53\u5904\u7406\u5de5\u5e8f\u6570\u91cf\u591a\u8fbe500-600\u9053\u65f6\uff0c\u53ef\u89c1\u8be5\u6280\u672f\u5df2\u8d70\u5230\u4e86\u5c3d\u5934\u3002\u89e3\u51b3\u8fd9\u4e00\u95ee\u9898\u7684\u552f\u4e00\u529e\u6cd5\u53d6\u51b3\u4e8e\u77ed\u6ce2\u5149\uff0c\u5229\u7528\u66f4\u52a0\u201c\u7ea4\u7ec6\u7684\u7b14\u89e6\u201d\u7cbe\u7ec6\u5730\u7ed8\u5236\u7535\u8def\u3002<\/p>\n<div style=\"height: 16px; line-height: 16px;\"><\/div>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">EUV\u6210\u4e3a\u6551\u661f<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u4e3a\u4e86\u987a\u5e9410\u7eb3\u7c73\u65f6\u4ee3\u5bf9\u5de5\u827a\u7684\u8981\u6c42\uff0c\u534a\u5bfc\u4f53\u884c\u4e1a\u5b55\u80b2\u4e86\u5168\u65b0\u534a\u5bfc\u4f53\u66dd\u5149\u6280\u672f\u2014\u2014EUV\u3002EUV\u8bbe\u5907\u7531\u8377\u5170ASML\u516c\u53f8\u72ec\u5bb6\u751f\u4ea7\uff0c\u6bcf\u53f0\u8bbe\u5907\u7ea6\u4e3a0.81-1.22\u4ebf\u7f8e\u5143\u3002EUV\u7684\u5149\u6ce2\u957f\u4e3a13.5\u7eb3\u7c73\uff0c\u5927\u5927\u5c0f\u4e8e\u4e4b\u524d\u7684\u6c1f\u5316\u6c29\uff08ArF\uff09\u6fc0\u5149\u6ce2\u957f\uff08193\u7eb3\u7c73\uff09\uff0c\u53ef\u5728\u4e0d\u591a\u91cd\u6210\u50cf\u7684\u60c5\u51b5\u4e0b\u7ed8\u5236\u66f4\u52a0\u7ec6\u5fae\u7684\u534a\u5bfc\u4f53\u7535\u8def\u3002\u800c\u4e14\u8fd9\u9879\u6280\u672f\u8fd8\u80fd\u7b80\u5316\u6210\u50cf\u5de5\u827a\u6d41\u7a0b\uff0c\u56e0\u6b64\u76ee\u524d\u88ab\u89c6\u4e3a\u552f\u4e00\u7684\u7a81\u7834\u53e3\u3002\u9664\u6b64\u4e4b\u5916\uff0cEUV\u76f8\u8f83\u4e8e\u76ee\u524d\u7684\u56db\u91cd\u6784\u56fe\uff08Quadruple Patterning Technique\uff0c\u7b80\u79f0QPT\uff09\u7b49\u591a\u91cd\u6210\u50cf\u6280\u672f\uff0c\u5927\u5e45\u5ea6\u7f29\u77ed\u4e86\u5236\u9020\u65f6\u95f4\u3002<\/p>\n<p>\u7136\u800c\uff0c\u5728DRAM\u82af\u7247\u91c7\u7528EUV\u6280\u672f\u662f\u4e00\u9879\u96be\u5ea6\u6781\u9ad8\u7684\u5de5\u827a\uff0c\u8fd9\u5f80\u5f80\u9700\u8981\u6700\u9ad8\u7aef\u7684\u6280\u672f\u652f\u6301\u3002\u4e5f\u6b63\u56e0\u5982\u6b64\uff0c\u4e1a\u754c\u6b63\u5728\u5bc6\u5207\u5173\u6ce8\u9996\u6279\u57fa\u4e8eEUV\u6280\u672f\u7684DRAM\u91cf\u4ea7\u6295\u5165\u4ea7\u51fa\u6548\u7387\u3002\u636e\u9884\u6d4b\uff0c\u52302020\u5e74\uff0cEUV\u6280\u672f\u5c06\u90e8\u5206\u9002\u7528\u4e8e1Y\u7eb3\u7c73\u7ea7\u4ee5\u4e0b\u7684DRAM\u82af\u7247\u4e2d\u3002<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"aligncenter alignnone size-full wp-image-3110\" src=\"https:\/\/dfovt2pachtw4.cloudfront.net\/wp-content\/uploads\/2019\/10\/13051633\/SK_hynix-EUV-info-1012_Final.png\" alt=\"\" width=\"1000\" height=\"1868\" \/><\/p>\n<div style=\"height: 16px; line-height: 16px;\"><\/div>\n<div style=\"text-align: center;\">\n<div style=\"display: inline-block; max-width: 748px; width: 100%; text-align: left;\">\n<div style=\"height: 2px; background: #666666; margin-bottom: 6px;\"><\/div>\n<h3 class=\"sub-title\" style=\"margin: 0; line-height: 1.4;\">\u5173\u952e\u5728\u4e8e\u653b\u514bEUV\u5de5\u827a\u7684\u6280\u672f\u96be\u5173<\/h3>\n<div style=\"height: 2px; background: #666666; margin-top: 6px;\"><\/div>\n<\/div>\n<\/div>\n<p>\u653b\u514bEUV\u5de5\u827a\u7684\u6280\u672f\u96be\u5173\u5bf9\u4e8e\u884c\u4e1a\u672a\u6765\u81f3\u5173\u91cd\u8981\u3002EUV\u5177\u6709\u88ab\u5305\u62ec\u6c14\u4f53\u5728\u5185\u7684\u5927\u90e8\u5206\u7269\u8d28\u5438\u6536\u7684\u7279\u6027\u3002\u4e3a\u6b64\uff0c\u5f00\u53d1\u4e0e\u6574\u4e2a\u66dd\u5149\u5de5\u827a\u6d41\u7a0b\u76f8\u5173\u7684\u65b0\u6280\u672f\uff0c\u5305\u62ec\u5168\u65b0\u7684\u63a9\u819c\u7248\uff08Mask\uff09\u3001\u5149\u963b\uff08Photoresist\uff09\u548c\u5149\u5b66\u7cfb\u7edf\u7b49\uff0c\u6210\u4e3a\u4e86\u4e00\u9879\u5fc5\u4e0d\u53ef\u5c11\u7684\u524d\u63d0\u6761\u4ef6\u3002\u6b64\u5916\uff0c\u6211\u4eec\u8fd8\u9700\u8981\u5f00\u53d1\u65e0\u7f3a\u9677\u7684\u63a9\u819c\u7248\u548c\u65b0\u7684\u63a9\u819c\u7248\u68c0\u6d4b\u8bbe\u5907\u3002<\/p>\n<p>\u6269\u5927\u6bcf\u5c0f\u65f6\u6676\u5706\u4ea7\u91cf\uff08wafer per hour\uff0c\u7b80\u79f0WPH\uff09\u4e5f\u662f\u4e1a\u754c\u5185\u4e00\u5927\u91cd\u8981\u6311\u6218\u3002ASML\u516c\u53f8\u7684\u6bcf\u5c0f\u65f6\u6676\u5706\u4ea7\u91cf\u4e8e2018\u5e74\u8fbe\u5230125\u5f20\u76ee\u6807\uff0c\u5e76\u8ba1\u5212\u5c06\u57282020\u5e74\u8fbe\u5230155\u5f20\u3002\u800c\u5728\u5149\u6e90\u529f\u7387\u65b9\u9762\uff0c\u6839\u636eDRAM\u5382\u5546\u7684\u6d4b\u8bd5\u7ed3\u679c\u663e\u793a\uff0c\u8be5\u516c\u53f8\u5df2\u8fbe\u5230250\u74e6\u3002\u540c\u65f6\uff0c\u4e00\u4e9b\u534a\u5bfc\u4f53\u5382\u5546\u4eceASML\u516c\u53f8\u5f15\u8fdbEUV\u8bbe\u5907\u540e\u5df2\u7ecf\u6295\u5165\u5f00\u53d1\u76f8\u5173\u5de5\u827a\uff0c\u6b63\u5904\u4e8e\u5404\u9879\u8bbe\u5907\u7684\u5f00\u53d1\u548c\u6d4b\u8bd5\u9636\u6bb5\u3002\u4e1a\u754c\u5219\u5728\u79ef\u6781\u7814\u53d1\u4e0b\u4e00\u4ee3\u66dd\u5149\u6280\u672f\u2014\u9ad8\u6570\u503c\u5b54\u5f84\u5de5\u827a\uff0c\u8fd9\u9879\u6280\u672f\u6216\u5c06\u6570\u503c\u5b54\u5f84\u4ece\u76ee\u524d\u5f00\u53d1\u4e2d\u76840.33NA\u589e\u52a0\u52300.55NA\u3002<\/p>\n<p>\u4e00\u540d\u534a\u5bfc\u4f53\u4e1a\u5185\u4eba\u58eb\u900f\u9732\uff1a\u201cEUV\u66dd\u5149\u6280\u672f\u8981\u60f3\u6295\u5165\u91cf\u4ea7\uff0c\u6211\u4eec\u5728\u4fdd\u8bc1\u6709\u66dd\u5149\u673a\u5185\u90e8\u786c\u4ef6\u3001\u5149\u6e90\u3001\u5149\u963b\uff08Photoresist\uff09\u3001\u63a9\u819c\u7248\u819c\uff08Pellicle\uff09\u7684\u5236\u9020\u6280\u672f\u7684\u540c\u65f6\uff0c\u8fd8\u5fc5\u987b\u8981\u6709\u96f6\u7f3a\u9677\u7684EUV\u63a9\u819c\u7248\u5236\u4f5c\u6280\u672f\u201d\u3002\u4ed6\u8fd8\u5f3a\u8c03\uff1a\u201c\u4e1a\u754c\u6b63\u5728\u7814\u7a76\u5404\u79cd\u68c0\u6d4bEUV\u63a9\u819c\u7248\u5185\u90e8\u7f3a\u9677\u7684\u6280\u672f\uff0c\u4e3a\u4e86\u6539\u5584\u68c0\u6d4b\u5668\u7684\u5206\u8fa8\u7387\uff0c\u6211\u4eec\u5bf9\u4e8e\u66f4\u77ed\u7684\u5149\u6e90\u6ce2\u957f\u548c\u66f4\u9ad8\u7684\u6570\u503c\u5b54\u5f84\u7684\u8981\u6c42\u4e5f\u81f3\u5173\u91cd\u8981\u3002\u201d<\/p>\n<p><!-- namecard --><\/p>\n<div class=\"namecard\" style=\"display: flex; align-items: center; justify-content: center; gap: 20px; margin: 40px auto; padding: 0; width: 100%; max-width: 600px; clear: both;\">\n<p><img decoding=\"async\" class=\"alignnone size-full wp-image-3446\" style=\"margin: 0; padding: 0; display: block; max-width: 100%; height: auto;\" src=\"https:\/\/d3kr8rj3cmzqzl.cloudfront.net\/wp-content\/uploads\/2026\/05\/29185358\/Eunji_Jang_img.png\" alt=\"\" \/><\/p>\n<div class=\"name\" style=\"text-align: left; margin: 0; padding: 0; display: flex; flex-direction: column; justify-content: center;\">\n<p class=\"tit\" style=\"margin: 0 0 6px 0; padding: 0; font-size: 16px; line-height: 1.2; font-weight: bold;\">Eunji, Jang \u64b0\u5199<\/p>\n<p><span class=\"sub\" style=\"margin: 0; padding: 0; display: block; font-size: 14px; line-height: 1.3; color: #333;\">\u65b0\u95fb\u8bb0\u8005\u5728News1\uff0c\u97e9\u56fd\u6700\u5927\u7684\u901a\u8baf\u793e\u4e4b\u4e00<\/span><\/p>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u534a\u5bfc\u4f53\u7ec6\u5fae\u5316\uff08Scaling\uff09\u662f\u76ee\u524d\u534a\u5bfc\u4f53\u884c\u4e1a\u6700\u70ed\u95e8\u7684\u8bdd\u9898\u4e4b\u4e00\u3002\u968f\u7740DRAM\u7b49\u7684\u82af\u7247\u5143\u5668\u4ef6\u5728\u5185\u7684\u5927\u90e8\u5206\u7535\u5b50\u5143\u5668 [\u2026]<\/p>\n","protected":false},"author":2,"featured_media":3080,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"_migrated_source_id":3109,"footnotes":"","_members_access_role":[],"_members_access_error":""},"categories":[6],"tags":[889,246,890],"class_list":["post-3082","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-story","tag-euv","tag-m16","tag-890"],"acf":[],"_links":{"self":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/3082","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/comments?post=3082"}],"version-history":[{"count":5,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/3082\/revisions"}],"predecessor-version":[{"id":5885,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/posts\/3082\/revisions\/5885"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media\/3080"}],"wp:attachment":[{"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/media?parent=3082"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/categories?post=3082"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/news.skhynix.com\/cn\/wp-json\/wp\/v2\/tags?post=3082"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}