SK hynix is accelerating its efforts to tackle the climate crisis. At the heart of this initiative is the Carbon Management Committee (CMC), established in 2022 to bring together technical experts from various fields including research, manufacturing, facilities, environment, and procurement. Since its formation, the committee has worked relentlessly to implement company-wide strategies to achieve net zero1 by 2050.
1Net Zero: The objective of reducing greenhouse gas emissions to a level where the amount of emissions is equal to the amount of those absorbed and removed, resulting in a state where the actual greenhouse gas emissions are zero.
Comprised of 12 specialized subcommittees, the CMC drives greenhouse gas (GHG) reduction efforts to cut emissions for each scope2. The committee has already achieved significant milestones as it works toward its net zero goal, including the development of neon gas recycling technology, alternative gases, and high-efficiency, low-power scrubbers.
2Scope: Greenhouse gas emissions are categorized into Scope 1 (direct emissions), Scope 2 (indirect emissions), and Scope 3 (all other indirect emissions).
This article will focus on a project by the CMC’s Low-Power Pump Introduction subcommittee to develop low-power vacuum pumps and improve existing models, marking another step toward reaching net zero by 2050.
(From left) Members of the CMC’s Low-Power Pump Introduction subcommittee: Jungbin Lee (Technical Leader [TL] of Components Standardization), Seho Lee (TL of ThinFilm Technology Strategy), Haeyong Sung (Team lead of Components Standardization), Jinsik Yoo (TL of Components Standardization), and Seungwon Choi (TL of Components Standardization)
Low-Power Pumps: Advancing Semiconductor Miniaturization & GHG Reduction
Pumps play a vital role in determining the quality and yield of semiconductors by creating high-vacuum environments and eliminating impurities in increasingly miniaturized semiconductor processes. They account for approximately 15% of the total electricity usage of a fabrication plant (fab). The project therefore aimed to minimize the electricity consumption of pumps by introducing new low-power pumps and enhancing the energy efficiency of existing models, ultimately reducing Scope 23 emissions.
3Scope 2: Indirect GHG emissions associated with the purchase and use of electricity, steam, heat, or cooling.
By implementing changes to motors, materials, structures, and introducing a new architecture, the team successfully developed low-power pumps to be deployed across existing and newly constructed SK hynix fabs. Efforts to reduce the capacity of existing pumps, such as lowering their revolutions per minute (RPM)4, have further cut power consumption. These upgrades will be applied to processes such as etching5 in existing fabs.
4Revolutions per minute (RPM): A measure of the speed at which a pump’s motor rotates, specifically the number of rotations around a fixed axis in one minute. Lowering the RPM reduces power consumption while maintaining the necessary operational performance.
5Etching: A process in semiconductor manufacturing where materials are removed from a wafer’s surface using chemicals or plasma to create precise patterns for circuits.
To learn more details about this remarkable achievement, the SK hynix Newsroom spoke with three members of the Low-Power Pump Introduction subcommittee: Jinsik Yoo and Jungbin Lee of Components Standardization and Seho Lee of Thin Film Technology Strategy.
(From left) Seho Lee, Jinsik Yoo, and Jungbin Lee discuss their project to develop low-power pumps
A Leap Forward: New Pumps Consume Nearly 40% Less Power Than Predecessors
In the first quarter of 2024, SK hynix began evaluating the newly developed low-power pumps for potential adoption. By the third quarter of the same year, the company started introducing these pumps in existing fabs through strategic investments. For the M15X fab and the Yongin Semiconductor Cluster, which are both currently under construction, the company plans to fully apply these new pumps only to processes that have been thoroughly evaluated. SK hynix also intends to expand the adoption of these low-power pumps to additional processes in the future.
During the initial evaluation phase in the first quarter of 2024, the team found that reducing the pump capacity in etching processes from 30,000 liters to 20,000 liters did not significantly impact semiconductor quality or yield. As a result, new investments in etching processes since the third quarter of 2024 have involved reducing pump capacity, in addition to incorporating low-power pumps, to maximize energy efficiency.
“By introducing the low-power pumps and reducing pump capacity, we have significantly cut power consumption. This is expected to not only lower carbon emissions but also contribute to savings in investments, repairs, and operating costs,” Jinsik Yoo explained.
Based on the main process standards of the existing M14 fab, it is estimated that using the low-power pumps rather than conventional models in the fabs currently under construction could decrease pump power consumption by 39.7%. This reduction in power consumption will substantially cut carbon emissions from electricity generation to help lower Scope 2 emissions.
The new low-power pumps consume significantly less power than their predecessors
Optimizing Existing Pumps: Cutting Power Consumption Through RPM Adjustment
In addition to developing low-power pumps, the project also focused on reducing the power consumption of existing pumps. “We could not feasibly replace every pump,” Jungbin Lee noted. “Therefore, the most effective path forward was to minimize the energy usage of our existing pumps, leading to many discussions to find the optimal solution.”
Following extensive talks, the Low-Power Pump Introduction subcommittee proposed reducing power consumption by lowering the RPM of existing pumps. To ensure this method would not affect ongoing processes, they conducted thorough Proof of Concept (PoC) verification, which included theoretical analysis, simulations, and on-site evaluations.
The verification process proved to be particularly challenging due to the variety of pump models from different manufacturers. Collaborating closely with field engineers, the team tested each pump individually to analyze yields and potential consequences of the RPM reduction.
After completing rigorous theoretical analysis and simulation modeling, the subcommittee piloted RPM reductions in select pumps used for the etching process and confirmed the change had no significant impact on the process yield. Encouraged by the pilot’s success, the team expanded evaluations at the M15 and M16 fabs.
“Once the process evaluations are complete and the RPM reductions are applied across the entire etching process at the M15 and M16 fabs, we expect to reduce average pump power consumption by 16.7%,” said Jinsik Yoo. “This improvement will cut electricity costs and help to reduce carbon emissions.”
By lowering pump RPM, the CMC expects to achieve key power savings
Shared Values & Collaboration: Key to the Successful Development of Low-Power Pumps
One key factor in the project’s success was the subcommittee’s strong collaboration with five pump partner companies and field engineers. “Thanks to this cooperation, where everyone shared the company’s goal of achieving net zero by 2050, we were able to develop and validate the new low-power pumps in a timely manner,” noted Seho Lee.
“Developing these innovative pumps presented significant challenges as there was limited data in this emerging field,” Jinsik Yoo added. “However, the proactive spirit of our partners, including their willingness to directly coordinate with their overseas headquarters, ensured the smooth and successful execution of the project.”
Field engineers also played a crucial role in the project’s success. Jungbin Lee said: “Engineers balanced their regular duties while taking on this project’s tasks such as analyzing equipment conditions and verifying test materials. Despite the challenges, their commitment to reaching the company’s 2050 net zero goal drove us to achieve the results we see today.”
The Low-Power Pump Introduction subcommittee actively supported various aspects of the project to ensure the seamless integration of new pumps into production. In particular, the subcommittee proactively assisted the process by estimating the additional costs expected from the introduction of the new pumps and preparing expenses and investment support in advance.
(From left) Seho Lee, Jinsik Yoo, and Jungbin Lee are determined to complete the pump project and achieve net zero by 2050
Reflecting on this collaborative triumph, Seho Lee said: “This project goes beyond sustainable management. It aims to protect the climate of our one and only planet, so I took a more active approach. This project made me realize that our pump partner companies and field engineers are united by shared values.”
Looking ahead, Jungbin Lee expressed his commitment to successfully completing the ongoing project and continuing the work to achieve net zero by 2050. “Building on the success of this project, we will also be leveraging AI technology in the future to optimize low-power pump management,” he said. “By selecting the optimal pump models and deploying them in the most effective locations, we aim to further reduce energy consumption and move closer to achieving our 2050 net zero goal.”